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304 Stainless Steel
Work-In-Process (WIP) Racks

Work-In-Process (WIP) Racks
Rod Shelf WIP Rack
  • Clean, secure enclosure protects WIP materials from breakage or contamination during processing
  • Ergonomic design increases productivity
  • 17° shelf slope ensures safe product positioning against rear retaining bar
  • 304 stainless steel (electropolishing available) construction won't particulate, wipes down without snags
  • Wafer WIP box sizing conserves valuable cleanroom floor space by optimizing shelf capacities
  • Custom dimensions and enclosure panels available—just give us your specs!
WIP Racks–12" (305 mm) Shelf Clearance (for 150mm and 200mm wafers)
Dimensions
W" x D" x H"
(mm)
No. of
Shelves
Capacity Rod Shelves Perforated Shelves
150mm 200mm
Cat. # Price Cat. # Price
38 x 12 x 36
(965 x 305 x 914)
2 6-10• 6 9611-00 * $ 700 9611-24 * $ 644
38 x 12 x 48
(965 x 305 x 1219)
3 9-15• 9 9611-01 * $ 860 9611-25 * $ 786
38 x 12 x 60
(965 x 305 x 1524)
4 12-20• 12 9611-02 * $ 1,019 9611-26 * $ 1,022
38 x 12 x 72
(965 x 305 x 1829)
5 15-25• 15 9611-03 * $ 1,175 9611-27 * $ 1,167
38 x 18 x 36
(965 x 457 x 914)
2 12-20•• 6 9611-04 $ 725 9611-28 $ 667
38 x 18 x 48
(965 x 457 x 1219)
3 18-30•• 9 9611-05 $ 893 9611-29 $ 816
38 x 18 x 60
(965 x 457 x 1524)
4 24-40•• 12 9611-06 $ 1,058 9611-30 $ 966
38 x 18 x 72
(965 x 457 x 1829)
5 30-50•• 15 9611-07 $ 1,224 9611-31 $ 1,210
38 x 28 x 36
(965 x 711 x 914)
2 18-40••• 12 9611-08 $ 839 9611-32 $ 769
38 x 28 x 48
(965 x 711 x 1219)
3 27-60••• 18 9611-09 $ 1,050 9611-33 $ 960
38 x 28 x 60
(965 x 711 x 1524)
4 36-80••• 24 9611-10 $ 1,262 9611-34 $ 1,149
38 x 28 x 72
(965 x 711 x 1829)
5 45-100••• 30 9611-11 $ 1,473 9611-35 $ 1,433
48 x 12 x 36
(1219 x 305 x 914)
2 8-12• 6 9611-12 * $ 787 9611-36 * $ 638
48 x 12 x 48
(1219 x 305 x 1219)
3 2-18• 9 9611-13 * $ 939 9611-37 * $ 773
48 x 12 x 60
(1219 x 305 x 1524)
4 16-24• 12 9611-14 * $ 1,128 9611-38 * $ 944
48 x 12 x 72
(1219 x 305 x 1829)
5 20-30• 15 9611-15 * $ 1,288 9611-39 * $ 1,087
48 x 18 x 36
(1219 x 457 x 914)
2 16-24•• 6 9611-16 $ 853 9611-40 $ 697
48 x 18 x 48
(1219 x 457 x 1219)
3 24-36•• 9 9611-17 $ 1,037 9611-41 $ 862
48 x 18 x 60
(1219 x 457 x 1524)
4 32-48•• 12 9611-18 $ 1,219 9611-42 $ 1,027
48 x 18 x 72
(1219 x 457 x 1829)
5 40-60•• 15 9611-19 $ 1,403 9611-43 $ 1,285
48 x 28 x 36
(1219 x 711 x 914)
2 24-36••• 12 9611-20 $ 877 9611-44 $ 803
48 x 28 x 48
(1219 x 711 x 1219)
3 36-54••• 18 9611-21 $ 1,106 9611-45 $ 1,007
48 x 28 x 60
(1219 x 711 x 1524)
4 48-72••• 24 9611-22 $ 1,429 9611-46 $ 1,215
48 x 28 x 72
(1219 x 711 x 1829)
5 60-90••• 30 9611-23 $ 1,657 9611-47 $ 1,515

* Require 2.5" (64 mm) Diameter Mounting Feet, Cat. # 1540-04-2
• Cassettes are loaded one row across per shelf.
•• Cassettes are loaded two rows across per shelf.
••• Cassettes are loaded three rows across per shelf.


NOTE: Capacities are based on Empak model HS300-02B. All capacities are based on one row of cassettes per shelf.

Models without asterisks load with cassettes facing front.

These WIP racks safeguard delicate products while making optimal use of valuable cleanroom space.

Certified Class 1-Compatible
Fabricated of 1" (25 mm)-square 304 stainless steel tubes, these racks feature continuous seam welds and extensive surface finishing to prevents snags or crevices. The 304 stainless steel surfaces won't shed particles or outgas chemicals. They have been independently certified compatible for use in Class 1 cleanrooms.

Their shelves optimize the vertical laminar airflow inside a cleanroom and minimize the possibility of particle accumulation. Choose between rod shelves, made of .25" (6 mm)-diameter rods on 2" (51 mm) centers, or shelves with .75" (19 mm)-diameter perforations, which provide approximately 40% open space. Both shelf types are mounted at a 17° angle to position WIP boxes securely against a rear retaining rod. Side flanges keep materials from slipping off the side edges. Shelves are designed for optimal storage densities of common wafer transport cassettes and WIP boxes (see ordering chart for capacities)

All models feature polypropylene leveling feet. 304 stainless steel mounting plates are also available (see below). Racks can also be customized to accommodate special parts or capacity requirements; just send us your specifications.

NOTE: 150mm capacities are based on the following: lower end, Fluoroware model PA182-50MB wafer cassette, upper end, Empak model TR15-01 wafer box. 200mm capacities are based on Empak model HA200 wafer box.

Mounting Feet

Mounting Feet
304 stainless steel leveling feet feature cut-outs to allow bench to be bolted to the floor.

Diameter Cat. # Price
2.5" (64 mm)
1540-04-2 $ 29
3.5" (89 mm)
1540-05-2 $ 32

Other WIP Storage Solutions
Select a standard unit, or put Terra's design and fabrication experience to work on a system customized to your specs!
Wall-Recessed WIP Storage Cabinet   Wall-Recessed WIP Storage Cabinet
Made of all-electropolished stainless steel, this cabinet fits into a cleanroom wall cut-out to eliminate floorspace requirements altogether!

The model shown features five shelves made of .25" (6 mm)-diameter rods on 2" (51 mm) centers. Dimensions: 48"W x 12"D x 60"H (1219 mm x 305 mm x 1524 mm). Call for specify other sizes or configurations!

Cat.# Price
9611-90 Call TUI
   
   
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