Wet Processing Cabinet

• Polypropylene stations are ideal for acids and caustic chemistries (shown with optional gooseneck faucets, spray guns, casters and duplex power outlets) Fire-retardant polypropylene available!

  Incorporates all processing components into one self-contained, easy-to-clean system
• Isolated control panel allows safe, convenient operation of baths, rinsers, and other process modules
• Select all-polypropylene or 304 stainless steel shell
• Standard system includes sliding access shield and fluorescent illuminator
• Custom engineered to meet specific application requirements!

304 Stainless Steel Wet Processing Cabinet Recommended for applications using solvents or flammables.

The standard models listed below include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator. A control panel to the right of the process deck provides safe, convenient access to all system controls (order processing sinks and baths separately). Support posts with polypropylene leveling feet provide stable positioning. Select optional 4" (102 mm) -diameter retractable casters for more convenient mobility.

You Specify the Process Workflow—Let Terra Take Care of the Rest!
Whatever your application, Terra engineers will work with yours to develop a deck configuration that's right for your process. One cabinet can house up to 14 separate processing baths, rinsers, and other process modules, which can be arranged in a single or double row. A raised lip surrounds the work area to prevent floor spills. A full-length plenum sink located under the work surface contains overflow for easy disposal, and an optional plenum flush quickly empties the plenum through a 2" (51 mm)-diameter drain valve.

Convenient front-panel valves control operation of nitrogen or auxiliary gas equipment, DI water, exhaust venting, and power. The control panel includes power on/off switch, a static pressure gauge (to monitor the exhaust flow), and a system fuse. A storage area below the deck holds collection tanks or reserve chemicals.

The optional Filter/Blower Module provides a vertical laminar flow of HEPA-filtered air for particle-sensitive applications. Exhaust fumes can be ducted through a 10" (254 mm)-diameter flange located on the top of the cabinet (see airflow illustration). Specify other desired flange diameter or location.

Ordering Information

The Wet Processing Stations accommodate up to eight processing modules (rinsing tanks, etching baths, ultrasonic cleaners, hot plates, etc.). Simply select the modules and locations to meet your requirements.	Sample Configurations With Integrated Filter/Blower Housing
	Cleaning Metal Depositions . . . from tubes, and fixtures. Station design: 304 stainless steel. #1 304 Stainless Steel Platform (staging area) #2 Ultrasonic Tank for IPA & acetone clean #3 304 Stainless Steel Rinsing Tank with pneumatic drain valve #4 & #5 Perforated 304 Stainless Steel Deck with DI water/N2 spray guns & gooseneck; drains to carboy
	Post-Diffusion Cleaning . . . of thermocouple probes, quartz tubes, fixtures, and other parts. Station design: polypropylene. #1 Poly- propylene Platform (staging area) #2 Poly- propylene Cleaning Tank (for DI water) with spray bar #3 Poly- propylene Rinsing Tank with pneumatic drain valve #4 & #5 Perforated Polypropylene Deck with DI water/N2 spray guns & gooseneck; drains to carboy
	Oxide Etching . . . of 8" (203 mm) wafers in standard cassettes. Station design: polypropylene. #1 Solid Platform (staging area) #2 F Series Filtered Bath #3 DR Series Dump Rinser #1 with Control (drains to reclamation carboy) #4 DR Series Dump Rinser #2 with Control #5 Polypropylene Utility sink with gooseneck & DI H2O/N2 spray guns
	Solvent Cleaning . . . with polypropylene, quartz and 304 stainless steel baths heated to 60°C #1 Polypropylene Bath for Mask Cleaning #3 304 Stainless Steel Bath for Acetone Cleaning #5 Qa Quartz Bath for Organic Stripper #7 Polypropylene Bath #2 304 Stainless Steel Bath for IPA Cleaning #4 304 Stainless Steel Bath for IPA Cleaning #6 DR Series Rinser #8 Bottle Storage Polypropylene with Perforated Bottom