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F Series Subambient Filtered Etch Bath

F Series Subambient Filtered Etch Bath

Ensures purity of NH4, HF, BOE, CH3, COOH, and HNO3 positive resist developer


F Series Subambient Filtered Etch Bath
  • Continuously filters process chemistry to increase purity and maximize product yield
  • Reduced acid consumption generally pays for bath in three months
  • Select semiconductor-grade natural polypropylene or PVDF seamless process tank
  • 360° serrated overflow weir enhances particulate removal
  • Pump/filter assembly is easily removed for quick filter change
  • Uniform flow return system ensures a consistent laminar flow across every wafer at every location—no eddies or dead spots
This filtered bath is ideal for oxide etching and other processes using HF acid. Its recirculating system continuously filters the process chemistry to ensure purity and reduce consumption. Depending on 10" (254 mm) filter cartridge selected, these systems provide up to 0.2µ absolute filtration.

The process bath is made of virgin, natural polypropylene or PVDF. The bath includes a seal-less, nitrogen-purged process pump. A 360° weir minimizes particle entrapment. Use of the RCe Recirculating Module provides excellent temperature control between 18 and 40°C.

Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.

Processing Module
Model below accommodates a single 6" (152 mm) wafer cassette.
Call Terra for other sizes. (Prices include installation)

Cat. # Price
F Series* 7018-31 Price
Corresponding Control
x=Standard
o=Optional
Heat Cool Liquid
Level
Sensor
Alarm
Timer Over/
Under
Temp
Alarm
Pump/
Filter
Control
Recirculat.
Pump
Drain
Valve
Control
Spray
Nozzle
Control
DI H2O
Injection
Cat. # Price
C21b x x x x x
x


7018-37 Price
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
*Selection of RCe module provides optional heating/cooling capabilities to the A or F Series modules. Model listed is polypropylene; PVDF also available.
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