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Terra Part #PriceShips in
120 V304 Stainless Steel30"48" 1530-41 5550 $18,685.....2
240 V304 Stainless Steel30"48" 1530-41-220 40790 $18,685.....3
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Product Details

• Includes exhaust system for safe fume venting

• Overhead sprinklers engage in case of fire

• Explosion-proof illuminator meets locations defined by the NEC

• Features split-sink for drainage and safe disposal of solvents

• Safely stores chemicals in an enclosed cabinet environment

• Custom modifications available to meet your specific requirements

• Suitable for locations in which ignitable mixtures exist under normal conditions

• Additional adjustable service lines can be installed to allow use of additional solvents


• Solvent Line: (2) 1/4" ID 304 stainless steel

• 304 stainless steel construction resists a wide range of solvents

• Gas Line: (2) Quick connect/disconnect fitting for 1/4" gas line

• Features a split-sink construction for solvent rinsing and nitrogen/air drying

• A counterbalanced safety glass shield offers convenient access to the work area

• Includes an enclosed cabinet with 5-gallon polypropylene reservoirs

• Plumbing is also available in other materials, including Teflon® and polypropylene

• Features a 10"-diameter duct on the rear of the panel, allowing for the safe venting of fumes

Features & Benefits

Features & Benefits

Wet Processing: Which Material is Best?
Process Control, Safety, and Consistency
Polypropylene
  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
Quartz
  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart
Commercial or Generic NameProcessChemical CompositionConcentrationTypical TemperatureRecommended Product
Aqua RegiaGold EtchantHydrochloric Acid (HCl)
Nitric Acid (HNO3)
75%
25%
90°C Series
Buffered Oxide
Etch (BOE)
Etch SiO2Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
40%15-40°C
Ambient
A Series
RCe Series
CP8EtchNitric Acid (HNO3)
Hydrofluoric Acid (HF)
 AmbientA Series
Etch (Indium)
Molybdenum Platinum
Nichrome
EtchHydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
37-38%
70-71%
 QA Series
Metal EtchEtch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87%30-60°CQA Series
Nitride EtchEtchPhosphoric Acid (H3PO4)
DI Water (H20)
85-87%
15-13%
150-185°CNb Series
Organic StripperResist RemovalPRS-1000
S-43
Lozolin
No Phenol-922
Full strengthRoom Temperature
120°C
Nb Series
Oxide Resist StripSiO2 Resist StrippingSulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96%QA Series
Phenolic StripperResist RemovalJ100
Bermar 712D
R-10
 95-100°CC Series
Resist Series (Metalized)Resist RemovalChromic Sulfuric Acid (CrO3+H2SO4)  A Series
R.C.A. CleanPre-Diffusion Cleans
Quartzware
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40%75-85°CQa Series
Silicon EtchEtchAcetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
 AmbientA Series
Sirtl EtchEtchChromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
 AmbientA Series
Slope EtchEtchPhosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
 55°CQa Series
Standard Resist Strip (do not use w/aluminum)SiO2 Resist StripSulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96%110-140°CQa Series
2:1 EtchEtchDI Water (H2O)
Hydrofuoric Acid (HF)
 AmbientA Series
Wafer RinsingRinsingDI Water (H2O)100%AmbientDR-Series
Particle Trapping Test

Explosion-Proof Light

Incandescent illuminator lights up work surfaces and is wired per NEC guidelines. It is appropriate for Class I, II and III, Divisions 1 and 2 applications using ignitable mixtures.

Split Perforated Sink

Damage-resistant, perforated stainless steel surface safely guides liquids down to drains below, but prevents parts from dropping down to drains. Lift up to access drains.

Service Lines

Petcock nozzles above each sink deliver liquid solvents for rinsing and nitrogen/air for drying. Use the quick-connect fittings to feed the lines, and adjustable gauges to modify pressure

Pneumatic Foot Pedals

Control flow of solvent and nitrogen using these convenient step-on foot pedals in front of each sink in the booth. Hands-free operation reduces contamination.

Exhaust Duct

Spray booth is equipped with exhaust duct to safely carry fumes away from workers. This view from the top also shows the water pipe that feeds sprinklers, and encased wiring for explosion-proof light.

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