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Cleanroom Furnishings

Electropolished Stainless Steel
Work-In-Process (WIP) Racks

Stainless Steel Racks
Rod Shelf WIP Rack
 
 
  • Clean, secure enclosure protects WIP materials from breakage or contamination during processing
  • Ergonomic design increases productivity
  • 17° shelf slope ensures safe product positioning against rear retaining bar
  • ul-clean pro art class 1 2728
    All-electropolished 304 stainless steel construction won't particulate, wipes down without snags
  • Wafer WIP box sizing conserves valuable cleanroom floor space by optimizing shelf capacities
  • Custom dimensions and enclosure panels available—just give us your specs!

These WIP racks safeguard delicate products while making optimal use of valuable cleanroom space.

Certified Class 1-Compatible
Fabricated of 1" (25 mm)-square 304 stainless steel tubes, these racks feature continuous seam welds and extensive surface finishing to prevents snags or crevices. The all-electropolished stainless steel surfaces won't shed particles or outgas chemicals. They have been independently certified compatible for use in Class 1 cleanrooms.

Their shelves optimize the vertical laminar airflow inside a cleanroom and minimize the possibility of particle accumulation. Choose between rod shelves, made of .25" (6 mm)-diameter rods on 2" (51 mm) centers, or shelves with .75" (19 mm)-diameter perforations, which provide approximately 40% open space. Both shelf types are mounted at a 17° angle to position WIP boxes securely against a rear retaining rod. Side flanges keep materials from slipping off the side edges. Shelves are designed for optimal storage densities of common wafer transport cassettes and WIP boxes (see ordering chart for capacities).

All models feature polypropylene leveling feet. Stainless steel mounting plates are also available (see below). Racks can also be customized to accommodate special parts or capacity requirements; just let send us your specifications.

