Terra manufactures Semiautomatic Wet Processing Stations
with either rotary or linear transfer mechanisms. Once wafer
cassettes are loaded onto the end-effector, these systems
perform transfer and agitation functions safety, cleanly,
and consistently—for process results you can count on!
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Pre-Diffusion Clean
with Rotary Transfer |
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Rotary Transfer Mechanism
Provides high-precision 360° motion. An 8-recipe
keypad allows complete control over time, temperature,
rinsing and agitation cycles. All deck-top components
are sealed in a polypropylene housing that protects
the robot mechanism against corrosive chemistries and
ensures contamination-free operation. (304 Stainless steel
models are also available for use with solvents.) This
system is available with a wide range of end-effectors
(gripper systems), in PVDF, 304 stainless steel, quartz,
Teflon, and polypropylene, to accommodate virtually
all wafer cassette sizes. Choose among several control
options, including a PLC and Graphical User Interface
(GUI).
Let Terra engineer a system to your specs!
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Oxide Etch with
Linear Transfer |
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Linear Transport Mechanism
Available for acid or solvent processing, with labyrinth
seals, this robotic system provides noncontaminating,
two-axis transfer motion along the front or rear edge
of Terra's Wet Processing Cabinets. Active and passive
grippers are available, in a variety of materials, to
fit most wafer cassettes (4", 5", 6", and 8"), as well
as flat panel displays to 42".
Call Terra for information on a linear system for
your application!
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