• Material: Clear Acrylic
• Wafer Size: 200 mm
• Number of Chambers: 5
• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H
• Opening Dimensions: 25.625" W x 10.875" H
• Unit of Measure: EA
Wafer Storage Desiccators,Wafer Storage Desiccators
Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.25" W x 25" D x 61" H
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Terra Part #: 9130-21B
Manufactured By: Terra Universal
Warranty: 1 year parts, 90 days labor
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Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.25" W x 25" D x 61" H
• Chambers Per Tier: 1
• Wafer Size: 200mm
• Capacity: 20 (based on box size of 10.75" x 10.94" x 9.88" (273 x 278 x 249 mm) with 4 boxes per chamber)
• Chamber size designed to accommodate wafers with optimum air flow and humidity
• Chrome-plated LiftLatches™ included; Locking Liftlatches also available - specify Locking Liftlatch for each chamber when the cabinet is ordered
• Upgrade to all-stainless steel LiftLatches™ to minimize scratching, corrosion and contamination resulting over time with chrome-plated latches; specify when ordering
• Powder-coated Steel Stand can be ordered separately
• CAUTION: Acrylic is damaged by alcohol and many other cleaning agents. Use only water and mild detergent
• Material: Clear Acrylic
• Wafer Size: 200 mm
• Number of Chambers: 5
• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H
• Opening Dimensions: 25.625" W x 10.875" H
• Unit of Measure: EA
• Marks & Listings: CE, UL, ULC
• Weight, Product: 100 lb
• Dimensions, Product: 27.25" W x 25" D x 61" H
• Weight, Shipping: 224 lb
• Dimensions, Shipping: 66" W x 30" D x 28" H
• Package Type: Crate
Manuals & Resources
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Wafer Storage Desiccators
Desiccators: Features and Design overview- Leveling your Desiccator
Desiccators: Features and Design overview Terra's nitrogen-purged desiccator cabinets meet dry storage requirements as low as 1% relative humidity. Standardization simplifies component upgrade, retrofit and replacement. Terra's Smart controllers allow setpoint control and even multiplexed purging for the most critical humidity requirements.
Leveling your Desiccator Learn how to properly level your plastic or stainless steel desiccator cabinet, as well as instructions to align the doors.
Features and Benefits
Optimal Space Efficiency
Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.
Automatic Relief/Bleed Valve
Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.
Acrylic Wafer Box Desiccator Cabinet
Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel
Durable Embedded Static-Dissipative Layers
Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.
High Caliber Hardware
Don’t be concerned about the quality, durability, and craftsmanship of your latches, ports, glides and hinges. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware.
Reinforced Doors with Non-adhesive Gaskets
Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag
Desiccator Plenum Chamber For Uniform Gas Distribution
Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength
Built-in Plenum Distributes Dry Gas to Each Chamber
Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.
Doors - The First Failure Point of a Desiccator Cabinet
Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
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3-inch Diameter Caster Set
Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes. -
Humidity and Temperature Data Logger
Provides a convenient record of storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats. -
Dual Purge and NitroWatch
Terra’s Dual Purge and NitroWatch relative humidity controllers maintain a low-RH set-point inside a desiccator or glove box; they provide variable purge control that ensures continuous positive pressure and eliminates nitrogen waste. -
Nitrogen Generator
Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes. -
Desiccator Cabinet Ionizing Module
Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator) -
Small Powder-Coated Steel Desiccator Stand, 4"H
Small 4"H powder-coated steel desiccator stand adjusts to fit cabinet snugly; optional casters simplify positioning and cleaning. Also available in stainless steel and 12" height.
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