• Material: Clear Acrylic
• Wafer Size: 200 mm
• Number of Chambers: 5
• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H
• Opening Dimensions: 25.625" W x 10.875" H
• Unit of Measure: EA
Wafer Storage Desiccators,Wafer Storage Desiccators
Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.375" W x 24.625" D x 60.625" H
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Terra Part #: 9130-21B
Manufactured By: Terra Universal
Warranty: 1 year parts, 90 days labor
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Desiccator; Wafer Box, for 200 mm Wafers, Clear Acrylic, 5 Chambers, 27.375" W x 24.625" D x 60.625" H
- Chambers Per Tier: 1
- Wafer Size: 200mm
- Capacity: 20 (based on box size of 10.75" x 10.94" x 9.88" (273 x 278 x 249 mm) with 4 boxes per chamber)
• Material: Clear Acrylic
• Wafer Size: 200 mm
• Number of Chambers: 5
• Chamber Dimensions: 25.25" W x 22.5" D x 11.75" H
• Opening Dimensions: 25.625" W x 10.875" H
• Unit of Measure: EA
• Marks & Listings: CE, UL, ULC
• Weight, Product: 100 lb
• Dimensions, Product: 27.375" W x 24.625" D x 60.625" H
• Weight, Shipping: 224 lb
• Dimensions, Shipping: 66" W x 30" D x 28" H
• Package Type: Crate
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Wafer Storage Desiccators
Desiccators: Features and Design overview- Leveling your Desiccator
Desiccators: Features and Design overview Terra's nitrogen-purged desiccator cabinets meet dry storage requirements as low as 1% relative humidity. Standardization simplifies component upgrade, retrofit and replacement. Terra's Smart controllers allow setpoint control and even multiplexed purging for the most critical humidity requirements.
Leveling your Desiccator Learn how to properly level your plastic or stainless steel desiccator cabinet, as well as instructions to align the doors.
Features and Benefits
Acrylic Wafer Box Desiccator Cabinet
Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel
Optimal Space Efficiency
Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.
Automatic Relief/Bleed Valve
Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.
High Caliber Hardware
Seemingly small details like latches, ports, glides and hinges are often overlooked or ignored by other manufacturers, and later become the point of costly recurring maintenance or equipment failure. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware. Individual components are carefully designed and rigorously tested to guarantee the highest quality, durability, and craftsmanship.
Reinforced Doors with Non-adhesive Gaskets
Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag
Built-in Plenum Distributes Dry Gas to Each Chamber
Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.
Durable Embedded Static-Dissipative Layers
Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.
Doors - The First Failure Point of a Desiccator Cabinet
Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.
Desiccator Plenum Chamber For Uniform Gas Distribution
Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength
Highest Standards For Desiccators and Electronic Components
Terra’s desiccator cabinets and RH control systems are designed and built to the highest standards required by defense and semiconductor industries for long-term reliability and protection against damage, injuries, and electrical hazards.
Continuous Product Improvement
At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.
Long-Term Customers
Terra is committed to building long-term relationships with satisfied clients; 94% of orders each year come from repeat customers
Comprehensive Product Portfolio
Terra’s comprehensive product portfolio includes solutions for every application and budget. Our technical sales staff will guide you toward the product most suitable for your requirements.
Smart® Desiccator Cabinet on Automatic Height Adjustable Workstation
Automatic height adjusting workstations allow users to quickly alternate between comfortable sitting and standing positions while performing different tasks with heavy equipment on the workspace, such as this Smart® Desiccator Cabinet connected to a Nitrogen Generator.
Catalog of CE-Marked Products
Terra offers over 1,700 CE-marked products configured for international voltage requirements
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
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Humidity and Temperature Data Logger
Records storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats. -
3-inch Diameter Caster Set
Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes. -
Laboratory Nitrogen Generator
Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes. -
Universal Adjustable Base Stands for Desiccator Cabinets and Cleanroom Equipment
Stainless steel or powder-coated steel base stands easily adjust to fit cabinets, desiccators and cleanroom equipment of any size or shape. Stands raises equipment to ergonomic height to ease disinfection and sample monitoring. BioSafe design suitable for any cleanroom or lab environment. -
Desiccator Cabinet Ionizing Module
Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator) -
Dual Purge™ and NitroWatch™ Work Together to Fully Automate RH Control
Terra's Dual Purge™ and NitroWatch™ operate in tandem to precisely and automatically control the flow of nitrogen and maintain a preset humidity level (from ambient to 0% ± 1.5% RH), no matter how operating conditions may change. -
Data Logging with 113,000 Readings at User Defined Intervals
Terra's Smart® IsoDry® Nitro-Watch™ logs RH, temp, door open/close, purge on/off, and sensor removal/attachment. The max data file size is roughly 4 MB or 113,000 readings. This is approximately 32 hours of data when logging at 1 second intervals, 2 weeks at 10 second intervals, 6 weeks at 30 second intervals, or 12 weeks at 1 minute intervals. When the system reaches the 4MB limit, data begins to wrap, overwriting oldest data with new. -
Plug & Play Data Logging
Plug in a USB flash drive to your Smart® IsoDry® Nitro-Watch™ to transfer data in .CSV format. No software required.
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