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Part #: 2001-04
Designed in the USA • Dimensions: 48" (1219 mm) overall length • Approximate overall dimensions: 48.5"W x 36"D x 58"H (1232 x 914 x 1473 mm) • Number of panels: three (3) • Standard deck accommodates cut-outs up to 23.75"D (603 mm) - (cut-out widths depends on station width) - user must specify configuration at time of order • Welded stainless steel 1.5" x 3" ( 38 mm x 76 mm) tubing • Electrical 120VAC, 60Hz, single phase. o Prefilter; Throw-away replacement type located on top section o Final filters; 99.99% efficeint HEPA (@ 0.3 µm particles) o Optional Vertical Laminar Flow Module available. o Bi-directional exhaust system safely removes hazardous fumes o Exhaust duct located in rear (please specify flange size when ordering) o Front panel controls allow easy operation
• Electrical Specifications:
120V, 60Hz, 1Ph
Wafer Box Desiccator; for 200mm Wafers, Acrylic, 26.88" x 25.14" x 60.88"
Cleaner; Ultrasonic, Unheated, Digital Timer, 9.9"W x 12"D x 11.9"H
Ultrasonic Tank; 2.5 gallon, w/104 khz Generator, 120V
Gun; Ionizing Blow-Off with 120VAC Power Supply & 0.4m Inline Filter
Shower; Safety; Enclosed, Single Access
Storage Cabinet; EP 304SS, 47" x 20" x 67", 2 SDPVC doors, Wafer Box
All prices and specifications are subject to change without notice. All prices include crating charges. Call or click below for more information on terms and conditions.
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