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Wafer Fab Carts

  • A comprehensive range of specialized carts for wafer fab tools and supplies, including quartz tubes, probes, injectors, thermocouple rods, and supply bottles
  • Electropolished stainless steel surfaces meet the most stringent cleanliness requirements
  • Includes spring-loaded casters for cushioned, low-vibration rolling

Put Terra's complete manufacturing capabilities to work in your wafer fab!

In addition to models shown here, carts can be specified in a variety of plastics, with specialized holding fixtures to safeguard your sensitive materials during process transfer.

Terra customizes carts to meet your requirements!

Quartz Tube Cart
Neoprene
thermocouple
rod supports
  Quatrz Tube Cart Detail

Quartz Tube/Thermocouple Cart

Designed for 300mm-diameter quartz tubes up to 1500mm long. Includes receptacles for thermocouple rods and two compartments for tool storage. Made of acid-resistant polypropylene with a rigid steel support. Overall dimensions: 48"W x 24"D x 72"H (1219 mm x 610 mm x 1829 mm), excluding handle. Includes four 6" (152 mm) diameter casters.

Cat.# Price
9600-25 Price

Quartz Tube Cart
Flexible quartz
tube restraints
  Restraints

Quartz Tube Cart

Safely transport heavy quartz tubes nestled into a polypropylene retaining platform. Precision-routed cut-outs accommodate several diameters (150 mm, 200 mm and 300 mm). Includes flexible quartz tube restraints. Electropolished stainless steel exterior is easy to wipe down. 6" (152 mm) diameter high density neoprene casters ensure smooth, clean rolling. Overall dimensions: 48"W x 24"D x 36"H (1219 mm x 610 mm x 914 mm), excluding handle.

Cat.# Price
9600-17 Price


Injector Cart Laser Jig Cart
Injector Cart
Electropolished stainless steel cart features four 5.25" x 12.5" (133 mm x 318 mm) injector inserts. Overall dimensions: 21"W x 41.55"D x 25.68"H (533 mm x 1055 mm x 652 mm), excluding handle. Includes four 5" (127 mm) diameter casters.
Cat.# Price
9600-26 Price
Laser Jig Cart
Electropolished stainless steel cabinet houses four drawers. Includes rod rail along top perimeter. Includes four 3" (76 mm) diameter casters (two with brakes).
Cat.# Price
9600-28 Price


Probe Cart Bottle Cart
Probe Equipment Cart
Includes three shelves with polyurethane rollers and retainers for abrasion-free placement of delicate probes and other fab equipment. Frame and drawer are electropolished stainless steel. Includes 4" (102 mm) diameter high-density neoprene casters. Overall dimensions: 27"W x 24"D x 54"H (686 mm x 610 mm x 1372 mm) excluding handle.
Cat.# Price
9600-27 Price
Bottle Cart
Electropolished stainless steel construction, clean casters, and ergonomic design make this cart ideal for safely transporting 5' (1524 mm) process gas canisters. Includes retaining chain. Overall dimensions: 12.3"W x 31"D x 57"H (312 mm x 787 mm x 1448 mm). Front wheels are 8" (203 mm) diameter, rear wheels are 4" (102 mm) diameter.
Cat.# Price
9600-18 Price
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