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Electropolished 304 Stainless Steel
Work-In-Process (WIP) Racks

Work-In-Process (WIP) Racks
Rod Shelf WIP Rack
  • Clean, secure enclosure protects WIP materials from breakage or contamination during processing
  • Ergonomic design increases productivity
  • 17° shelf slope ensures safe product positioning against rear retaining bar
  • All-electropolished 304 stainless steel construction won't particulate, wipes down without snags
  • Wafer WIP box sizing conserves valuable cleanroom floor space by optimizing shelf capacities
  • Custom dimensions and enclosure panels available—just give us your specs!
WIP Racks–12" (305 mm) Shelf Clearance (for 150mm and 200mm wafers)
Dimensions
W" x D" x H"
(mm)
No. of
Shelves
Capacity Rod Shelves Perforated Shelves
150mm 200mm
Cat. # Price Cat. # Price
38 x 12 x 36
(965 x 305 x 914)
2 6-10• 6 9611-00 * $ 627 9611-24 * $ 578
38 x 12 x 48
(965 x 305 x 1219)
3 9-15• 9 9611-01 * $ 766 9611-25 * $ 702
38 x 12 x 60
(965 x 305 x 1524)
4 12-20• 12 9611-02 * $ 904 9611-26 * $ 920
38 x 12 x 72
(965 x 305 x 1829)
5 15-25• 15 9611-03 * $ 1,042 9611-27 * $ 1,046
38 x 18 x 36
(965 x 457 x 914)
2 12-20•• 6 9611-04 $ 649 9611-28 $ 598
38 x 18 x 48
(965 x 457 x 1219)
3 18-30•• 9 9611-05 $ 795 9611-29 $ 728
38 x 18 x 60
(965 x 457 x 1524)
4 24-40•• 12 9611-06 $ 940 9611-30 $ 859
38 x 18 x 72
(965 x 457 x 1829)
5 30-50•• 15 9611-07 $ 1,085 9611-31 $ 1,084
38 x 28 x 36
(965 x 711 x 914)
2 18-40••• 12 9611-08 $ 749 9611-32 $ 687
38 x 28 x 48
(965 x 711 x 1219)
3 27-60••• 18 9611-09 $ 932 9611-33 $ 853
38 x 28 x 60
(965 x 711 x 1524)
4 36-80••• 24 9611-10 $ 1,117 9611-34 $ 1,018
38 x 28 x 72
(965 x 711 x 1829)
5 45-100••• 30 9611-11 $ 1,301 9611-35 $ 1,278
48 x 12 x 36
(1219 x 305 x 914)
2 8-12• 6 9611-12 * $ 715 9611-36 * $ 573
48 x 12 x 48
(1219 x 305 x 1219)
3 2-18• 9 9611-13 * $ 847 9611-37 * $ 691
48 x 12 x 60
(1219 x 305 x 1524)
4 16-24• 12 9611-14 * $ 1,012 9611-38 * $ 840
48 x 12 x 72
(1219 x 305 x 1829)
5 20-30• 15 9611-15 * $ 1,151 9611-39 * $ 964
48 x 18 x 36
(1219 x 457 x 914)
2 16-24•• 6 9611-16 $ 773 9611-40 $ 624
48 x 18 x 48
(1219 x 457 x 1219)
3 24-36•• 9 9611-17 $ 933 9611-41 $ 768
48 x 18 x 60
(1219 x 457 x 1524)
4 32-48•• 12 9611-18 $ 1,092 9611-42 $ 912
48 x 18 x 72
(1219 x 457 x 1829)
5 40-60•• 15 9611-19 $ 1,252 9611-43 $ 1,149
48 x 28 x 36
(1219 x 711 x 914)
2 24-36••• 12 9611-20 $ 781 9611-44 $ 717
48 x 28 x 48
(1219 x 711 x 1219)
3 36-54••• 18 9611-21 $ 981 9611-45 $ 895
48 x 28 x 60
(1219 x 711 x 1524)
4 48-72••• 24 9611-22 $ 1,275 9611-46 $ 1,076
48 x 28 x 72
(1219 x 711 x 1829)
5 60-90••• 30 9611-23 $ 1,474 9611-47 $ 1,349
* Require 2.5" (64 mm) Diameter Mounting Feet, Cat. # 1540-04-2
• Cassettes are loaded one row across per shelf.
•• Cassettes are loaded two rows across per shelf.
••• Cassettes are loaded three rows across per shelf.


