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C Series Stripper Bath

C Series Stripper Bath
Ideal for wafer processing in such volatile and fuming solutions as J100, A30, R10, HCl - HNO3 Burmar, Aqua Regia, and organic strippers
  • Ideal for etching, stripping and cleaning
  • Seamless quartz vessel is 99.995% contaminant-free
  • Externally bonded 5-sided circuit heating element provides efficient, even heating for improved process yields
  • Redundant safety features minimize potential damage caused by runaway temperatures
  • PVDF refluxor and hard-hinged cover improve condensation of chemical vapors for a cleaner, safer work environment
  • Sloped run-off design diverts acid and other process liquids away from flange
Processing Modules
Model below accommodates a single 6" (152 mm) wafer cassett.
Call Terra for other sizes. (Prices include installation)

Cat. # Price
C Series* 7018-29 Price
Corresponding Controls
x=Standard
o=Optional
Heat Cool Liquid
Level
Sensor
Alarm
Timer Over/
Under
Temp
Alarm
Pump/
Filter
Control
Recirculat.
Pump
Drain
Valve
Control
Spray
Nozzle
Control
DI H2O
Injection
Cat. # Price
C1115aLLS x   x x       o

7018-35 Price
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
C Series Stripper Bath

The C Series Constant-Temperature Bath offers the temperature uniformity and purity of the Qa Series baths, and adds a refluxor and hinged cover to condense chemical vapors. This feature makes it ideal for use with volatile and fuming solutions.

Its grid heater is bonded to the outside and bottom of the pure virgin quartz vessel, ensuring fast, even, efficient heating. The vessel is sealed into a protective polypropylene housing. The dramatically sloped "run-off" design diverts acids and other process liquids away from the flange. Safety features include an overtemperature thermocouple, failsafe power cut-off, with visible and audible alarms, liquid level sensor tube, and an ultra-reliable snap disk that cuts power if the temperature exceeds unsafe levels.

C Series Stripper Baths are available in many sizes and configurations for operation with most wafer sizes. Options include a magnetic stirrer, gravity drain, aspirator (dilution) valve system, and quartz bubbler. Call to discuss your application with a Terra process engineer.

Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.
Specifications
Materials: Internally flame-polished, virgin fused quartz, boron-free (process vessel); Flame-retardant polypropylene (housing)
Electrical: 208 - 240 VAC, single phase, 50/60Hz, 7 - 20 amps (depending on size)
Process Thermocouple: J-type Teflon® encapsulated
Insulation: High-density alumina silica fiber rated to 1260°C
Note: Microprocessor controller is required for operation. See sidebar for capabilities listing.
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