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Terra Part #PriceShips in
120 V 304 Stainless Steel 30" 48" 1530-41 5550 $23,030.....2
240 V 304 Stainless Steel 30" 48" 1530-41-220 40790 $23,030.....3
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Custom-configured product: Terra will quote.
Custom-configured product: Terra will quote.
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Product Details

• Includes exhaust system for safe fume venting

• Overhead sprinklers engage in case of fire

• Explosion-proof illuminator meets locations defined by the NEC

• Features split-sink for drainage and safe disposal of solvents

• Safely stores chemicals in an enclosed cabinet environment

• Custom modifications available to meet your specific requirements

• Suitable for locations in which ignitable mixtures exist under normal conditions

• Additional adjustable service lines can be installed to allow use of additional solvents

• Solvent Line: (2) 1/4" ID 304 stainless steel

• 304 stainless steel construction resists a wide range of solvents

• Gas Line: (2) Quick connect/disconnect fitting for 1/4" gas line

• Features a split-sink construction for solvent rinsing and nitrogen/air drying

• A counterbalanced safety glass shield offers convenient access to the work area

• Includes an enclosed cabinet with 5-gallon polypropylene reservoirs

• Plumbing is also available in other materials, including Teflon® and polypropylene

• Features a 10"-diameter duct on the rear of the panel, allowing for the safe venting of fumes

Features & Benefits

Features & Benefits

Wet Processing: Which Material is Best?
Process Control, Safety, and Consistency
Polypropylene
  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
Quartz
  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart
Commercial or Generic Name Process Chemical Composition Concentration Typical Temperature Recommended Product
Aqua Regia Gold Etchant Hydrochloric Acid (HCl)
Nitric Acid (HNO3)
75%
25%
90° C Series
Buffered Oxide
Etch (BOE)
Etch SiO2 Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
40% 15-40°C
Ambient
A Series
RCe Series
CP8 Etch Nitric Acid (HNO3)
Hydrofluoric Acid (HF)
  Ambient A Series
Etch (Indium)
Molybdenum Platinum
Nichrome
Etch Hydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
37-38%
70-71%
  QA Series
Metal Etch Etch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87% 30-60°C QA Series
Nitride Etch Etch Phosphoric Acid (H3PO4)
DI Water (H20)
85-87%
15-13%
150-185°C Nb Series
Organic Stripper Resist Removal PRS-1000
S-43
Lozolin
No Phenol-922
Full strength Room Temperature
120°C
Nb Series
Oxide Resist Strip SiO2 Resist Stripping Sulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96% QA Series
Phenolic Stripper Resist Removal J100
Bermar 712D
R-10
  95-100°C C Series
Resist Series (Metalized) Resist Removal Chromic Sulfuric Acid (CrO3+H2SO4)     A Series
R.C.A. Clean Pre-Diffusion Cleans
Quartzware
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40% 75-85°C Qa Series
Silicon Etch Etch Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
  Ambient A Series
Sirtl Etch Etch Chromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
  Ambient A Series
Slope Etch Etch Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
  55°C Qa Series
Standard Resist Strip (do not use w/aluminum) SiO2 Resist Strip Sulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96% 110-140°C Qa Series
2:1 Etch Etch DI Water (H2O)
Hydrofuoric Acid (HF)
  Ambient A Series
Wafer Rinsing Rinsing DI Water (H2O) 100% Ambient DR-Series
Particle Trapping Test

Explosion-Proof Light and Fire Sprinklers

Incandescent illuminator lights up work area and is wired per NEC guidelines. It is appropriate for Class I, II and III, Divisions 1 and 2 applications using ignitable mixtures. Sprinkler heads located above each sink add an extra layer of safety when working with flammable chemicals.

Split Perforated Sink for Two Users

The removable perforated stainless steel surface safely guides liquids to the bottom drain and prevents parts from falling into the sink. The center partition allows for separate operations and minimizes splashing or mixing of chemicals from the adjacent sink.

Gas and Solvent Service Lines

Downward spraying petcock nozzles above each sink deliver liquid solvents for rinsing and nitrogen/air for drying. The nozzles extend outward for extra clearance and point down to facilitate cleaning procedures.

Pneumatic Foot Pedals for Hands-Free Operation

Pneumatic foot pedals installed at the base of the stainless steel solvent cleaning station allow users to safely control flow of solvent and nitrogen gas at each sink. Hands-free operation reduces risk of contamination.

Exhaust Duct Connection For Safe Fume Extraction

Stainless steel solvent station is equipped with exhaust duct to safely carry fumes away from workers. This view from the top also shows plumbing that feeds two fire sprinklers, and encased wiring for the explosion-proof light.

Tilt-Up Front Shield for Easy Access

Gas struts help open and hold up the front shield to simplify cleaning and allow transfer of bulky equipment in this stainless steel solvent station. Removable chemical reservoirs beneath the sink safely store used solvents.

Ideal for Corrosive or Flammable Liquid Applications

Stainless steel wet cleaning stations are ideal for applications involving corrosive or flammable liquids. 304 stainless steel construction resists a wide range of solvents, including lapping oils, alcohol, naphtha and toluene.

Fully Adjustable Solvent and Gas Lines

Gauges and knobs on the rear allow pressure control of air and solvent lines. Quick-connect fittings on the other side feed each line. Additional service lines can be installed. Plumbing is also available in other materials, including Teflon and polypropylene.

Portable Chemical Reservoirs Safely Contain Drained Solvents

Chemical reservoirs connected to each sink safely contain solvents draining from above. They include a sight glass to monitor liquid level (electronic liquid level sensors available). Casters and quick connect/disconnect fittings simplify removal and emptying.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

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