NOTE: 150mm capacities are based on the following: lower end, Fluoroware model PA182-50MB wafer cassette, upper end, Empak model TR15-01 wafer box. 200mm capacities are based on Empak model HA200 wafer box.   NOTE: Capacities are based on Empak model HS300-02B. All capacities are based on one row of cassettes per shelf.
WIP Racks–12" (305 mm) Shelf Clearance (for 150mm and 200mm wafers)
Dimensions
W" x D" x H"
(mm)
No. of
Shelves
Capacity Rod Shelves* Perforated
Shelves
150mm 200mm Cat. # Price Cat. # Price
38 x 12 x 36
(965 x 305 x 914)
2 6-10• 6 9611-00 * Price 9611-24 * Price
38 x 12 x 48
(965 x 305 x 1219)
3 9-15• 9 9611-01 * Price 9611-25 * Price
38 x 12 x 60
(965 x 305 x 1524)
4 12-20• 12 9611-02 * Price 9611-26 * Price
38 x 12 x 72
(965 x 305 x 1829)
5 15-25•• 15 9611-03 * Price 9611-27 * Price
38 x 18 x 36
(965 x 457 x 914)
2 12-20•• 6 9611-04 Price 9611-28 Price
38 x 18 x 48
(965 x 457 x 1219)
3 18-30•• 9 9611-05 Price 9611-29 Price
38 x 18 x 60
(965 x 457 x 1524)
4 24-40•• 12 9611-06 Price 9611-30 Price
38 x 18 x 72
(965 x 457 x 1829)
5 30-50•• 15 9611-07 Price 9611-31 Price
38 x 28 x 36
(965 x 711 x 914)
2 18-40••• 12 9611-08 Price 9611-32 Price
38 x 28 x 48
(965 x 711 x 1219)
3 27-60••• 18 9611-09 Price 9611-33 Price
38 x 28 x 60
(965 x 711 x 1524)
4 36-80••• 24 9611-10 Price 9611-34 Price
38 x 28 x 72
(965 x 711 x 1829)
5 45-100••• 30 9611-11 Price 9611-35 Price
48 x 12 x 36
(1219 x 305 x 914)
2 8-12• 6 9611-12 * Price 9611-36 * Price
48 x 12 x 48
(1219 x 305 x 1219)
3 2-18• 9 9611-13 * Price 9611-37 * Price
48 x 12 x 60
(1219 x 305 x 1524)
4 16-24• 12 9611-14 * Price 9611-38 * Price
48 x 12 x 72
(1219 x 305 x 1829)
5 20-30• 15 9611-15 * Price 9611-39 * Price
48 x 18 x 36
(1219 x 457 x 914)
2 16-24•• 6 9611-16 Price 9611-40 Price
48 x 18 x 48
(1219 x 457 x 1219)
3 24-36•• 9 9611-17 Price 9611-41 Price
48 x 18 x 60
(1219 x 457 x 1524)
4 32-48•• 12 9611-18 Price 9611-42 Price
48 x 18 x 72
(1219 x 457 x 1829)
5 40-60•• 15 9611-19 Price 9611-43 Price
48 x 28 x 36
(1219 x 711 x 914)
2 24-36••• 12 9611-20 Price 9611-44 Price
48 x 28 x 48
(1219 x 711 x 1219)
3 36-54••• 18 9611-21 Price 9611-45 Price
48 x 28 x 60
(1219 x 711 x 1524)
4 48-72••• 24 9611-22 Price 9611-46 Price
48 x 28 x 72
(1219 x 711 x 1829)
5 60-90••• 30 9611-23 Price 9611-47 Price
* Require 2.5" (64 mm)Diameter Mounting Feet, Cat# 1540-04-02
•Cassettes are loaded one row across per shelf
••Cassettes are loaded two rows across per shelf
•••Cassettes are loaded three rows across per shelf
WIP Racks–14" (356 mm) Shelf Clearance (for 300mm wafers)
Dimensions
W" x D" x H"
(mm)
No. of
Shelves
Capacity
150mm
Rod Shelves* Perforated
Shelves
Cat. # Price Cat. # Price
38 x 12 x 38
(965 x 305 x 965)
2 4 9611-48 * Price 9611-60 * Price
38 x 12 x 52
(965 x 305 x 1321)
3 6 9611-49 * Price 9611-61 * Price
38 x 12 x 66
(965 x 305 x 1676)
4 8 9611-50 * Price 9611-62 * Price
38 x 18 x 38
(965 x 457 x 965)
2 6•• 9611-51 Price 9611-63 Price
38 x 18 x 52
(965 x 457 x 1321)
3 9•• 9611-52 Price 9611-64 Price
38 x 18 x 66
(965 x 457 x 1676)
4 12•• 9611-53 Price 9611-65 Price
55 x 12 x 38
(1397 x 305 x 965)
2 6 9611-54 * Price 9611-66 * Price
55 x 12 x 52
(1397 x 305 x 1321)
3 9 9611-55 * Price 9611-67 * Price
55 x 12 x 66
(1397 x 305 x 1676)
4 12 9611-56 * Price 9611-68 * Price
55 x 18 x 38
(1397 x 457 x 965)
2 8•• 9611-57 Price 9611-69 Price
55 x 18 x 52
(1397 x 457 x 1321)
3 12•• 9611-58 Price 9611-70 Price
55 x 18 x 66
(1397 x 457 x 1676)
4 16•• 9611-59 Price 9611-71 Price
* Require 21/2" (64 mm) Diameter Mounting Feet, Cat# 1540-04-02
••Cassettes are loaded two rows across per shelf
Electropolished stainless steel leveling feet for clean rooms  

Mounting Feet

Electropolished stainless steel leveling feet feature cut-outs to allow bench to be bolted to the floor.
Wall-Mount WIP Racks  

Wall-Mount WIP Racks

Made of electropolished stainless steel rods, these wall-mount WIP racks can be modified to accommodate other WIP storage boxes. Call with your requirements!
For 200mm Wafer Lot Boxes
Capacity Cat. # Price
One 9611-91 Price
Two 9611-92 Price
Three 9611-93 Price
Four 9611-94 Price
WIP Rack with Polypropylene Liners  

WIP Rack with Polypropylene Liners

These racks are ideal for WIP storage of quartz tubes and large fab tools that may have surface chemical residues. The polypropylene liners resist most acids and can be easily removed for cleaning. Racks can be customized for your application.

Cat. # Price
Model shown 9611-95 Price

Other WIP Storage Solutions

Select a standard unit, or put Terra's design and fabrication experience to work on a system customized to your specs!

Wall-Recessed WIP Clean Room Storage Cabinet

Wall-Recessed WIP Storage Cabinet
Made of all-electropolished 304 stainless steel, this cabinet fits into a cleanroom wall cut-out to eliminate floorspace requirements altogether!

The model shown features five shelves made of .25"(6 mm)- diameter rods on 2" (51 mm) centers. Dimensions: 48"W x 12"D x 60"H (1219 mm x 305 mm x 1524 mm). Call for specify other sizes or configurations!


Cat. # Price
Wall-Recessed WIP Storage Cabinet 9611-90 Price
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