Semiconductor Manufacturing Equipment

Don't risk operational delays or cleanroom shutdown because of a damaged door!

Terra's pass-through chambers last indefinitely, much longer than our standard product revision cycle. Pass-Through doors, however, are subject to damage, and ordering a legacy replacement can be costly and disrupt cleanroom operation. To avoid these problems, order replacements at the time you purchase the pass-through chamber; simply add “-RH” (for right-side hinge) or “-LH” (for left-side hinge) to the part number of the chamber.

Shutting the Door on Contamination

These Pass-Through Chambers cut down significantly on traffic and contamination by providing a better, safer way to transfer equipment and paperwork.

304 Stainless steel or powder-coated steel pass-throughs ensure clean operation. For especially stringent particle requirements, select an UltraClean™ electropolished 304 stainless steel pass-through.

Polypropylene and PVC models are suitable for chemical pass-through applications, and Static-Dissipative PVC models combine excellent chemical resistance with a surface resistivity of about 107ohms/square for enhanced static and particle control. Each model features viewing windows of a compatible material.

Doors on either side are outfitted with an automatic mechanical interlock that allows only one door at a time to open. The no-maintenance interlock has no power, gas, or other facility requirement, so it continues to operate when other systems shut down. It engages at the same time the latch is lifted to open the door; no additional hands-on manual steps are required.

Access Clearances 
Width = W (nominal) – 1.88”
Depth = D (nominal)* – 0.12”
Height = H (nominal) – 1.25”
* Subtract 0.5” for plastic chambers. Each door adds 0.5” to nominal depth.

Standard Pass-Through Mounting

All models include mounting brackets (stainless or powder-coated steel) and required hardware. Mounting brackets require 0.25” (6 mm) clearance between the wall cut-out and the pass-through. Standard mounting is 2” (51 mm) from the front of the cleanroom side (specify other desired location).

Wall Cut-Out = W (nominal) +0.5” x H (nominal) + 0.5”

Pass-Through Chamber Support Brackets

Order optional support brackets for wall-mount pass-through chambers that are 36"D or larger. They support the weight of the pass-through, and are designed to allow chambers to protrude 2" (51mm) on the cleanroom side. Indicate other desired position when ordering.