Terra Part # 9130-21B
$4,230
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67864
Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.25" W x 25" D x 61" H

• Chambers Per Tier: 1

• Wafer Size: 200mm

• Capacity: 20 (based on box size of 10.75" x 10.94" x 9.88" (273 x 278 x 249 mm) with 4 boxes per chamber)

• Chamber size designed to accommodate wafers with optimum air flow and humidity

• Chrome-plated LiftLatches™ included; Locking Liftlatches also available - specify Locking Liftlatch for each chamber when the cabinet is ordered

• Upgrade to all-stainless steel LiftLatches™ to minimize scratching, corrosion and contamination resulting over time with chrome-plated latches; specify when ordering

• Powder-coated Steel Stand can be ordered separately

• CAUTION: Acrylic is damaged by alcohol and many other cleaning agents. Use only water and mild detergent

Material: Clear Acrylic

Wafer Size: 200 mm

Number of Chambers: 5

Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H

Opening Dimensions: 25.625" W x 10.875" H

Unit of Measure: EA

Marks & Listings: CE, UL, ULC

Weight, Product: 100 lb

Dimensions, Product: 27.25" W x 25" D x 61" H

Weight, Shipping: 224 lb

Dimensions, Shipping: 66" W x 30" D x 28" H

Package Type: Crate

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  1. Provides variable gas purge levels to maintain humidity set points | 9500-05 displayed
    IsoDry® Dual Purge™, for Desiccator, 120/240VAC, 50/60Hz Stocked Item is in stock and ready for immediate shipping
    $2,180
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  2. Small 4"H powder-coated steel desiccator stand; optional positioning and cleaning
    Stand; Powder-Coated Steel, 27" W x 25" D x 4" H for Wafer Box Stocked Item is in stock and ready for immediate shipping
    $340
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  3. Stores 16,382 temperature readings and 16,382 relative humidity measurements. | 9500-10 displayed
    Data Logger; Relative Humidity/Temperature Stocked Item is in stock and ready for immediate shipping
    $240
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  4. Small nitrogen generator, 20"W x 12"D x 35.5"H, with compact footprint produces up to 99% pure N2 gas | 2700-12B displayed
    Nitrogen Generator; 20"W x 12"D x 35.5"H, 10 ft³/hr @ 99% purity, 100 psig Stocked Item is in stock and ready for immediate shipping
    $5,806
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  5. Stainless steel LiftLatch. Product details may differ. | 1603-67-2 displayed
    $68
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  6. Small (4") locking latch, catcher included. Grid shows one-inch squares. | 1603-80 displayed
    $85
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  7. Increases security of desiccators and accommodates most standard padlocks. | 1603-33 displayed
    Locking Bracket; SS, LatchLock, for Single-Chamber Width Desiccators Stocked Item is in stock and ready for immediate shipping
    $27
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  8. FasTrak 24-7 Expediting Service
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  9. UL Listing Declaration for Desiccators
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  10. Qualification Documentation (IQ/OQ) for Terra Universal System
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  11. Equipment Testing and Certification
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  12. Optional stainless steel door frames extend cabinet's service life. | 2200-30A displayed
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  13. Acrylic flow meter, valve-2-20SCFH | 1600-32 displayed
    $143
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  14. Terra's Automated RB Valve provides safe pressure release and prevents influx of room air | 1600-60B displayed
    Automatic RB® (Relief/Bleed); for all Desiccators, Black Stocked Item is in stock and ready for immediate shipping
    $122
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  15. Small (4") LiftLatch with Catcher | 1603-84 displayed
    LiftLatch; Chrome-Plated, Small Non-Locking Stocked Item is in stock and ready for immediate shipping
    $162
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Wafer Storage Desiccators

  • Desiccators: Features and Design overview
  • Leveling your Desiccator

Features and Benefits

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Durable Embedded Static-Dissipative Layers

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

High Caliber Hardware

Don’t be concerned about the quality, durability, and craftsmanship of your latches, ports, glides and hinges. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware.

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
  • 3-inch Diameter Caster Set
    Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
  • Humidity and Temperature Data Logger
    Provides a convenient record of storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
  • Dual Purge and NitroWatch
    Terra’s Dual Purge and NitroWatch relative humidity controllers maintain a low-RH set-point inside a desiccator or glove box; they provide variable purge control that ensures continuous positive pressure and eliminates nitrogen waste.
  • Nitrogen Generator
    Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
  • Desiccator Cabinet Ionizing Module
    Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
  • Small Powder-Coated Steel Desiccator Stand, 4"H
    Small 4"H powder-coated steel desiccator stand adjusts to fit cabinet snugly; optional casters simplify positioning and cleaning. Also available in stainless steel and 12" height.

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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