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IPA Vapor Dryer

IPA dryer in clean room Isopropyl Alcohol (IPA) dryers are similar to Marangoni, or gradient, dryers. IPA vapor is generated through nitrogen (N2) agitation. This vapor is displaced on the silicon wafer, and then quickly evaporates, leaving a dry, watermark-free surface. 

IPA dryers are free-standing units and made of white, chemical-resistant polypropylene. A single chamber is used for both deionized (DI) water rinsing and the IPA vapor drying steps, employing gradient technology to remove water and prevent particle adders. The vapor is produced inside a one-gallon bottle that is easy to access and change-out from an enclosed exhaust compartment on the work station. Vapor levels are monitored by sensors.

Drying is homogenous due to uniform vapor distribution, which also serves to reduce the amount of IPA needed. Cycles are complete in 10-15 minutes, and the drying chamber contains no moving parts (fewer broken wafers).

Work station software features graphical interface accessed from a touchscreen monitor where users can check system operations and set recipes.  

Standard safety features include a mushroom-button emergency power switch (EPO) connected to a Photohelic® differential pressure gauge, wiring to meet NEC requirements for electrical installation and industrial machinery, and down-draft exhaust.

Work stations are custom-made to all sizes of wafer and substrate carriers; talk to a Terra Product Specialist with your requirements. IPA Vapor Dryers can be integrated into wet benches if you need this operation to be in-line with other processes. Manufacturer performance testing of all stations is done prior to shipping.

Standard:
  • Wired according to NFPA 70 and 79
  • Auto lid, opened by foot switch; double switch close for safety
  • All Teflon fittings, tubes, valves
  • DI-water membrane degassing
  • Hot-nitrogen dry feature
  • Nitrogen head-case purge
  • 3-color light tower
  • Casters and leg levelers
  • One-year warranty
Options:
  • Factory Mutual 4910-rated PVC-C (Chlorinated polyvinyl chloride) fabrication material
  • Third-party certification: NFPA 70 and 79, CE, Seismic Zone 4 structural
  • Manual lid
  • Resistivity monitoring control
  • Data logging
  • Overhead lighting
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