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Reticle/Photomask Storage Cabinets

Reticle/Photomask Storage Cabinets
Horizontal Storage
  • Securely stores and organizes hundreds of reticle or photomask cassettes in a particle-free environment
  • Select filter/blower system or place beneath cleanroom ceiling filters to provide continuous laminar flow of particle-free air
  • Available in several configurations for secure vertical or horizontal reticle placement
  • Ultra-clean materials ensure noncontaminating storage environment
  • Optimal storage densities conserve valuable cleanroom floor space, enhance inventory organization

 

For Vertical Storage: Photomask/Reticle Cabinets (Order filter/blower module separately)
Nominal Dimensions
inches, includes
10" (254 mm)-
high stand
W" x D" x H" (mm)
No. of
Doors
(optional)
No. of Shelves
(Trays)
Total Reticle
Capacity**
304 Stainless Steel Electropolished
304 Stainless Steel***
Cat. # Price Cat. # Price
28.5 x 25 x 38
(724 x 635 x 965)
1 3 (9) 189 9130-00 Price 9130-02 Price
(28.5 x 25 x 62)
(724 x 635 x 1575)
2 6 (18) 378 9130-01 Price 9130-03 Price
** Based on 7" x 7" x .125D (178 mm x 178 mm x 3 mm) cassettes. Call for systems customized to other cassette sizes.
*** Includes electropolishing of all 304 stainless steel components, including internal and external support frame and trays.
Panels*
Nominal Dimensions
inches, includes
10" (254 mm)-
high stand
W" x D" x H" (mm)
No. of
Doors
(optional)
No. Of Shelves
(Trays)
Total Reticle
Capacity**
Acrylic** Dissipative
PVC
Cat. # Price Cat. # Price
28.5 x 25 x 38
(724 x 635 x 965)
1 3 (9) 189 9130-40 Price 9130-04 Price
28.5 x 25 x 62
(724 x 635 x 1575)
2 6 (18) 378 9130-41 Price 9130-05 Price
* Includes two side and one rear panels of the material indicated, along with hinged door(s).
Reticle/Photomask Storage Cabinets
Vertical Storage
No. 9130-02, with optional Filter Module and Casters.
These cabinets are designed specifically to meet the storage requirements of particle-sensitive photomasks and reticles.

A Clean Storage Environment, Inside and Out
Their versatile design lets you incorporate them into an existing cleanroom with ceiling filter/blower modules. Their open-cage construction allows the laminar flow of filtered air to pass downward through the storage area with minimal resistance or turbulence.

For applications without an in-house source of filtered air, Terra offers a 304 stainless steel filter/blower module that mounts on top of the cabinet. It houses a powerful 740 CFM (1258 m³/hr) blower and your choice of a 99.99% efficient HEPA filter (rated @ 0.3µm particles) or 99.999% ULPA filter (rated at 0.12 µm particles).

Select between horizontal or vertical storage configurations (see ordering chart for reticle capacities).

Optional casters allow you to transport the photomasks or reticles freely around your facility. Configured as mobile units, these cabinets are especially useful for keeping cassettes clean and organized as you move them from a central storage area (such as Terra's FreeFlow Automated Stocker) to an aligning system or other processing station. Casters raise the cabinet an additional 3" (76 mm) off the floor.


Vertical Inventory Storage:
Optimal Storage Density — Call for custom sizes!
Reticle/Photomask Storage Cabinets Reticle/Photomask Storage Cabinets
No. 9130-03, with casters No. 9130-03, with optional Filter Module and casters

Reticle/Photomask Dividers

Reticle/Photomask
Dividers
 

These systems include open-structure shelves mounted on noncontaminating, low-friction runners that provide full access to stored cassettes. Each shelf contains three removable 304 stainless steel trays that provide secure storage of cassettes while allowing the laminar flow of filtered air to pass through the cabinet. Trays include slots on .187" (5 mm) centers for inserting optional reticle dividers, which hold cassettes securely in place and minimize the possibility of vibration that could damage delicate masks and reticles. Electropolishing is available for all 304 stainless steel components to meet ultra-clean material requirements.

