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Part #: 9502-32
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• Wafer Cassette Capacity: (2) 5" wafers • Material: Natural polypropylene rinser tanks, DI manifold tubing, spray nozzles, and valves ensure compatibility with most process chemistries. Comes complete with retractable PVC cover • Includes installation on specified Terra Wet Processing Station • Dual overhead spray manifolds with low misting nozzles eliminate over-spray • 360º serrated overflow weir enhances particulate removal • Large machined dump door accelerates dump time and eliminates particle entrapment • Contoured vessel design reduces DI water consumption
Desiccator, Wafer Box; for 200mm Wafers, 5 Chambers, Acrylic, 27"W x 25"D x 61"H
Cleaner; Ultrasonic, Unheated, Digital Timer, 9.9"W x 12"D x 11.9"H
Ultrasonic Tank; 2.5 gallon, w/104 khz Generator, 120V
Gun; Ionizing Blow-Off with 120VAC Power Supply & 0.4m Inline Filter
Storage Cabinet; EP 304SS, 47" x 20" x 67", 2 SDPVC doors, Wafer Box
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