Wet Stations

Bath,Subambient Filtered Etch; 4-inch to 6-inch single cassette, 120V

Custom-configured product: Please request quote. Terra will contact you for requirements.

• Type: Silicone Nitride

• Unit of Measure: EA

Summary

Material: Natural polypro process module (1ea. 6" Cass.)
Power: 105-120VAC/50-60Hz
20.6 liter capacity
Holds 4" to 6" single cassettes
To include the following:
Continuous Particle Filtration
Four Sided Weir, Uniform Flow Return System
Ambient design, no temperature control
Pneumatic Pump with PVDF Body
Natural Polypro Diffuser Plate
Retractable Cover, Clear PVC

Continuously filters process chemistry increasing purity

Serrated overflow weir enhances particulate removal

Flow return ensures consistent laminar flow across every wafer

Easy removal for quick filter changes

Requires process controller at additional cost

This is a non-returnable, custom item

Specifications

• Type: Silicone Nitride

• Unit of Measure: EA

• Electrical Specifications: , 1 Ph, 60 Hz

• Weight, Product: 8 lb

• Dimensions, Product: 7.75" W x 7.75" D x 7" H

• Weight, Shipping: 12 lb

• Dimensions, Shipping: 10" W x 10" D x 15" H

• Package Type: Box

Features and Benefits

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Long-Standing Industry Expertise

For 50 years, Terra has served the life science, academic research, pharmaceutical, biotechnology, medical device, semiconductor and aerospace markets. We intimately understand the cGMP, GLP, ISO, ASTM , IEST and OSHA requirements.

Top-Tier Clients

Terra’s key customers include some of the largest research labs, production facilities and universities in the world