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| The Right Way to Rinse —
requires less DI water, less DI water disposal
DI water, and less DI water disposal. |
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DR Series Wafer Dump Rinser
- Natural polypropylene rinser tanks,
DI manifold tubing, spray nozzles, and valves ensure compatibility
with most process chemistries
- Dual overhead spray manifolds with low misting nozzles
eliminate over-spray
- 360° serrated overflow weir enhances particulate
removal
- Large machined dump door accelerates dump time and eliminates
particle entrapment
- Contoured vessel design reduces DI water consumption
- Comes complete with retractable PVC cover
The DR Series Wafer Dump Rinser rinses silicone wafers and
similar products free of acids, solvents, and other processing
solutions. Because it uses less DI water than other models,
it saves on both DI water consumption and disposal expenses.
Water is sprayed from two sources to ensure optimal rinsing:
from spray nozzles located above the wafer cassette and from
spray jets and a nitrogen bubbler located below the cassette.
To ensure product purity, all components are made of natural
polypropylene or PVDF, with no exposed metal. A clear PVC
cover retracts out of the way when not in use.
The DR Series uses a microprocessor controller to provide
versatile, repeatable processing (order below). This controller
allows up to 99 programmable cycles, far more than most
batch operations require. The membrane keypad resists most
acids and solvents, and access coding enhances process security.
| Specifications |
| Materials: |
Natural polypropylene (tank, spray nozzles,
dump door, DI manifold and valve); Teflon tubing harness;
PVC cover (PVDF also available) |
| Electrical: |
105 - 125 VAC, single phase, 24 amps, 50/60Hz
(for controller use only) |
| DI Water Service: |
25 psi (dynamic), 45 psi (all models) |
| Nitrogen Service: |
50 - 60 psi (max) controller; 10 - 15 psi,
nitrogen bubbler (all models) |
|
Controller
(order separately): |
Multifunction microprocessor, membrane keypad.
Includes end-of-cycle alarm (type C15sa) |
|
| Processing
Modules |
Model
below accommodates a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
 |
Cat.
# |
$/Each |
| Dr
Series |
9502-00 |
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|
| Corresponding Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C15sa |
 |
 |
x |
x |
 |
 |
 |
x |
x |
 |
7018-38 |
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|
Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional)
Which Material is
Best? |
Polypropylene
- Economical plastic with broad chemical compatibility
- Ideal for wet processing station panels
- Loses some chemical resistance at high temperatures
- Suitable for HF and KOH processes
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PVDF (polyvinyldilene fluoride)
- Broader range of chemical resistance than polypropylene
- Suitable for high process temperatures
- Ideal for HF and BOE processes at high temperature
|
Quartz
- The preferred material for ultra-pure applications
- Provides greater uniformity in heat transfer than
plastic baths—ideal for very tight temperature
control
- Suitable for most chemicals (but not HF acid)
- Hard surfaces won't scuff, stain, or absorb impurities
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PTFE (Teflon®)
- Resistant to an extremely wide range of chemicals
- Perfect for KOH and HF acid (which etch quartz)
- Softer than quartz, so care must be taken to avoid
scuffing, staining
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