Fire Detection System
- Factory Mutual approved specifically for semiconductor
wet bench electro-optical fire detection
- Multi-spectral IR flame detector detects all types of
fires, even through gases and vapors
- Unique two-stage fire detection response issues warning
alert and signals for suppression release and wet bench
shut-down (suppression system optional)
- Acid-resistant polypropylene housing is ideal for installation
in wet processing benches
This multi-spectral electro-optical fire detector system senses
all hydrocarbon and non-hydrocarbon fires, even through the
gases and vapors found in chemical wet benches.
It uses multi-spectral Wide Band IR™ (1.2 - 3.5 micron
bandwidth), Near Band IR™ (.7 to 1.1 micron bandwidth),
and Visible Band (0.4 - 3.5 micron bandwidth) to see all fire
types. The Wide Band IR allows the detector to see through acetone,
smoke, chemical gasses and vapors.
Unique Two-Stage Fire Detection Response
The ALERT First Stage response initiates audible and visible
signals, notifying the operator of an existing fire of 4kW
or more. When a fire with a heat energy output of 3kW (equivalent
to a 4"-diameter polypropylene pool fire) is exceeded, the
fire detector will record a time- and date-stamped FirePic™
digital fire signature. This numerical spectral evidence enables
analysis of the probable cause of the fire event for use in
preventing a subsequent, damaging fire.
In situations where the fire self-extinguishes without the
release of a suppression agent, the in-process integrated
circuit wafer batch can be successfully completed.
If the fire does not self-extinguish, the Second Stage ALARM
activates and signals for immediate suppression release once
the fire exceeds a threshold of 13 kW (the equivalent of an
8"-diameter polypropylene pool fire).
Each fire detector has an exceptionally wide, 120° field
of view to provide optimal coverage of the fire-threat area.
Detectors should be installed in adequate numbers and positions
to ensure that any possible fire is in the field of view of
at least one fire detector, unobstructed by plastic partitions.
Note: Fire suppression equipment
must be ordered separately. Call to discuss your application.
See application illustration for suggested configuration.
Part numbers below include installation in specified Terra
wet processing station. |
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