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Static-Dissipative PVC Eliminates
Contamination Magnets
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Surface resistivity of 107
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Resists acids and
corrosive chemicals
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Eliminates particle
attraction and build-up
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Renders nonconductive
plastics obsolete
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Reticle Storage Cabinets
- Protects sensitive reticles and photomasks against contaminants
- Integral HEPA filter/fan module washes stored parts with
particle-free air
- Electropolished 304 stainless steel slide-out drawers on
noncontaminating runners provide full access to every inch
of storage space
- High-capacity configurations for vertical or horizontal
reticle storage in all standard cassette sizes
- Locking casters allow safe, easy parts transfer
- All tray styles are compatible with Terra's Automated
Stockers to allow cross-loading
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Horizontal Storage Cabinet
Precision-routed HDPE slides hold cassettes at a 2°
angle from horizontal for secure positioning. Transparent
side panels made of acrylic or static-dissipative PVC.
Model shown: No. 3505-03; Capacity: 144 cassettes for
6-inch reticles. |
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| Unique slides provide high-density storage while
affording convenient access |
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Vertical Storage Cabinet
Electropolished 304 stainless steel trays hold reticles vertically.
Transparent side panels made of acrylic or static-dissipative
PVC. Model shown: No. 9130-03; Capacity: 450 cassettes
for 6-inch reticles. |
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| Several standard capacities, with static-dissipative
or acrylic side panels |
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