Temperature Control Modules |
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Constant Temperature Control System
With a heater and refrigeration module working together to maintain a specific temperature, this constant temperature control system offers a more powerful alternative to Terra's flow-through Process Gas Cooler. This system consists of compressor/condenser unit and heater, mounted inside a 304 stainless steel housing, and an evaporator cooler, mounted inside the chamber. The closed-loop refrigeration unit operates with an environmentally friendly coolant (CFC free) and uses a RTD sensor, which provides continuous temperature display and overtemperature protection with an internal bypass to prevent temperature overshoot. The system's evaporator cooler, mounted in an aluminum housing, includes an integral fan that recirculates process gas inside the chamber through the cooling coils. Standard controller allows user to establish a constant temperature set point. A PLC controller, programmed for multiple temperature cycles, is available on an optional basis. Double-Wall, Insulated Glove Boxes Available!—
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If your application calls for heating or cooling, Terra will modify any standard glove box to produce a more thermally efficient enclosure. In most cases, these modifications include a double-wall design with 2" to 4" (51 mm to 102 mm) of polyurethane insulation, depending on the process temperature. Call Terra to discuss your particular requirements! |
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Terra Universal's Process Gas Heater provides a safe and highly accurate way to enhance a variety of semiconductor and other processing operations. Programmable Controller Ensures Safe, Clean Heating, Provides Overtemperature Protection Its isolated heating system provides controlled heating without direct contact with the process gas—guaranteeing safe, noncontaminating operation with potentially explosive gases. The "smart" programmable temperature controller monitors and responds to gas temperature measured at the outlet, continuously adjusting the temperature profile and guarding against temperature overshoot. A digital readout toggles between the user-defined set point and the actual gas temperature. The Process Gas Heater comes complete with a temperature controller with digital LCD readout and .125" (3 mm) compression inlet/outlet fittings for gas tubing.
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