Wet Stations

Bath, Silicon Nitride Etch, 6-inch Single cassette

Custom-configured product: Please request quote. Terra will contact you for requirements.

• Type: Subambient

• Unit of Measure: EA

Summary

Internal dimensions: 7.75" W x 7.75" D x 9.8" H (197 mm x 197 mm x 249 mm)
This is a non-returnable, custom item
Accommodates a single 6" (152 mm) wafer cassette
Order controller (C1815aLSS--TUI P/N 7018-36) separately
Includes installation

Engineered to provide unparalleled process control, safety, and consistency in silicon nitride

Etching

Pure quartz vessel with PVDF refluxor to condense chemical vapors

Maintains consistent chemistry temperature and acid/water ratio

360º nitrogen-purged housing seal reduces acid penetration of heating element for extended

Service

Specifications

• Type: Subambient

• Unit of Measure: EA

• Weight, Product: 8 lb

• Dimensions, Product: 7.75" W x 7.75" D x 6" H

• Weight, Shipping: 12 lb

• Dimensions, Shipping: 10" W x 10" D x 14" H

• Package Type: Box

Features and Benefits

Protecting Personal Information

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Long-Standing Industry Expertise

For 50 years, Terra has served the life science, academic research, pharmaceutical, biotechnology, medical device, semiconductor and aerospace markets. We intimately understand the cGMP, GLP, ISO, ASTM , IEST and OSHA requirements.

Top-Tier Clients

Terra’s key customers include some of the largest research labs, production facilities and universities in the world