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CleanStocker™

CleanStocker
  • Ideal for storing heavy reticles, photomasks, and other materials that require a contamination-free environment
  • Rear-mounted HEPA filter/blower module, with filter rated 99.99% efficient @ 0.3µm particles, provides a continuous horizontal laminar flow of particle-free air
  • Sturdy polypropylene construction supports heavy loads and resists a wide range of chemicals
  • Keyed locking latch ensures parts security
  • Available with castered stands to allow easy parts transfer from one processing station to another
Ordering Information
Model Outside
Dimensions*
W" x D" x H"
(mm)
Inside
Dimensions**
W" x D" x H"
(mm)
CleanStocker™ Corresponding Stand
110VAC, 50/60Hz 220VAC, 50/60Hz 4" (102 mm)
high with levelers
Cat. # Price Cat. # Price Cat. # Price
Single Door 26.5 x 20 x 34
(673 x 508 x 864)
23.5 x 18.25 x 27.75
(597 x 464 x 705)
9010-20 call TUI 9010-20-220 call TUI 9010-22A Price
Double Door 26.5 x 20 x 68
(673 x 508 x 1727)
23.5 x 18.25 x 60
(597 x 464 x 1524)
9010-21 call TUI 9010-21-220 Price 9010-22A Price
* Excluding 14.5"W x 11"D x 29"H (368 mm x 279 mm x 737 mm) filter/blower module.
** Usable shelf space. Top Shelf has 5.5" (140 mm) of vertical shelf clearance; others have 6.25'' (159 mm).
CleanStocker
Wafer/CE
The CleanStocker™ provides the perfect storage environment for such particle-sensitive materials as reticles, photomasks, wafers and optical equipment.

Its rear-mounted HEPA filter/blower module incorporates a 740 CFM (1258 m³/hr) variable-speed impeller that directs a continuous flow of particle-free air forward through the storage area. This high-volume flow quickly removes any contaminants that might rest on stored items and keeps other particles from entering the cabinet—even when an access door is opened. Both HEPA filters (rated 99.99% efficient @ 0.3µm particles) and ULPA filters (rated 99.999% efficient @ 0.12µm particles) are available. Vents along the front door allow air to escape.

Three fixed shelves provide plenty of storage space; the top shelf has 5.5" (140 mm) vertical clearance, and all others have 6.25" (159 mm). Select single-door model (with 4 chambers) or double-door model (with 8 chambers). Filter must be ordered separately.
HEPA/ULPA Filters Fit inside the filter/blower module of the CleanStocker™.
Select the filter that meets your particle requirements
(one for single-door cabinet, two for double-door cabinet).

Cat.# Price
HEPA Filters
99.99% efficient at 0.3µm particles
1681-02 Price
ULPA Filters
99.999% efficient at 0.12µm particles
1681-10 Price
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