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| Polypropylene stations are ideal for acids and caustic
chemistries (shown with optional gooseneck faucets, spray
guns, casters and duplex power outlets)
Fire-retardant polypropylene available! |
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| 304 Stainless Steel Wet Processing Cabinet Recommended for
applications using solvents or flammables. |
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Wet Processing Cabinet
- Incorporates all processing components into one self-contained,
easy-to-clean system
- Isolated control panel allows safe, convenient operation
of baths, rinsers, and other process modules
- Select all-polypropylene or 304 stainless steel shell
- Standard system includes sliding access shield and fluorescent
illuminator
- Custom engineered to meet specific application requirements!
These self-contained Wet Processing Cabinets provide the perfect
turnkey solution for a wide range of cleaning and processing
requirements.
The standard models listed below include a reinforced cabinet
of the specified size and material, a sliding access shield,
and a fluorescent illuminator. A control panel to the right
of the process deck provides safe, convenient access to
all system controls (order processing sinks and baths separately).
Support posts with polypropylene leveling feet provide stable
positioning. Select optional 4"-diameter retractable casters
for more convenient mobility.
You Specify the Process Workflow—Let
Terra Take Care of the Rest!
Whatever your application, Terra engineers will work with
yours to develop a deck configuration that's right for your
process. One cabinet can house up to 14 separate processing
baths, rinsers, and other process modules, which can be
arranged in a single or double row. A raised lip surrounds
the work area to prevent floor spills. A full-length plenum
sink located under the work surface contains overflow for
easy disposal, and an optional plenum flush quickly empties
the plenum through a 2"-diameter drain valve.
Convenient front-panel valves control operation of nitrogen
or auxiliary gas equipment, DI water, exhaust venting, and
power. The control panel includes power on/off switch, a
static pressure gauge (to monitor the exhaust flow), and
a system fuse. A storage area below the deck holds collection
tanks or reserve chemicals.
The optional Filter/Blower Module provides a vertical laminar
flow of HEPA-filtered air for particle-sensitive applications.
Exhaust fumes can be ducted through a 10"-diameter flange
located on the top of the cabinet (see airflow illustration).
Specify other desired flange diameter or location. |
| Specifications |
| Construction: |
All stress-relieved white polypropylene (0.5" thick)
or all 304 stainless steel. Standard plumbing is PVC (specify
st 304 stainless steel or other desired material). |
| Exhaust: |
Ducted through a standard 10"-diameter flange positioned
at the top rear of the cabinet (see airflow illustration).
Specify other desired flange diameter or location. |
| Storage Cabinet: |
70" or 92"W x 42"D x 12"H; dual sliding doors. |
| Drain: |
2" NPT female, located at bottom of sub-deck plenum. |
| Power: |
120VAC, 60Hz or 220VAC, 50Hz, depending on component
selection. Power outlets available for process equipment. |
| Illuminator: |
Fluorescent, 100 foot candles. Does not disturb air. |
| Controls: |
Instrument panel provides power switch, power indicating
light, light switch, static pressure exhaust meter, and
power fuse. Provisions are made for audible and visible
pressure alarm, visible alarm silence, and for control
of optional processing baths. |
| Dimensions: |
84" or 108"W x 43"D x 72"H (nominal) |
| Filter/Fan Unit: |
Optional FFU generates 650 CFM of air at filter pressure
drop from 0.350" to 0.795" W.G. at 90 FPM. Noise factor:
50 dBA. Filter type: 99.99% efficient HEPA. |
|
Ordering Information
Specify the station of desired the size and material.
| Wet
Processing Cabinets (standard height
=72") |
Overall
Width
(nominal) |
Work
Area
Dimensions
W" x D" |
Polypropylene |
304 Stainless
Steel |
Cat.
# |
$/Each |
Cat.
# |
$/Each |
84" |
72
x 24 |
7018-00 |
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|
7018-01 |
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|
108" |
96
x 24 |
7018-02 |
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|
7018-03 |
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|
| Filter Fan Units |
| Model |
Avg. CFM
CFM
(m3/hr) |
Power |
With
HEPA Filter |
With
ULPA Filter |
| Cat. # |
$/Each |
Cat. # |
$/Each |
| 48" x 24" |
644
(1095) |
120VAC, 50/60Hz
220VAC, 50Hz |
6601-24-H |
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|
6601-24-U |
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|
|
6601-24-H-220 |
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|
6601-24-U-220 |
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|
| 36" x 24" |
477
(811) |
120VAC, 50/60Hz
220VAC, 50Hz |
6601-23-H |
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|
6601-23-U |
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|
|
6601-23-H-220 |
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|
6601-23-U-220 |
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|
Note: All models listed above include
an adjustable PVC sliding sash (to restrict airflow to the work
area), a static pressure exhaust meter (to monitor the pressure differential in the exhaust line)
, and a fluorescent illuminator. All electronic controls are
located on a vertical panel to the right of the work area (left side mounting
may be specified at no extra charge). PLC controllers are also
available.
| The Wet Processing Stations accommodate up to
eight processing modules (rinsing tanks, etching
baths, ultrasonic cleaners, hot plates, etc.). Simply
select the modules and locations to meet your requirements. |
|
Sample Configurations
With Integrated Filter/Blower
Housing |
 |
Cleaning
Metal Depositions
. . . from tubes, and fixtures. Station design:
304 stainless steel. |
#1
304 Stainless Steel Platform (staging area) |
#2 Ultrasonic Tank for IPA
& acetone clean |
#3
304 Stainless Steel Rinsing
Tank with pneumatic drain valve |
#4 & #5
Perforated 304 Stainless Steel Deck with DI water/N2 spray guns & gooseneck; drains to carboy |
|
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Post-Diffusion
Cleaning
. . . of thermocouple probes, quartz tubes, fixtures,
and other parts. Station design: polypropylene. |
#1
Poly-
propylene Platform (staging area) |
#2
Poly-
propylene Cleaning Tank (for DI water) with spray
bar |
#3
Poly-
propylene Rinsing Tank with pneumatic drain valve |
#4 & #5
Perforated
Polypropylene Deck with DI water/N2 spray guns & gooseneck; drains to carboy |
|
|
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Oxide
Etching
. . . of 8" wafers in standard cassettes. Station
design: polypropylene. |
#1
Solid Platform (staging area) |
#2
F Series Filtered Bath |
#3
DR Series Dump Rinser #1 with Control (drains
to reclamation carboy) |
#4
DR Series Dump Rinser #2 with Control |
#5
Polypropylene
Utility sink with gooseneck & DI H2O/N2 spray guns |
|
|
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Solvent
Cleaning
. . . with polypropylene, quartz and 304 stainless steel
baths heated to 60°C |
#1
Polypropylene Bath for Mask Cleaning |
#3
304 Stainless Steel Bath for Acetone Cleaning |
#5
Qa Quartz Bath for Organic Stripper |
#7
Polypropylene Bath |
#2
304 Stainless Steel Bath for IPA Cleaning |
#4
304 Stainless Steel Bath for IPA Cleaning |
#6
DR Series Rinser |
#8
Bottle Storage Polypropylene with Perforated Bottom |
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