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NB Series Silicon Nitride Etch Bath

NB Series Silicon Nitride Etch Bath
Engineered to provide unparalleled process control, safety, and consistency in Silicon Nitride etching
  • Seamless-molded, flame-polished 99.995% pure quartz vessel—ideal for ultra-pure chemistries
  • PVDF refluxor condenses chemical vapors before they can escape from the bath, making it perfect for low flash-point chemicals or high-temperature operations
  • Remote metering and DI water injection system compensates for boil-off to maintain consistent chemistry temperature and acid/water ratio
  • Includes etch-foil resistance heater and vapor thermocouple (for chemical boiling control)
  • 360° nitrogen-purged housing seal reduces acid penetration of heating element for extended service
Processing Modules
Model below accommodates a single 6" (152 mm) wafer cassett.
Call Terra for other sizes. (Prices include installation)

Cat. # Price
Nb Series 7018-30 Price
Corresponding Controls
x=Standard
o=Optional
Heat Cool Liquid
Level
Sensor
Alarm
Timer Over/
Under
Temp
Alarm
Pump/
Filter
Control
Recirculat.
Pump
Drain
Valve
Control
Spray
Nozzle
Control
DI H2O
Injection
Cat. # Price
C1815aLSS x
x x


o
x 7018-36 Price
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
NB Series Silicon Nitride Etch Bath

The NB Series Silicon Nitride Etch Bath is ideal for etching silicon nitride layers in a heated process solution of phosphoric acid and DI water.

It heats the acid/water process solution to the process set point. Rather than injecting water once the set point is reached, it monitors the temperatures both of the solution and the vapor. As the process solution heats beyond its set point, DI water is injected into the process solution to replace water lost through vaporization. If either setting is not reached, as in the case of an open cover, an interlock prevents water injection.

This dual protection guards against bumping: layering the DI water on top of the acid. You benefit from excellent bath-to-batch consistency and a high degree of operator safety.

Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.

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