Nitrogen-purged desiccator cabinets provide a dry, particle-free environment for wafer boxes. They are engineered for optimal storage of 200MM or 300MM wafers. | 9130-21B displayed

Wafer Storage Desiccators,Wafer Storage Desiccators

Wafer Box Desiccators

Manufactured By: Terra Universal

Need Help?

(714) 578-6100

Mon - Fri, 5:30 AM - 5:30 PM, PST

Email Chat

Want a quote quickly ?

Submit a QuickQuote request

Select Product Options

Material	Number of Chambers	Wafer Size	Price	Usually Ships in	Stocked
Clear Acrylic	8	200 mm	$9,215	15-19 Days
Clear Acrylic	5	200 mm	$5,645	15-19 Days
Clear Acrylic	10	200 mm	$11,624	15-19 Days
Static-Dissipative PVC	8	200 mm	$11,883	15-19 Days
Static-Dissipative PVC	8	300 mm	$9,255	15-19 Days
Static-Dissipative PVC	4	300 mm	$6,080	1-3 Days	Stocked
Static-Dissipative PVC	5	200 mm	$7,958	1-3 Days	Stocked
Static-Dissipative PVC	10	200 mm	$15,022	1-3 Days	Stocked
Static-Dissipative PVC	4	300 mm	$6,459	15-19 Days
Static-Dissipative PVC	8	300 mm	$11,640	1-3 Days	Stocked

Summary

Stores 200 mm and 300 mm wafers in a dry, particle-free environment
Designed for purging with nitrogen gas
Maximizes space efficiency and simplifies access to wafer lot boxes
Optional Dual Purge and NitroWatch control systems maintain set-point humidity levels inside the cabinet (sold separately)
All models feature a plenum chamber for gas distribution

Available in strong, rigid acrylic or static-dissipative PVC

304 stainless steel door frames and ergonomic LiftLatches for durability

Specifications

Helena

• Marks & Listings: CE, UL, ULC

Wafer Box Desiccators

Standard Features

A Grounding Terminals
Standard on static-dissipative PVC chambers to prevent electro-static discharge (ESD)
B Plenum Chamber
Located in rear of cabinet, plenum ensures uniform flow of nitrogen gas to all chambers; minimizes moisture migration
C Grounded Door Latch
Prevents ESD damage to stored parts (standard on static-dissipative PVC cabinets)
D Stainless Steel Hinges
Non-contaminating hinges contribute to a long service life under heavy use
E Automatic RB® Valve
Prevents overpressure; acts as a check valve (one included per chamber)
F Stainless Steel-Framed Doors with One-Piece Gasket
"e"-profile gasket mechanically attached to stainless steel reinforcement frame to prevent outgassing adhesives; one-piece design won’t slough or separate

Optional Features

1 Dual Purge™ System
Provides a variable flow of nitrogen purge gas: high to recover set point, low to conserve nitrogen
2 NitroWatch® RH Controller
Monitors internal humidity; activates a high-flow purge when RH climbs above set point
3 Door Sensor Switches
Activate high-flow purge when a door opens to recover RH set point
4 Stand with Nylon Leveling Feet
Powder-coated or 304 stainless steel; 4” or 12” high; casters available

Note Shown: Flowmeter included for manual regulation of flow rate (choose Dual Purge/NitroWatch systems for automated control); Nitrogen generator provides un uninterrupted supply of nitrogen up to 99% pure to eliminate reliance on bulky canisters

Wafer Storage Desiccators

Desiccators: Features and Design overview
Leveling your Desiccator

Desiccators: Features and Design overview Terra's nitrogen-purged desiccator cabinets meet dry storage requirements as low as 1% relative humidity. Standardization simplifies component upgrade, retrofit and replacement. Terra's Smart controllers allow setpoint control and even multiplexed purging for the most critical humidity requirements.

Leveling your Desiccator Learn how to properly level your plastic or stainless steel desiccator cabinet, as well as instructions to align the doors.

Features and Benefits

Acrylic 10 Chamber Wafer Box Desiccator Cabinet

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

High Caliber Hardware

Seemingly small details like latches, ports, glides and hinges are often overlooked or ignored by other manufacturers, and later become the point of costly recurring maintenance or equipment failure. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware. Individual components are carefully designed and rigorously tested to guarantee the highest quality, durability, and craftsmanship.

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Durable Embedded Static-Dissipative Layers

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

Terra Universal Desiccator Cabinet Stainless Steel Door Frame

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

UL-listed desiccator cabinet and RH control system manufactured by Terra Universal

Highest Standards For Desiccators and Electronic Components

Terra’s desiccator cabinets and RH control systems are designed and built to the highest standards required by defense and semiconductor industries for long-term reliability and protection against damage, injuries, and electrical hazards.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Long-Term Customers

Terra is committed to building long-term relationships with satisfied clients; 94% of orders each year come from repeat customers

Comprehensive Product Portfolio

Terra’s comprehensive product portfolio includes solutions for every application and budget. Our technical sales staff will guide you toward the product most suitable for your requirements.

desiccator cabinet on top of automatic height adjusting table with nitrogen generator

ISO 7 Smart® Desiccator Cabinet on Automatic Height Adjustable Workstation

Automatic height adjusting workstations allow users to quickly alternate between comfortable sitting and standing positions while performing different tasks with heavy equipment on the workspace, such as this Smart® Desiccator Cabinet connected to a Nitrogen Generator.

Catalog of CE-Marked Products

Terra offers over 1,700 CE-marked products configured for international voltage requirements

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.

Humidity and Temperature Data Logger
Records storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
3-inch Diameter Caster Set
Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
Learn More
Laboratory Nitrogen Generator
Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
Learn More
Universal Adjustable Base Stands for Desiccator Cabinets and Cleanroom Equipment
Stainless steel or powder-coated steel base stands easily adjust to fit cabinets, desiccators and cleanroom equipment of any size or shape. Stands raises equipment to ergonomic height to ease disinfection and sample monitoring. BioSafe design suitable for any cleanroom or lab environment.
Desiccator Cabinet Ionizing Module
Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
Dual Purge™ and NitroWatch™ Work Together to Fully Automate RH Control
Terra's Dual Purge™ and NitroWatch™ operate in tandem to precisely and automatically control the flow of nitrogen and maintain a preset humidity level (from ambient to 0% ± 1.5% RH), no matter how operating conditions may change.
Data Logging with 113,000 Readings at User Defined Intervals
Terra's Smart® IsoDry® Nitro-Watch™ logs RH, temp, door open/close, purge on/off, and sensor removal/attachment. The max data file size is roughly 4 MB or 113,000 readings. This is approximately 32 hours of data when logging at 1 second intervals, 2 weeks at 10 second intervals, 6 weeks at 30 second intervals, or 12 weeks at 1 minute intervals. When the system reaches the 4MB limit, data begins to wrap, overwriting oldest data with new.
Plug & Play Data Logging
Plug in a USB flash drive to your Smart® IsoDry® Nitro-Watch™ to transfer data in .CSV format. No software required.