 |
Ensures purity of NH4,
HF, BOE, CH3, COOH,
and HNO3 positive
resist developer |
 |
F Series Subambient Filtered Etch Bath
- Continuously filters process chemistry to increase purity
and maximize product yield
- Reduced acid consumption generally pays for bath in three
months
- Select semiconductor-grade natural polypropylene or PVDF
seamless process tank
- 360° serrated overflow weir enhances particulate
removal
- Pump/filter assembly is easily removed for quick filter
change
- Uniform flow return system ensures a consistent laminar
flow across every wafer at every location—no eddies
or dead spots
This filtered bath is ideal for oxide etching
and other processes using HF acid. Its recirculating system
continuously filters the process chemistry to ensure purity
and reduce consumption. Depending on 10" filter cartridge
selected, these systems provide up to 0.2µ absolute filtration.
The process bath is made of virgin, natural polypropylene
or PVDF. The bath includes a seal-less, nitrogen-purged
process pump. A 360° weir minimizes particle entrapment.
Use of the RCe Recirculating Module provides excellent temperature
control between 18 and 40°C.
Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.
| Processing
Modules |
Model
below accommodates a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
 |
Cat.
# |
$/Each |
| F
Series* |
7018-31 |
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|
|
| Corresponding Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C21bLss |
o |
o |
x |
x |
x |
x |
o |
x |
|
|
7018-37 |
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|
Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional)
*Selection of RCe module provides heating/cooling capabilities to the A or F Serries modules.. Model listed is polypropylene; PVDF also available. |
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