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Model Shown: No. 9600-14
Rod Shelf Cart |
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Wafer Box Carts
- Certified Class 1 compatible by an independent test laboratory
- UltraClean™ electropolished 304 stainless steel surfaces
wipe down clean, without snagging wipers or sloughing particles
- Angled shelves position wafer boats securely against
retaining rails
- Spring-loaded locking polyurethane casters ensure smooth
rolling to protect delicate wafers during transit
- Standard sizes available for all lot box sizes, including
300mm wafers
These ultra-clean carts are designed specifically for wafer
boat transport. Rod shelf models feature .25-diameter rods
welded on 2" centers. Perforated shelf models feature .5-diameter
cut-outs. Both designs optimize air flow-through and minimize
the chance of particle accumulation.
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Also available with sealed, nitrogen-purged
plastic shell to create a low-humidity transport
and storage environment. |
Model Shown:
No. 3505-05 Perforated Shelf Cart
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| Wafer
Box Carts |
Shelf
Type |
Overall
Dimensions
(including
Handle) |
Wafer
Box Capacity* |
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| 150mm |
200mm |
300mm |
Cat.
# |
$/Each |
| Rod |
29.5"W
x 16.1"D x 40"H |
4 |
4 |
4 |
9600-14 |
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Perforated |
50.5"W
x 26.5"D x 42.2"H |
12 |
12 |
8 |
3505-05 |
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* Capacities based on the following
Empak cassette models: P/N HA 150 (150mm), HA200
(200mm), HA300 (300mm) |