Wet Processing Stations and Cleaning Benches

Commercial or Generic Name	Process	Chemical Composition	Concentration	Typical Temperature	Recommended Product
Aqua Regia	Gold Etchant	Hydrochloric Acid (HCl) Nitric Acid (HNO₃)	75% 25%	90°	C Series
Buffered Oxide Etch (BOE)	Etch SiO₂	Ammonium Fluoride (NH₄F) Aqueous Hydrofluoric Acid (HF) Aqueous	40%	15-40°C Ambient	A Series RCe Series
CP8	Etch	Nitric Acid (HNO₃) Hydrofluoric Acid (HF)		Ambient	A Series
Etch (Indium) Molybdenum Platinum Nichrome	Etch	Hydrochloric Acid (HCl) Aqueous Nitric Acid (HNO₃)	37-38% 70-71%		QA Series
Metal Etch	Etch A, AlSi Al Si Cu	Phosphoric Acid (H₃PO₄) Acetic Acid (CH₃COOH) Nitric Acid (HNO₃)	85-87%	30-60°C	QA Series
Nitride Etch	Etch	Phosphoric Acid (H₃PO₄) DI Water (H₂0)	85-87% 15-13%	150-185°C	Nb Series
Organic Stripper	Resist Removal	PRS-1000 S-43 Lozolin No Phenol-922	Full strength	Room Temperature 120°C	Nb Series
Oxide Resist Strip	SiO₂ Resist Stripping	Sulfuric Acid (H₂SO₄) Ammonium Persulfate (NH₄S₂O₂)	95-96%		QA Series
Phenolic Stripper	Resist Removal	J100 Bermar 712D R-10		95-100°C	C Series
Resist Series (Metalized)	Resist Removal	Chromic Sulfuric Acid (CrO₃+H₂SO₄)			A Series
R.C.A. Clean	Pre-Diffusion Cleans Quartzware	Step 1: Water Hydrogen Peroxide (H₂O₂) Ammonium Fuoride (NH₄CH) Step 2: DI Water (H₂O) Hydrogen Peroxide (H₂O₂) Hydrochloric Acid (HCL)	40%	75-85°C	Qa Series
Silicon Etch	Etch	Acetic Acid (CH₃COOH) Nitric Acid (HNO₃) HydroFuoric Acid (HF)		Ambient	A Series
Sirtl Etch	Etch	Chromium Trioxide (CrO₃) DI Water (H₂0) Hydrofluoric Acid (HF)		Ambient	A Series
Slope Etch	Etch	Phosphoric Acid (H₃PO₄) Acetic Acid (CH₃COOH) Nitric Acid (HNO₃)		55°C	Qa Series
Standard Resist Strip (do not use w/aluminum)	SiO2 Resist Strip	Sulfuric Acid (H₂SO₄) Hydrogen Peroxide (H₂O₂)	95-96%	110-140°C	Qa Series
2:1 Etch	Etch	DI Water (H₂O) Hydrofuoric Acid (HF)		Ambient	A Series
Wafer Rinsing	Rinsing	DI Water (H₂O)	100%	Ambient	DR-Series

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Features and Benefits

Polypropylene Wet Cleaning Station

Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.

N2 and DI Water Spray Guns

Handy spray guns provide a ready sources of nitrogen or deionized water installed in locations to suit your process requirements (shown: DI water spray gun installed on cleaning station).

Fully Customizable Work Stations

Use Terra's QuickQuote form to specify your processing requirements; Modular wet station designs adapt to specific processing requirements (shown: custom Manual Wafer Processing Bench).

Wet Processing Modular Cleaning Station with Laminar Flow Hood

Modular Cleaning Station with Laminar Flow Bench

Terra's modular wet cleaning stations integrate with the Vertical Laminar Flow Hood (shown: No. 2000-16) to provide a HEPA-filtered work environment and safe fume ventilation.

Modular Deck Configurations

Modular designs allow tanks and bath locations to suit your process. Shown: wafer processing bench with programmable quartz baths and rinsers (controls mounted above or below desk to suit protocol).

Chemical Delivery and Treatment Systems

Many chemical delivery and treatment systems available. The Chemical Delivery System shown automates chemical collection, storage and delivery in wafer etching, silicon chip plating, cleaning, and circuit board or solar system component processing.

Solvent Spray Booth with Foot-Operated Dispensing

This Solvent Spray Booth allows footpedal activation of solvent cleaning fluid; includes explosion-proof lighting, exhaust duct, sprinkers and split sink with dual collection reservoirs.

Sinks for Every Chemical Process

Many sink sizes and materials, including polypropylene (shown), PVDF and stainless steel, offer broad chemical resistance and easy cleaning; carboys collect run-off for easy disposal.

Stainless Steel Semi-Automated Wafer Processing Bench

Automated andl Semi-Automated Wet Processing Benches

Specify desired processing automation level for acid-resistant polypropylene or solvent-resistant stainless steel stations. Shown: stainless steel wafer bench includes CO2 cylinder for fire suppression.

Adjustable Transparent Sash

The PVC sliding shield protects workers from contact with chemical fumes. Variable positioning helps control laminar air speeds.

Bottom Storage

Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.

Wet Stations

Nitrogen Generators
Wet Cleaning Station
Modular Wet Processing Stations
Complete Line of Tanks, Baths, Risers
Modular Cleaning Stations

Nitrogen Generators provide a reliable source of clean, dry nitrogen, requiring only a compressed air source Nitrogen Generators Nitrogen Generators eliminate drawbacks of conventional nitrogen sources, and gives you control of rate and purity of nitrogen production. It gives you complete control of the production of nitrogen for use in a wide range of cleanroom applications.

Incorporates all processing components into one self-contained system with power switch and indicating light, light switch, static pressure | 7018-00 displayed Wet Cleaning Station Incorporates all processing components into one self-contained system with power switch and indicating light, light switch, static pressure.

Walkthrough of a custom Modular Wet Station Modular Wet Processing Stations Modular Wet Stations can be customized with any number of baths or tanks, as well as automation systems, to best fit your workflow.

Manual and programmable tanks, baths and rinsers meet critical process requirements (shown: quartz baths) | 7018-28 displayed Complete Line of Tanks, Baths, Risers Manual and programmable tanks, baths and rinsers meet critical cleaning and processing requirements including silicon nitride etching, filtered etching and solvent cleaning (shown: ultra-pure programmable quartz baths)

Modular cleaning stations, in polypropylene (shown) or stainless steel, integrate with Vertical Laminar Flow Stations for HEPA filtration | 2000-16 displayed Modular Cleaning Stations Modular cleaning stations, in polypropylene (shown) or stainless steel, integrate with Vertical Laminar Flow Stations that provide a flow of HEPA-filtered air to meet clean standards.

Terra Universal

Laboratory-Equipment

Terra Universal

Laboratory-Equipment

Wet Processing & Cleaning Benches

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