Economical plastic with broad chemical compatibility
Ideal for wet processing station panels
Loses some chemical resistance at high temperatures
Suitable for HF and KOH processes
Quartz
The preferred material for ultra-pure applications
Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
Suitable for most chemicals (but not HF acid)
Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
Broader range of chemical resistance than polypropylene
Suitable for high process temperatures
Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
Resistant to an extremely wide range of chemicals
Perfect for KOH and HF acid (which etch quartz)
Softer than quartz, so care must be taken to avoid scuffing, staining
Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.
The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.
Modular, economical turnkey solution for safe, convenient operation of baths, rinsers, and other process modules; bi-directional exhaust system safely removes hazardous fumes; fits beneath VLF hood(sold separately) for HEPA-filtered processing
Cleaning Station
Self-contained, easy-to-clean system includes sliding access shield and fluorescent illuminator; accommodates customizable processing modules (rinsing tanks, etching baths, ultrasonic cleaners, etc.); add sinks, gooseneck faucets and spray guns for nitrogen and deionized water
Solvent Spray Booth
For solvent cleaning and nitrogen drying operations using corrosive or flammable liquids; includes exhaust system for safe fume venting; explosion-proof illuminator safely operates in presence of flammable vapors; overhead sprinklers engage in case of fire
Durable; resistant to corrosion, chemicals/solvents, and rust. Making it the preferred material wherever frequent cleaning and sterilization are required.
PFA Teflon
A translucent polymer, also a marginally flexible polymer with low friction and exceptional non-stick properties
PVDF
Low in weight, and thermal conductivity; High chemical corrosion resistance; Heat resistance; Mechanical strength and toughness
Quartz
Same durability as concrete or granite, however it will not chip or crack as easily; Non-porous, therefore, resisits staining and will not harbor bacteria
Polypropylene
Opaque (white) polypropylene resists most acids, alkalis, and solvents
Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.
N2 and DI Water Spray Guns
Handy spray guns provide a ready sources of nitrogen or deionized water installed in locations to suit your process requirements (shown: DI water spray gun installed on cleaning station).
Fully Customizable Work Stations
Use Terra's QuickQuote form to specify your processing requirements; Modular wet station designs adapt to specific processing requirements (shown: custom Manual Wafer Processing Bench).
Modular Cleaning Station with Laminar Flow Bench
Terra's modular wet cleaning stations integrate with the Vertical Laminar Flow Hood (shown: No. 2000-16) to provide a HEPA-filtered work environment and safe fume ventilation.
Modular Deck Configurations
Modular designs allow tanks and bath locations to suit your process. Shown: wafer processing bench with programmable quartz baths and rinsers (controls mounted above or below desk to suit protocol).
Chemical Delivery and Treatment Systems
Many chemical delivery and treatment systems available. The Chemical Delivery System shown automates chemical collection, storage and delivery in wafer etching, silicon chip plating, cleaning, and circuit board or solar system component processing.
Solvent Spray Booth with Foot-Operated Dispensing
This Solvent Spray Booth allows footpedal activation of solvent cleaning fluid; includes explosion-proof lighting, exhaust duct, sprinkers and split sink with dual collection reservoirs.
Sinks for Every Chemical Process
Many sink sizes and materials, including polypropylene (shown), PVDF and stainless steel, offer broad chemical resistance and easy cleaning; carboys collect run-off for easy disposal.
Specify desired processing automation level for acid-resistant polypropylene or solvent-resistant stainless steel stations. Shown: stainless steel wafer bench includes CO2 cylinder for fire suppression.
Adjustable Transparent Sash
The PVC sliding shield protects workers from contact with chemical fumes. Variable positioning helps control laminar air speeds.
Bottom Storage
Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.
Wet Stations
Different N2 Generator Options to Meet Your Needs
Wet Cleaning Station
Modular Wet Processing Stations
Complete Line of Tanks, Baths, Risers
Modular Cleaning Stations
Different size membrane Nitrogen generator options are available to meet your N2 gas supply needsDifferent N2 Generator Options to Meet Your NeedsChoose among 3 different sizes of portable nitrogen generator designs to meet your N2 requirements. Suitable for both industrial and commercial applications.
Incorporates all processing components into one self-contained system with power switch and indicating light, light switch, static pressure | 7018-00 displayedWet Cleaning StationIncorporates all processing components into one self-contained system with power switch and indicating light, light switch, static pressure.
Walkthrough of a custom Modular Wet StationModular Wet Processing StationsModular Wet Stations can be customized with any number of baths or tanks, as well as automation systems, to best fit your workflow.
Manual and programmable tanks, baths and rinsers meet critical process requirements (shown: quartz baths) | 7018-28 displayedComplete Line of Tanks, Baths, RisersManual and programmable tanks, baths and rinsers meet critical cleaning and processing requirements including silicon nitride etching, filtered etching and solvent cleaning (shown: ultra-pure programmable quartz baths)
Modular cleaning stations, in polypropylene (shown) or stainless steel, integrate with Vertical Laminar Flow Stations for HEPA filtration | 2000-16 displayedModular Cleaning StationsModular cleaning stations, in polypropylene (shown) or stainless steel, integrate with Vertical Laminar Flow Stations that provide a flow of HEPA-filtered air to meet clean standards.