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Part #: 7018-30
Usually ships in 25-31 business days
• Internal dimensions: 7.75" W x 7.75" D x 9.8" H (197 mm x 197 mm x 249 mm) • This is a non-returnable, custom item • Accommodates a single 6" (152 mm) wafer cassette • Order controller (C1815aLSS--TUI P/N 7018-36) separately • Includes installation o Engineered to provide unparalleled process control, safety, and consistency in silicon nitride o Etching o Pure quartz vessel with PVDF refluxor to condense chemical vapors o Maintains consistent chemistry temperature and acid/water ratio o 360º nitrogen-purged housing seal reduces acid penetration of heating element for extended o Service
Desiccator, Wafer Box; for 200mm Wafers, 5 Chambers, Acrylic, 27"W x 25"D x 61"H
Cleaner; Ultrasonic, Unheated, Digital Timer, 9.9"W x 12"D x 11.9"H
Ultrasonic Tank; 2.5 gallon, w/104 khz Generator, 120V
Gun; Ionizing Blow-Off with 120VAC Power Supply & 0.4m Inline Filter
Storage Cabinet; EP 304SS, 47" x 20" x 67", 2 SDPVC doors, Wafer Box
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