Robotic Transfer—Precise, Consistent Processing

Terra manufactures Semiautomatic Wet Processing Stations with either rotary or linear transfer mechanisms. Once wafer cassettes are loaded onto the end-effector, these systems perform transfer and agitation functions safety, cleanly, and consistently—for process results you can count on!

Pre-Diffusion Clean with Rotary Transfer           Rotary Transfer Mechanism Provides high-precision 360° motion. An 8-recipe keypad allows complete control over time, temperature, rinsing and agitation cycles. All deck-top components are sealed in a polypropylene housing that protects the robot mechanism against corrosive chemistries and ensures contamination-free operation. (304 Stainless steel models are also available for use with solvents.) This system is available with a wide range of end-effectors (gripper systems), in PVDF, 304 stainless steel, quartz, Teflon, and polypropylene, to accommodate virtually all wafer cassette sizes. Choose among several control options, including a PLC and Graphical User Interface (GUI). Let Terra engineer a system to your specs!
Oxide Etch with Linear Transfer     Linear Transport Mechanism Available for acid or solvent processing, with labyrinth seals, this robotic system provides noncontaminating, two-axis transfer motion along the front or rear edge of Terra's Wet Processing Cabinets. Active and passive grippers are available, in a variety of materials, to fit most wafer cassettes (4", 5", 6", and 8"), as well as flat panel displays to 42". Call Terra for information on a linear system for your application!