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Product Group:
7018-PP-03
7018-PP-03
Integrated Wet Cleaning Stations
Manufactured By: Terra Universal
Available Certified ISO Grade Designs: ISO 5, ISO 6, ISO 7, ISO 8
Fully customizable to your specific workflow and airflow needs
Integrated fan filter units provide laminar flow for up to ISO 4 air cleanliness to protect samples from contamination
Bi-directional exhaust system through wall and work surface safely removes hazardous fumes
Polypropylene stations are ideal for acid and caustic chemistries, stainless steel design available for solvents and flammables
Complete explosion-proof configuration available for hazardous environments
• Available Certified ISO Grade Designs: ISO 5, ISO 6, ISO 7, ISO 8
Economical plastic with broad chemical compatibility
Ideal for wet processing station panels
Loses some chemical resistance at high temperatures
Suitable for HF and KOH processes
Quartz
The preferred material for ultra-pure applications
Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
Suitable for most chemicals (but not HF acid)
Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
Broader range of chemical resistance than polypropylene
Suitable for high process temperatures
Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
Resistant to an extremely wide range of chemicals
Perfect for KOH and HF acid (which etch quartz)
Softer than quartz, so care must be taken to avoid scuffing, staining
Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.
The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.
Provide Terra with your desired ISO Grade design. We will tailor the product to meet your criteria and certify it with a report appended to your invoice. Certificate includes all the necessary information to streamline audits and facility compliance.
Polypropylene Wet Cleaning Station
Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.
Ideal for RCA Silicon Wafer Cleaning, Wet Etching and Rinsing
Polypropylene wet stations are ideal for removing organic residue and films from silicon wafers. HEPA fan filter units mounted on top supply Class 100 ultra-low particulate airflow. Vents along the back wall help maintain laminar airflow to prevent contamination and draw away potent fumes to the exhaust duct.
Customize to Suit Your Needs
Self-contained Wet Cleaning Stations provide the perfect turnkey solution for a wide range of cleaning requirements. Add sinks, gooseneck faucets and spray guns for nitrogen and deionized water to accommodate unique needs of your workflow.
Removable Deck Simplifies Cleaning and Maintenance
The removable perforated polypropylene decks safely guide liquids to the bottom drain and prevent parts from falling into the sink. Adjustable vents are also located underneath to improve laminar airflow and ventilation of fumes.
Exhaust Duct Connection For Safe Fume Extraction
Polypropylene wet etching and cleaning stations are equipped with an exhaust duct to safely carry fumes away from workers.
Adjustable Transparent Sash
The PVC sliding shield protects workers from contact with chemical fumes. Variable positioning helps control laminar air speeds.
Bottom Storage
Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.
Wide Selection of Global Shipping Options
Terra offers a broad range of global shipping services including door-to-door and white glove delivery. Each product is safely packaged in a heat-treated wooden crate that meets international shipping standards.
Network of International Reps
Terra employs an international network of more than 20 local sales reps trained to provide comprehensive service on Terra's complete catalog of products
Available Accessories
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
Sinks for Every Chemical Process
Many sink sizes and materials, including polypropylene (shown), PVDF and stainless steel, offer broad chemical resistance and easy cleaning; carboys collect run-off for easy disposal.
Vacuum Quick Connector – No Tools Required to Connect and Disconnect
Convenient quick connectors couple by pushing stem into body until it click. Decouples by pulling body sleeve away.
N2 and DI Water Spray Guns
Handy spray guns provide a ready sources of nitrogen or deionized water installed in locations to suit your process requirements (shown: DI water spray gun installed on cleaning station).
On a tight schedule?Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*
FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.
Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.
* Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.