NOTE: Capacities are based on Empak model HS300-02B. All capacities are based on one row of cassettes per shelf.
WIP Racks–14" (356 mm) Shelf Clearance (for 300mm wafers)
Dimensions
W" x D" x H"
(mm)
No.
Shelves
Capacity
150mm
Rod Shelves Perforated Shelves
Cat. # Price Cat. # Price
38 x 12 x 38
(965 x 305 x 965)
2 4 9611-48 * $ 652 9611-60 * $ 600
38 x 12 x 52
(965 x 305 x 1321)
3 6 9611-49 * $ 798 9611-61 * $ 731
38 x 12 x 66
(965 x 305 x 1676)
4 8 9611-50 * $ 942 9611-62 * $ 860
38 x 18 x 38
(965 x 457 x 965)
2 6** 9611-51 $ 675 9611-63 $ 675
38 x 18 x 52
(965 x 457 x 1321)
3 9** 9611-52 $ 828 9611-64 $ 757
38 x 18 x 66
(965 x 457 x 1676)
4 12** 9611-53 $ 980 9611-65 $ 895
55 x 12 x 38
(1397 x 305 x 965)
2 6 9611-54 * $ 645 9611-66 * $ 593
55 x 12 x 52
(1397 x 305 x 1321)
3 9 9611-55 * $ 785 9611-67 * $ 720
55 x 12 x 66
(1397 x 305 x 1676)
4 12 9611-56 * $ 957 9611-68 * $ 874
55 x 18 x 38
(1397 x 457 x 965)
2 8** 9611-57 $ 706 9611-69 $ 648
55 x 18 x 52
(1397 x 457 x 1321)
3 12** 9611-58 $ 873 9611-70 $ 799
55 x 18 x 66
(1397 x 457 x 1676)
4 16** 9611-59 $ 1,041 9611-71 $ 951
* Require 2.5" (64 mm) Diameter Mounting Feet Cat. # 1540-04-2. Otherwise, glide is included.
** Based on cassettes loaded with wafers facing to the side. Models without asterisks load with cassettes facing front.
These WIP racks safeguard delicate products while making optimal use of valuable cleanroom space.

Certified Class 1-Compatible
Fabricated of 1" (25 mm)-square 304 stainless steel tubes, these racks feature continuous seam welds and extensive surface finishing to prevents snags or crevices. The all-electropolished 304 stainless steel surfaces won't shed particles or outgas chemicals. They have been independently certified compatible for use in Class 1 cleanrooms.

Their shelves optimize the vertical laminar airflow inside a cleanroom and minimize the possibility of particle accumulation. Choose between rod shelves, made of .25" (6 mm)-diameter rods on 2" (51 mm) centers, or shelves with .75" (19 mm)-diameter perforations, which provide approximately 40% open space. Both shelf types are mounted at a 17° angle to position WIP boxes securely against a rear retaining rod. Side flanges keep materials from slipping off the side edges. Shelves are designed for optimal storage densities of common wafer transport cassettes and WIP boxes (see ordering chart for capacities)

All models feature polypropylene leveling feet. 304 stainless steel mounting plates are also available (see below). Racks can also be customized to accommodate special parts or capacity requirements; just send us your specifications.

NOTE: 150mm capacities are based on the following: lower end, Fluoroware model PA182-50MB wafer cassette, upper end, Empak model TR15-01 wafer box. 200mm capacities are based on Empak model HA200 wafer box.

Mounting Feet

Mounting Feet
Electropolished 304 stainless steel leveling feet feature cut-outs to allow bench to be bolted to the floor.

Diameter Cat. # Price
2.5" (64 mm)
1540-04-2 $ 25
3.5" (89 mm)
1540-05-2 $ 27

Other WIP Storage Solutions
Select a standard unit, or put Terra's design and fabrication experience to work on a system customized to your specs!
Wall-Recessed WIP Storage Cabinet   Wall-Recessed WIP Storage Cabinet
Made of all-electropolished stainless steel, this cabinet fits into a cleanroom wall cut-out to eliminate floorspace requirements altogether!

The model shown features five shelves made of .25" (6 mm)-diameter rods on 2" (51 mm) centers. Dimensions: 48"W x 12"D x 60"H (1219 mm x 305 mm x 1524 mm). Call for specify other sizes or configurations!

Cat.# Price
9611-90 $ 4,072
   
   
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