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Terra Part #PriceShips in
Cleaning StationPolypropylene2472 7018-00 19636 $36,096.....2
Cleaning StationPolypropylene2496 7018-02 19638 $42,911.....3
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Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

Some ship in:
Usually Ships in:
Free shipping in contiguous USA
Custom-configured product: Terra will quote.
Custom-configured product: Terra will quote.
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Product Details
  • Custom engineered to meet specific cleaning requirements
  • Polypropylene stations are ideal for acid and caustic chemistries
  • Ideal for applications using solvents or flammables; complete explosion-proof bench available
  • Manufactured with all explosion-proof components, including fan/filter unit and overhead LED illuminator, for hazardous applications
  • Exhaust ducted through a standard 10" diameter flange
  • Raised lip surrounds the work area to prevent floor spills
  • Constructed from stress relieved polypropylene 0.5" thick or 304 SS
  • Select optional accessories for your cleaning processes: Sinks, Spray Guns ,Carboys
  • On/off push buttons control the light and optional filter unit and a backpressure gauge monitors the exhaust flow
Features & Benefits

Features & Benefits

Wet Processing: Which Material is Best?
Process Control, Safety, and Consistency
Polypropylene
  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
Quartz
  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart
Commercial or Generic NameProcessChemical CompositionConcentrationTypical TemperatureRecommended Product
Aqua RegiaGold EtchantHydrochloric Acid (HCl)
Nitric Acid (HNO3)
75%
25%
90°C Series
Buffered Oxide
Etch (BOE)
Etch SiO2Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
40%15-40°C
Ambient
A Series
RCe Series
CP8EtchNitric Acid (HNO3)
Hydrofluoric Acid (HF)
 AmbientA Series
Etch (Indium)
Molybdenum Platinum
Nichrome
EtchHydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
37-38%
70-71%
 QA Series
Metal EtchEtch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87%30-60°CQA Series
Nitride EtchEtchPhosphoric Acid (H3PO4)
DI Water (H20)
85-87%
15-13%
150-185°CNb Series
Organic StripperResist RemovalPRS-1000
S-43
Lozolin
No Phenol-922
Full strengthRoom Temperature
120°C
Nb Series
Oxide Resist StripSiO2 Resist StrippingSulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96%QA Series
Phenolic StripperResist RemovalJ100
Bermar 712D
R-10
 95-100°CC Series
Resist Series (Metalized)Resist RemovalChromic Sulfuric Acid (CrO3+H2SO4)  A Series
R.C.A. CleanPre-Diffusion Cleans
Quartzware
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40%75-85°CQa Series
Silicon EtchEtchAcetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
 AmbientA Series
Sirtl EtchEtchChromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
 AmbientA Series
Slope EtchEtchPhosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
 55°CQa Series
Standard Resist Strip (do not use w/aluminum)SiO2 Resist StripSulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96%110-140°CQa Series
2:1 EtchEtchDI Water (H2O)
Hydrofuoric Acid (HF)
 AmbientA Series
Wafer RinsingRinsingDI Water (H2O)100%AmbientDR-Series
Particle Trapping Test

Polypropylene Wet Cleaning Station

Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.

Ideal for RCA Silicon Wafer Cleaning, Wet Etching and Rinsing

Polypropylene wet stations are ideal for removing organic residue and films from silicon wafers. HEPA fan filter units mounted on top supply Class 100 ultra-low particulate airflow. Vents along the back wall help maintain laminar airflow to prevent contamination and draw away potent fumes to the exhaust duct.

Customize to Suit Your Needs

Self-contained Wet Cleaning Stations provide the perfect turnkey solution for a wide range of cleaning requirements. Add sinks, gooseneck faucets and spray guns for nitrogen and deionized water to accommodate unique needs of your workflow.

Removable Deck Simplifies Cleaning and Maintenance

The removable perforated polypropylene decks safely guide liquids to the bottom drain and prevent parts from falling into the sink. Adjustable vents are also located underneath to improve laminar airflow and ventilation of fumes.

Exhaust Duct Connection For Safe Fume Extraction

Polypropylene wet etching and cleaning stations are equipped with an exhaust duct to safely carry fumes away from workers.

Adjustable Transparent Sash

The PVC sliding shield protects workers from contact with chemical fumes. Variable positioning helps control laminar air speeds.

Bottom Storage

Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.

Wide Selection of Global Shipping Options

Terra offers a broad range of global shipping services including door-to-door and white glove delivery. Each product is safely packaged in a heat-treated wooden crate that meets international shipping standards.

Network of International Reps

Terra employs an international network of more than 20 local sales reps trained to provide comprehensive service on Terra's complete catalog of products
Available Accessories
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Sinks for Every Chemical Process

    Many sink sizes and materials, including polypropylene (shown), PVDF and stainless steel, offer broad chemical resistance and easy cleaning; carboys collect run-off for easy disposal.
  • Vacuum Quick Connector – No Tools Required to Connect and Disconnect

    Convenient quick connectors couple by pushing stem into body until it click. Decouples by pulling body sleeve away.
  • N2 and DI Water Spray Guns

    Handy spray guns provide a ready sources of nitrogen or deionized water installed in locations to suit your process requirements (shown: DI water spray gun installed on cleaning station).
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