Wafer Box Carts

Model Shown: No. 9600-14, Rod Shelf Cart

Also available with sealed, nitrogen-purged plastic shell to create a low-humidity transport and storage environment. Model Shown: No. 3505-05 Perforated Shelf Cart

• Certified Class 1 compatible by an independent test laboratory
• UltraClean™ electropolished 304 stainless steel surfaces wipe down clean, without snagging wipers or sloughing particles
• Angled shelves position wafer boats securely against retaining rails
• Spring-loaded locking polyurethane casters ensure smooth rolling to protect delicate wafers during transit
• Standard sizes available for all lot box sizes, including 300mm wafers

These ultra-clean carts are designed specifically for wafer boat transport. Rod shelf models feature .25-diameter rods welded on 2" centers. Perforated shelf models feature .5-diameter cut-outs. Both designs optimize air flow-through and minimize the chance of particle accumulation.