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Wafer Quick Dump Rinser

DR Series Dump Rinsers
The right way to rinse — requires less DI water, and less DI water disposal.
 
  • Natural polypropylene rinser tanks, DI manifold tubing, spray nozzles, and valves ensure compatibility with most process chemistries
  • Dual overhead spray manifolds with low misting nozzles eliminate over-spray
  • 360° serrated overflow weir enhances particulate removal
  • Large machined dump door accelerates dump time and eliminates particle entrapment
  • Contoured vessel design reduces DI water consumption
  • Comes complete with retractable PVC cover

The DR Series Wafer Dump Rinser rinses silicon wafers and similar products free of acids, solvents, and other processing solutions. Because it uses less DI water than other models, it saves on both DI water consumption and disposal expenses.

Water is sprayed from two sources to ensure optimal rinsing: from spray nozzles located above the wafer cassette and from spray jets and a nitrogen bubbler located below the cassette. To ensure product purity, all components are made of natural polypropylene or PVDF, with no exposed metal. A clear PVC cover retracts out of the way when not in use.

The DR Series uses a microprocessor controller to provide versatile, repeatable processing (order below). This controller allows up to 99 programmable cycles, far more than most batch operations require. The membrane keypad resists most acids and solvents, and access coding enhances process security.

Processing Modules
Model below accommodates a single 6" wafer cassette.
Call Terra for other sizes. (Prices include installation)

Cat. # Price
Dr Series 9502-00 Price
Corresponding Controls
x=Standard
o=Optional
Heat Cool Liquid
Level
Sensor
Alarm
Timer Over/
Under
Temp
Alarm
Pump/
Filter
Control
Recirculat.
Pump
Drain
Valve
Control
Spray
Nozzle
Control
DI H2O
Injection
Cat. # Price
C15sa

x x


x x
7018-38 Price
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
Which Material is Best?

Polypropylene

  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
 

PVDF (polyvinyldilene fluoride)

  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperature

Quartz

  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won't scuff, stain, or absorb impurities
 

PTFE (Teflon®)

  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining
Specifications
Materials: Natural polypropylene (tank, spray nozzles, dump door, DI manifold and valve); Teflon tubing harness; PVC cover (PVDF also available)
Electrical: 105 - 125 VAC, single phase, 24 amps, 50/60Hz (for controller use only)
DI Water Service: 25 psi (dynamic), 45 psi (all models)
Nitrogen Service: 50 - 60 psi (max) controller; 10 - 15 psi, nitrogen bubbler (all models)
Controller (order separately): Multifunction microprocessor, membrane keypad. Includes end-of-cycle alarm (type C15sa)
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