Transparent side panels and hinged front double doors are available to fully enclose the cabinets. Select acrylic or static-dissipative PVC, which controls static charges and the particles they attract.

Filter/Blower Module For Vertical-Storage Cabinets
Includes 740 CFM (1258 m³/hr) blower and specified filter. Price includes installation on cabinet. Raises height of cabinet by 13.25" (337 mm). For cabinets shown above.
Power with HEPA filter with ULPA filter
With HEPA Filter With ULPA Filter
Cat. # Price Cat. # Price
110VAC, 50/60Hz 9056-02 Price 9056-00 Price
220VAC, 50 Hz 9056-02-220 Price 9056-00-220 Price
 
Reticle/Photomask Dividers
Feature tension clips to eliminate any possible vibration while cabinet is in transit. For optimal product safety, select one divider for each photomask/reticle cassette.
Cat. # Price
Electropolished 304 Stainless Steel 1688-09 Price
 
Heavy-Duty Casters
Set of four, two with brakes. Raise cabinet an additional 3" (76 mm) off the floor
Cat. # Price
1700-44 Price

Horizontal Inventory Storage
Clean, Secure Storage

Horizontal Inventory Storage
No. 3505-09, shown with optional
Filter Module and casters

These cabinets, made of 304 stainless steel, feature an innovative side-mounting system to increase capacity and guarantee secure positioning. Reticle mounts are made of clean, smooth HDPE for optimal protection. The 10° slot angle ensures that reticles seat securely, eliminating chatter and vibration when the cabinet is in motion. Reticle shelves fully extend on noncontaminating, low-friction runners, providing full parts access. Electropolishing is available for all 304 stainless steel components to meet ultra-clean material requirements.

Side panels are acrylic or static-dissipative PVC, which controls static charges and the particles they attract.

Call for custom sizes!

For Horizontal Storage: Photomask/Reticle Cabinets (Order filter/blower module separately)
Nominal dimensions
inches, Includes 10" (254 mm)-high stand
W" x D" x H" (mm)
No. Of
Draws
No. Of Reticles
per Drawer
Total Reticle
Capacity**
304 Stainless Steel Electropolished
304 Stainless Steel***
Cat. # Price Cat. # Price
27 x 24.25 x 50
(686 x 616 x 1270)
4 36 144 3505-09 Price 3505-10 Price
** Based on 7" x 7" x .625"D (178 mm x 178 mm x 16 mm) cassettes. Call for systems customized to other cassette sizes.
*** Includes electropolishing of all 304 stainless steel components, including internal and external support frame.

Panels*
Nominal dimensions
inches, Includes 10" (254 mm)-high stand
W" x D" x H" (mm)
No. Of
Draws
No. Of Reticles
per Drawer
Total Reticle
Capacity**
Acrylic** Dissipative
PVC
Cat. # Price Cat. # Price
27 x 24.25 x 50
(686 x 616 x 1270)
4 36 144 3505-11 Price 3505-12 Price
* Includes two side and one rear panels of the material indicated.
*Acrylic is damaged by alcohol and other cleaning agents.
Filter/Blower Module For Horizontal-Storage Cabinets
Includes 740 CFM (1258 m³/hr) blower and specified filter. Price includes installation on cabinet. Raises height of cabinet by 13.25" (337 mm). For cabinets shown at right.
With HEPA Filter With ULPA Filter
Cat. # Price Cat. # Price
110VAC, 50/60Hz 3505-06 Price 3505-13 Price
220VAC, 50 Hz 3505-06-220 Price 3505-13-220 Price
  Heavy-duty Casters
Set of four, two with brakes. Raise cabinet an additional 3" (76 mm) off the floor.
Cat. # Price
1700-44 Price
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