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Ideal for processing in vacuums down to 29.9" Hg
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Allows complete transfer of components with no risk of contaminating chamber environment
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Evacuation/refill valve, vacuum gauge allow precise antechamber management (select Vacuum Control Module for automatic control)
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Equipped with 23" sliding tray for easy loading of parts
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Available in aluminum or stainless steel
This vacuum antechamber assures a safe, contamination-free atmosphere for use with Terra's Series 400 chambers.
Available in aluminum or stainless steel, it features dual center-clamped, counterbalanced doors for easy, sure operation and sealing. A sliding tray extends 14" beyond the antechamber opening when fully extended, gliding smoothly on ball bearings. With its high vacuum design and TIG welded structure, this interchange has been tested and certified with no detectable leaks at full vacuum with a helium mass spectrometer calibrated to 3 x 10-10 std. cc/sec. Together with a Terra Vacuum Control Module, it provides completely automated vacuum control at any point you require down to 29.9" Hg.
| Specifications |
| Construction: |
6061 Aluminum (with brass fittings); or stainless steel (with stainless steel fittings); high-vacuum design; TIG welded structure |
| Dimensions: |
15" dia. x 24" long |
| Tray Dimensions: |
12" x 23"; extends to 14" beyond opening for loading |
| Doors: |
Single center-clamped, O-ring sealed, counterbalanced, vertical travel; stainless steel on both models |
| Vacuum Capability: |
1 x 10-3 Torr |
| Vacuum Gauge: |
2.5" compound Bourdon tube dial type |
| Connections: |
1" evacuation valve, .25" backfill valve, .25" IPS plug |
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