Internal dimensions: 7.75" W x 7.75" D x 9.8" H (197 mm x 197 mm x 249 mm)
This is a non-returnable, custom item
Accommodates a single 6" (152 mm) wafer cassette
Order controller (C1815aLSS--TUI P/N 7018-36) separately
Includes installation
Engineered to provide unparalleled process control, safety, and consistency in silicon nitride
Etching
Pure quartz vessel with PVDF refluxor to condense chemical vapors
Maintains consistent chemistry temperature and acid/water ratio
360º nitrogen-purged housing seal reduces acid penetration of heating element for extended
Service
Specifications
• Type: Subambient
• Unit of Measure: EA
Helena
• Weight, Product: 8 lb
• Dimensions, Product: 7.75" W x 7.75" D x 6" H
• Weight, Shipping: 12 lb
• Dimensions, Shipping: 10" W x 10" D x 14" H
• Package Type: Box
Features and Benefits
Protecting Personal Information
Terra is committed to ensuring that our customer’s personal information is secure. In order to prevent unauthorized access or disclosure, Terra has developed procedures to safeguard and secure information collected online and offline.
Long-Standing Industry Expertise
For 45 years, Terra has served the life science, academic research, pharmaceutical, biotechnology, medical device, semiconductor and aerospace markets. We intimately understand the cGMP, GLP, ISO, ASTM , IEST and OSHA requirements.
Top-Tier Clients
Terra’s key customers include some of the largest research labs, production facilities and universities in the world