Wet Processing and Cleaning Overview
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Terra's modular
designs guarantee maximum value and versatility in– |
| Cleaning
tools and parts used in chemical
vapor deposition, photoresist developing, etching, diffusion
and other wafer fab areas; |
Processing
wafers under the tightest standards for purity, consistency,
and control. |
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Value Engineering
Whichever stations you choose, you'll find flexible
designs that let you specify the processing configuration
for your application—at standard pricing. This
modular approach takes the hassle and expense out
of ordering!
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V.I.M.: Vertically Integrated
Manufacturing
As a manufacturer, Terra controls all aspects of the
fabrication, from material specification to final
cleaning & packaging. Your system is engineered
as a system, from start to finish.
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Complete Facility Integration
Terra's engineers and installation
technicians work with yours to ensure full compatibility
with on-demand centralized chemical delivery systems,
fire and other safety programs, chemical and exhaust
disposal systems, and other facility requirements.
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- Fire Detection/Suppression
Systems
Specify the fire safety measures for your application:
304 stainless steel construction; IR-based, dual-wavelength
fire detection sensors; fire suppression systems (CO2
or water), fire-activated exhaust dampers.
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Robotic Transfer Mechanisms
Select rotary or linear systems for automatic
wafer transfer and processing. End effectors and control
systems are available for any application.
- Final Cleanroom Cleaning,
Packaging
On demand, final cleaning and packaging are performed
to your specifications in Terra's on-site cleanroom
(call for details).
- Custom Work
Put Terra's comprehensive design and fabrication capabilities
to work on your requirements!
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Versatile Deck Configurations |
Full Line of Processing Baths |
Rotary and Linear Transfer Mechanisms |
PLC Controls |
Sinks Customized to Your Specs! |
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Configure a System
to Your Specs! |
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Modular
Wet Processing Stations feature separate benches
and filter/blower modules. |
|
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Wet Processing
Cabinets
integrate the wet bench and filter/blower housing in a
single cabinet |
- Configure process baths in single or double row
to suit your workflow
- Fits under Terra's Laminar Flow Station for versatile
airflow control
- Bath controls can be isolated in overhead or side
panel
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- Fully integrated cabinet with convenient controls
& air flow controls
- 304 Stainless steel and polypropylene shell construction
- Versatile design accommodates most configurations
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System Options
Whatever your configuration, Terra will
deliver a complete turnkey system, ready for operation! |
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