Product 7018-76
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• Similar to Marangoni or gradient dryers; generated through nitrogen (N2) agitation.

• Leaves a dry, watermark-free surface

• Deionized (DI) water rinsing and the IPA vapor drying occurs in a single chamber

• Employs gradient technology to remove water and prevent particle adders

• Moisture collects inside a one-gallon bottle; includes level monitor and easy access for change-out

• Uniform vapor distribution reduces the amount of IPA needed

• 10-15 minute cycles

• No moving parts in the drying chamber (fewer broken wafers)

• Customized to specific wafer sizes and substrate carriers; talk to a Terra Product Specialist with your requirements

• Users can check system operations and set recipes from a touchscreen monitor

• Wet bench integration available

• Performance tested by the manufacturer prior to shipping

• Emergency Power Shut-Off switch connected to a Photohelic® differential pressure gauge

• Wiring meets NEC and NFPA requirements

• Down-draft exhaust

• Auto lid, opened by foot switch

• Double-switch close for safety

• All Teflon fittings

• DI-water membrane degassing

• Hot-nitrogen dry feature

• Nitrogen head-case purge

• 3-color light tower

• Casters and leg levelers

• FM4910 PVC-C available

• Certified to NFPA 70 and 79, Seismic Zone 4 structural,

• Options include resistivity monitoring control, data logging and overhead lighting

• Weight, Shipping 115 lb

• Dimension, Shipping

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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