Terra Part # 9130-53B
$6,459
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67882
Desiccator; Wafer Box, for 300 mm Wafers, Static-Dissipative PVC, 4 Chambers, 20" W x 30.5" D x 63" H
  • Chambers Per Tier: 1
  • Wafer Size: 300mm
  • Capacity: 8 (based on box size of 17" x 13.5” x 13.5" (432 x 343 x 343 mm) with 2 FOSB 300mm wafer carriers per chamber)
  • Chamber size designed to accommodate wafers with optimum air flow and humidity
  • Chrome-plated LiftLatches™ included; Locking Liftlatches also available - specify Locking Liftlatch for each chamber when the cabinet is ordered
  • Upgrade to all-stainless steel LiftLatches™  to minimize scratching, corrosion and contamination resulting over time with chrome-plated latches; specify when ordering
  • Powder-coated Steel Stand can be ordered separately

Material: Static-Dissipative PVC

Wafer Size: 300 mm

Number of Chambers: 4

Chamber Dimensions: 19" W x 28.5" D x 15.25" H

Opening Dimensions: 18.25" W x 14.5" H

Unit of Measure: EA

Marks & Listings: CE, UL, ULC

Weight, Product: 113 lb

Dimensions, Product: 20" W x 30.5" D x 63" H

Weight, Shipping: 238 lb

Dimensions, Shipping: 68" W x 34" D x 23" H

Package Type: Crate

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  1. Provides variable gas purge levels to maintain humidity set points | 9500-05 displayed
    $3,363
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  2. Shelf supports ensure that this plastic chamber holds weight | 2200-21 displayed
    $128
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  3. Stainless Steel and powder-coated steel stands adjust to fit cabinets, desiccators and cleanroom equipment of any size. | 1609-20 displayed
    $578
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  4. Stainless Steel and powder-coated steel stands adjust to fit cabinets, desiccators and cleanroom equipment of any size. | 1609-20 displayed
    $578
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  5. Stainless Steel and powder-coated steel stands adjust to fit cabinets, desiccators and cleanroom equipment of any size. | 1609-20 displayed
    $578
    Increase Down Increase Up
  6. Stainless Steel and powder-coated steel stands adjust to fit cabinets, desiccators and cleanroom equipment of any size. | 1609-20 displayed
    $578
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  7. Stores 16,382 temperature readings and 16,382 relative humidity measurements. | 9500-10 displayed
    $252
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  8. Small nitrogen generator, 20"W x 12"D x 35.5"H, with compact footprint produces up to 99% pure N2 gas | 2700-12B displayed
    $10,227
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  9. Stainless steel LiftLatch. Product details may differ. | 1603-67-2 displayed
    $105
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  10. Small (4") locking latch, catcher included. Grid shows one-inch squares. | 1603-80 displayed
    $108
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  11. Increases security of desiccators and accommodates most standard padlocks. | 1603-33 displayed
    $46
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  12. FasTrak 24-7 Expediting Service
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  13. UL Listing Declaration for Desiccator and Storage Cabinets
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  14. Qualification Documentation (IQ/OQ) for Terra Universal System
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  15. Equipment Testing
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  16. Optional stainless steel door frames extend cabinet's service life. | 2200-30A displayed
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  17. Terra's Automated RB Valve provides safe pressure release and prevents influx of room air | 1600-60B displayed
    $141
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  18. Small (4") LiftLatch with Catcher | 1603-84 displayed
    $170
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  19. Installed grounding terminal; location may vary depending on product | 1686-12 displayed
    $160
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Wafer Storage Desiccators

  • Desiccators: Features and Design overview
  • Leveling your Desiccator

Features and Benefits

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

High Caliber Hardware

Seemingly small details like latches, ports, glides and hinges are often overlooked or ignored by other manufacturers, and later become the point of costly recurring maintenance or equipment failure. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware. Individual components are carefully designed and rigorously tested to guarantee the highest quality, durability, and craftsmanship.

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Durable Embedded Static-Dissipative Layers

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Highest Standards For Desiccators and Electronic Components

Terra’s desiccator cabinets and RH control systems are designed and built to the highest standards required by defense and semiconductor industries for long-term reliability and protection against damage, injuries, and electrical hazards.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Long-Term Customers

Terra is committed to building long-term relationships with satisfied clients; 94% of orders each year come from repeat customers

Comprehensive Product Portfolio

Terra’s comprehensive product portfolio includes solutions for every application and budget. Our technical sales staff will guide you toward the product most suitable for your requirements.

Smart® Desiccator Cabinet on Automatic Height Adjustable Workstation

Automatic height adjusting workstations allow users to quickly alternate between comfortable sitting and standing positions while performing different tasks with heavy equipment on the workspace, such as this Smart® Desiccator Cabinet connected to a Nitrogen Generator.

Catalog of CE-Marked Products

Terra offers over 1,700 CE-marked products configured for international voltage requirements

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Humidity and Temperature Data Logger
    Records storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
  • 3-inch Diameter Caster Set
    Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
  • Laboratory Nitrogen Generator
    Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
  • Universal Adjustable Base Stands for Desiccator Cabinets and Cleanroom Equipment
    Stainless steel or powder-coated steel base stands easily adjust to fit cabinets, desiccators and cleanroom equipment of any size or shape. Stands raises equipment to ergonomic height to ease disinfection and sample monitoring. BioSafe design suitable for any cleanroom or lab environment.
  • Desiccator Cabinet Ionizing Module
    Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
  • Dual Purge™ and NitroWatch™ Work Together to Fully Automate RH Control
    Terra's Dual Purge™ and NitroWatch™ operate in tandem to precisely and automatically control the flow of nitrogen and maintain a preset humidity level (from ambient to 0% ± 1.5% RH), no matter how operating conditions may change.
  • Data Logging with 113,000 Readings at User Defined Intervals
    Terra's Smart® IsoDry® Nitro-Watch™ logs RH, temp, door open/close, purge on/off, and sensor removal/attachment. The max data file size is roughly 4 MB or 113,000 readings. This is approximately 32 hours of data when logging at 1 second intervals, 2 weeks at 10 second intervals, 6 weeks at 30 second intervals, or 12 weeks at 1 minute intervals. When the system reaches the 4MB limit, data begins to wrap, overwriting oldest data with new.
  • Plug & Play Data Logging
    Plug in a USB flash drive to your Smart® IsoDry® Nitro-Watch™ to transfer data in .CSV format. No software required.

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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