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Wet Cleaning Benches
Wafer fabrication cleaning stations from Terra are designed as turnkey (integrated) or customizable (modular) so facilities can select the station that best fits their budget and applications. The integrated station offers deck configuration options, but is build as one complete unit made of acid-resistant polypropylene or solvent-friendly stainless steel. The modular station has more flexibility, with the station and overhead laminar flow hood as separate units. These can also be used for acid- or solvent-based cleaning. Terra's Solvent Spray Booth is ideal for corrosive or flammable chemicals, with fire-resistant components and safety systems.

Integrated Cleaning Station

Integrated Cleaning Station

Self-contained turnkey wet cleaning station for semi-conductor processing is fully integrated and fabricated of acid-resistant materials

Modular Cleaning Bench

Modular Cleaning Bench

Economical wet cleaning station with versatile deck configurations: select from three pre-engineered designs. A bi-directional exhaust system removes fumes

Solvent Spray Booth

Solvent Spray Booth

This Spray Booth is ideal system for corrosive or flammable liquid applications: clean with solvents or dry with nitrogen safely and conveniently

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