Terra Universal - Critical Environment Solutions
Preferred Client

RCe Recirculating Heater/Chiller
RCe Recirculating Heater/Chiller
Controls recirculating chilling and heating in A and F baths. Includes low-watt density heater for a long, reliable life and improved MTBF. Operates on CFC-free HCFC-22 coolant. Low-volume de-aerating reservoir lowers the cost of ownership through shorter fill-up and air-purge times. Available in several heating and cooling capacities, for either 120-2208VAC or 230VAC operation. Temperature range: 18 - 40°C. Call Terra for complete ordering information.

Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.
Processing Modules
Model below accommodates a single 6" (152 mm) wafer cassett.
Call Terra for other sizes. (Prices include installation)

Cat. # $/Each
Rce Series* 7018-34 Login
Corresponding Controls
x=Standard
o=Optional 		Heat Cool Liquid
Level
Sensor
Alarm		 Timer Over/
Under
Temp
Alarm		 Pump/
Filter
Control 		Recirculat.
Pump 		Drain
Valve
Control 		Spray
Nozzle
Control 		DI H2O
Injection 		Cat. # $/Each
C21bLSS x x x x x
x


7018-37 Login
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
*Selection of RCe module provides heating/cooling capabilities to the A or F Serries modules.. Model listed is polypropylene; PVDF also available.
24-hour sales and tech phone support, M - F
Technical Questions?
Schedule a call with a
Terra tech specialist.