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Wafer Storage Desiccators,Wafer Storage Desiccators

Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.25" W x 25" D x 61" H

• Number of Chambers: 5

• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H

• Opening Dimensions: 25.625" W x 10.875" H

• Material: Clear Acrylic

• Wafer Size: 200 mm

• Marks & Listings: CE, UL, ULC

• Dimensions, Product: 27.25" W x 25" D x 61" H

• Dimensions, Shipping: 66" W x 30" D x 28" H

• Weight, Product: 100 lb

• Weight, Shipping: 224 lb

• Package Type: Crate

• Unit of Measure: EA

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CE Mark Logo ULus Logo
Terra Part #: 9130-21B
Manufactured By: Terra Universal
Warranty: 1 year parts, 90 days labor
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Terra Part # 9130-21B
$4,230
Usually ships in 15-19 business days

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Details & Specs
Manuals & Resources
Related Products

• Chambers Per Tier: 1

• Wafer Size: 200mm

• Capacity: 20 (based on box size of 10.75" x 10.94" x 9.88" (273 x 278 x 249 mm) with 4 boxes per chamber)

• Chamber size designed to accommodate wafers with optimum air flow and humidity

• Chrome-plated LiftLatches™ included; Locking Liftlatches also available - specify Locking Liftlatch for each chamber when the cabinet is ordered

• Upgrade to all-stainless steel LiftLatches™ to minimize scratching, corrosion and contamination resulting over time with chrome-plated latches; specify when ordering

• Powder-coated Steel Stand can be ordered separately

• CAUTION: Acrylic is damaged by alcohol and many other cleaning agents. Use only water and mild detergent

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• Number of Chambers: 5

• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H

• Opening Dimensions: 25.625" W x 10.875" H

• Material: Clear Acrylic

• Wafer Size: 200 mm

• Marks & Listings: CE, UL, ULC

• Dimensions, Product: 27.25" W x 25" D x 61" H

• Dimensions, Shipping: 66" W x 30" D x 28" H

• Weight, Product: 100 lb

• Weight, Shipping: 224 lb

• Package Type: Crate

• Unit of Measure: EA

Show more

Manuals & Resources

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Wafer Storage Desiccators

  • Desiccators: Features and Design overview
  • Leveling your Desiccator
Desiccators: Features and Design overview Terra's nitrogen-purged desiccator cabinets meet dry storage requirements as low as 1% relative humidity. Standardization simplifies component upgrade, retrofit and replacement. Terra's Smart controllers allow setpoint control and even multiplexed purging for the most critical humidity requirements.
Leveling your Desiccator Learn how to properly level your plastic or stainless steel desiccator cabinet, as well as instructions to align the doors.

Features and Benefits

Plastic Wafer Box Desiccator Cabinets

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.
Automatic Relief/Bleed Valve

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.
Acrylic 10 Chamber Wafer Box Desiccator Cabinet

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel
Static-Dissipative PVC Plating

Static-Dissipative PVC Plating

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.
Stainless Steel Desiccator Liftlatches

Ergonomic LiftLatches

Lifting latch mechanism minimizes stress on wrists and desiccator hinges; non-rotary motion generates no particles inside the storage area (optional locking model shown)
Desiccator Cabinet Doors and Gaskets

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag
Desiccator Plenum Chamber For Uniform Gas Distribution

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.
Terra Universal Desiccator Cabinet Stainless Steel Door Frame

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
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  • Nitrogen Generator Group
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  • Ionizing Module Installed on Desiccator Cabinet
    Desiccator Cabinet Ionizing Module
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    Small 4"H powder-coated steel desiccator stand adjusts to fit cabinet snugly; optional casters simplify positioning and cleaning. Also available in stainless steel and 12" height.
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