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Terra Part # Price Ships in
120 V Silicone Nitride 7018-31 19667 $8,639 5-7 Days 2
Ships Free Free shipping in contiguous USA In stock soon
Subambient 7018-30 28399 $16,174 5-7 Days 3
Ships Free Free shipping in contiguous USA In stock soon
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Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

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Usually Ships in:
Free shipping in contiguous USA
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
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Features & Benefits

Features & Benefits

Learn More: Wet Processing Materials
Process Control, Safety, and Consistency
Polypropylene
  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
Quartz
  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart
Commercial or Generic Name Process Chemical Composition Concentration Typical Temperature Recommended Product
Aqua Regia Gold Etchant Hydrochloric Acid (HCl)
Nitric Acid (HNO3)
75%
25%
90° C Series
Buffered Oxide
Etch (BOE)
Etch SiO2 Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
40% 15-40°C
Ambient
A Series
RCe Series
CP8 Etch Nitric Acid (HNO3)
Hydrofluoric Acid (HF)
  Ambient A Series
Etch (Indium)
Molybdenum Platinum
Nichrome
Etch Hydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
37-38%
70-71%
  QA Series
Metal Etch Etch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87% 30-60°C QA Series
Nitride Etch Etch Phosphoric Acid (H3PO4)
DI Water (H20)
85-87%
15-13%
150-185°C Nb Series
Organic Stripper Resist Removal PRS-1000
S-43
Lozolin
No Phenol-922
Full strength Room Temperature
120°C
Nb Series
Oxide Resist Strip SiO2 Resist Stripping Sulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96% QA Series
Phenolic Stripper Resist Removal J100
Bermar 712D
R-10
  95-100°C C Series
Resist Series (Metalized) Resist Removal Chromic Sulfuric Acid (CrO3+H2SO4)     A Series
R.C.A. Clean Pre-Diffusion Cleans
Quartzware
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40% 75-85°C Qa Series
Silicon Etch Etch Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
  Ambient A Series
Sirtl Etch Etch Chromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
  Ambient A Series
Slope Etch Etch Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
  55°C Qa Series
Standard Resist Strip (do not use w/aluminum) SiO2 Resist Strip Sulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96% 110-140°C Qa Series
2:1 Etch Etch DI Water (H2O)
Hydrofuoric Acid (HF)
  Ambient A Series
Wafer Rinsing Rinsing DI Water (H2O) 100% Ambient DR-Series
Particle Trapping Test

Protecting Personal Information

Terra is committed to ensuring that our customer’s personal information is secure. In order to prevent unauthorized access or disclosure, Terra has developed procedures to safeguard and secure information collected online and offline.

Long-Standing Industry Expertise

For 45 years, Terra has served the life science, academic research, pharmaceutical, biotechnology, medical device, semiconductor and aerospace markets. We intimately understand the cGMP, GLP, ISO, ASTM , IEST and OSHA requirements.

Top-Tier Clients

Terra’s key customers include some of the largest research labs, production facilities and universities in the world
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