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Storage reticle/photomask storage cabinet with optional WhisperFlow air filtration; 304 SS, 28.5" W x 25" D x 38" H, 3 Shelves, 9 Trays on casters | 9130-02A displayed
LTL freight shipment. Dock or liftgate may be required.
Available Certified ISO Grade Designs: ISO 4, ISO 5, ISO 6, ISO 7, ISO 8
• Height: 38"
• Number of Doors: 1 Door
• Shelves: 3 Shelves
• Depth: 25"
• Width: 28"
• Material: 304 Stainless Steel
• Design: Free Standing
• Type: HEPA-Filtered
• Reticle Capacity: 189 Reticles
• Electropolished: Optional
• ISO Rated Air Cleanliness: ISO 5
• Certified ISO Grade Design: ISO 6
• Unit of Measure: EA
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Terra Part #: 9130-02A
Manufactured By: Terra Universal
Warranty: 1 year parts, 90 days labor
LTL freight shipment. Dock or liftgate may be required.
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Summary
Available Certified ISO Grade Designs: ISO 4, ISO 5, ISO 6, ISO 7, ISO 8
Number of drawer units: Three
Number of trays: Nine (three per drawer unit)
Construction: Frame, drawer assemblies and trays are fabricated out of stainless steel (drawer slides are plated steel)
Panels are SDPVC
Securely holds and organizes reticle/photomask cassettes
Trays can be removed from the drawer unit for ease of cleaning or transporting material
Slotted sides (slots on .188" (5 mm) centers) and perforated bottom allow the HEPA filtered air to pass between stored cassettes
Specifications
• Height: 38"
• Number of Doors: 1 Door
• Shelves: 3 Shelves
• Depth: 25"
• Width: 28"
• Material: 304 Stainless Steel
• Design: Free Standing
• Type: HEPA-Filtered
• Reticle Capacity: 189 Reticles
• Electropolished: Optional
• ISO Rated Air Cleanliness: ISO 5
• Certified ISO Grade Design: ISO 6
• Unit of Measure: EA
• Electrical Specifications: 12 V
• Weight, Product: 142 lb
• Dimensions, Product: 28.5" W x 25" D x 38" H
• Weight, Shipping: 162 lb
• Dimensions, Shipping: 42" W x 34" D x 38" H
• Package Type: Palletized
Features and Benefits
Stainless Steel Removable Trays
Removable stainless steel trays for ease of cleaning and material transport. Featured trays can be utilized for organizing reticle or photomask casettes, engineered with particle and ESD protection.
Protecting Personal Information
Terra is committed to ensuring that our customer’s personal information is secure. In order to prevent unauthorized access or disclosure, Terra has developed procedures to safeguard and secure information collected online and offline.
Global Customer Base
At Terra, we are committed to providing top-tier equipment to customers throughout the world. Over the past 5 years, clients in over 100 countries have purchased equipment from Terra.
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For a full list of accessories, select a product then click Choose Accessories on that product page.
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