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Reticle Storage Cabinets

Static-Dissipative PVC Eliminates Contamination Magnets

  • Surface resistivity of 107
  • Resists acids and corrosive chemicals
  • Eliminates particle attraction and build-up
  • Renders nonconductive plastics obsolete
 
  • Protects sensitive reticles and photomasks against contaminants
  • Integral HEPA filter/fan module washes stored parts with particle-free air
  • Electropolished 304 stainless steel slide-out drawers on noncontaminating runners provide full access to every inch of storage space
  • High-capacity configurations for vertical or horizontal reticle storage in all standard cassette sizes
  • Locking casters allow safe, easy parts transfer
  • All tray styles are compatible with Terra's Automated Stockers to allow cross-loading

Reticle Storage Cabinets
Reticle Storage Cabinets Horizontal Storage Cabinet
Precision-routed HDPE slides hold cassettes at a 2° angle from horizontal for secure positioning. Transparent side panels made of acrylic or static-dissipative PVC. Model shown: No. 3505-03; Capacity: 144 cassettes for 6-inch reticles.
Unique slides provide high-density storage while affording convenient access

Vertical Storage Cabinet
Vertical Storage Cabinet Vertical Storage Cabinet
Electropolished 304 stainless steel trays hold reticles vertically. Transparent side panels made of acrylic or static-dissipative PVC. Model shown: No. 9130-03; Capacity: 450 cassettes for 6-inch (152 mm) reticles.
Several standard capacities, with static-dissipative or acrylic side panels
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