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Wafer Size

Terra Part #PriceShips in
Clear Acrylic5200 mm 9130-21B 67864 $5,3761-3 Days2
Only 1 left in stock
Clear Acrylic4200 mm 9130-45B 67871 $4,34015-19 Days3
Clear Acrylic4300 mm 9130-23B 67866 $3,77415-19 Days4
Clear Acrylic6200 mm 9130-46B 67872 $6,44315-19 Days5
Clear Acrylic8200 mm 9130-47B 67873 $7,97815-19 Days6
Clear Acrylic8300 mm 9130-22B 67865 $6,28015-19 Days7
Clear Acrylic10200 mm 9130-20B 67863 $10,06415-19 Days8
Static-Dissipative PVC5200 mm 9130-61 63471 $4,8901-3 Days9
Clearance Only 1 left in stock
Static-Dissipative PVC4200 mm 9130-48B 67874 $5,65115-19 Days10
Static-Dissipative PVC4300 mm 9130-27B 67870 $5,2641-3 Days11
Only 5 left in stock
Static-Dissipative PVC6200 mm 9130-49B 67876 $8,39715-19 Days12
Static-Dissipative PVC8200 mm 9130-50B 67877 $10,28815-19 Days13
Static-Dissipative PVC8300 mm 9130-26B 67869 $8,01315-19 Days14
Static-Dissipative PVC10200 mm 9130-24B 67867 $13,00615-19 Days15
Static-Dissipative PVC5200 mm 9130-25B 67868 $6,26415-19 Days16
Clear Acrylic4300 mm 9130-51B 67878 $4,31115-19 Days17
Clear Acrylic8300 mm 9130-52B 67880 $6,76215-19 Days18
Static-Dissipative PVC4300 mm 9130-53B 67882 $5,59215-19 Days19
Static-Dissipative PVC8300 mm 9130-54B 67883 $10,0781-3 Days20
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Product Details

• Stores 200 mm and 300 mm wafers in a dry, particle-free environment

• Designed for purging with nitrogen gas

• Maximizes space efficiency and simplifies access to wafer lot boxes

• Optional Dual Purge and NitroWatch control systems maintain set-point humidity levels inside the cabinet (sold separately)

• All models feature a plenum chamber for gas distribution

• Available in strong, rigid acrylic or static-dissipative PVC

• 304 stainless steel door frames and ergonomic LiftLatches for durability

Marks & Listings: CE, UL, ULC

Wafer Box Desiccators

Standard Features

  • A Grounding Terminals
    Standard on static-dissipative PVC chambers to prevent electro-static discharge (ESD)
  • B Plenum Chamber
    Located in rear of cabinet, plenum ensures uniform flow of nitrogen gas to all chambers; minimizes moisture migration
  • C Grounded Door Latch
    Prevents ESD damage to stored parts (standard on static-dissipative PVC cabinets)
  • D Stainless Steel Hinges
    Non-contaminating hinges contribute to a long service life under heavy use
  • E Automatic RB® Valve
    Prevents overpressure; acts as a check valve (one included per chamber)
  • F Stainless Steel-Framed Doors with One-Piece Gasket
    "e"-profile gasket mechanically attached to stainless steel reinforcement frame to prevent outgassing adhesives; one-piece design won’t slough or separate

Optional Features

  • 1 Dual Purge™ System
    Provides a variable flow of nitrogen purge gas: high to recover set point, low to conserve nitrogen
  • 2 NitroWatch® RH Controller
    Monitors internal humidity; activates a high-flow purge when RH climbs above set point
  • 3 Door Sensor Switches
    Activate high-flow purge when a door opens to recover RH set point
  • 4 Stand with Nylon Leveling Feet
    Powder-coated or 304 stainless steel; 4” or 12” high; casters available

Note Shown: Flowmeter included for manual regulation of flow rate (choose Dual Purge/NitroWatch systems for automated control); Nitrogen generator provides un uninterrupted supply of nitrogen up to 99% pure to eliminate reliance on bulky canisters

Wafer Storage Desiccators

  • Desiccators: Features and Design overview
  • Leveling your Desiccator

Features & Benefits

Features and Benefits

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

High Caliber Hardware

Seemingly small details like latches, ports, glides and hinges are often overlooked or ignored by other manufacturers, and later become the point of costly recurring maintenance or equipment failure. Terra’s products are made of long lasting, cleanroom compatible, top tier hardware. Individual components are carefully designed and rigorously tested to guarantee the highest quality, durability, and craftsmanship.

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Durable Embedded Static-Dissipative Layers

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Highest Standards For Desiccators and Electronic Components

Terra’s desiccator cabinets and RH control systems are designed and built to the highest standards required by defense and semiconductor industries for long-term reliability and protection against damage, injuries, and electrical hazards.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Long-Term Customers

Terra is committed to building long-term relationships with satisfied clients; 94% of orders each year come from repeat customers

Comprehensive Product Portfolio

Terra’s comprehensive product portfolio includes solutions for every application and budget. Our technical sales staff will guide you toward the product most suitable for your requirements.

Smart® Desiccator Cabinet on Automatic Height Adjustable Workstation

Automatic height adjusting workstations allow users to quickly alternate between comfortable sitting and standing positions while performing different tasks with heavy equipment on the workspace, such as this Smart® Desiccator Cabinet connected to a Nitrogen Generator.

Catalog of CE-Marked Products

Terra offers over 1,700 CE-marked products configured for international voltage requirements

Available Accessories

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Humidity and Temperature Data Logger
    Records storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
  • 3-inch Diameter Caster Set
    Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
  • Laboratory Nitrogen Generator
    Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
  • Universal Adjustable Base Stands for Desiccator Cabinets and Cleanroom Equipment
    Stainless steel or powder-coated steel base stands easily adjust to fit cabinets, desiccators and cleanroom equipment of any size or shape. Stands raises equipment to ergonomic height to ease disinfection and sample monitoring. BioSafe design suitable for any cleanroom or lab environment.
  • Desiccator Cabinet Ionizing Module
    Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
  • Dual Purge™ and NitroWatch™ Work Together to Fully Automate RH Control
    Terra's Dual Purge™ and NitroWatch™ operate in tandem to precisely and automatically control the flow of nitrogen and maintain a preset humidity level (from ambient to 0% ± 1.5% RH), no matter how operating conditions may change.
  • Data Logging with 113,000 Readings at User Defined Intervals
    Terra's Smart® IsoDry® Nitro-Watch™ logs RH, temp, door open/close, purge on/off, and sensor removal/attachment. The max data file size is roughly 4 MB or 113,000 readings. This is approximately 32 hours of data when logging at 1 second intervals, 2 weeks at 10 second intervals, 6 weeks at 30 second intervals, or 12 weeks at 1 minute intervals. When the system reaches the 4MB limit, data begins to wrap, overwriting oldest data with new.
  • Plug & Play Data Logging
    Plug in a USB flash drive to your Smart® IsoDry® Nitro-Watch™ to transfer data in .CSV format. No software required.

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Manuals & Resources

Manuals & Resources

Blog Post

Desiccator Cabinet Features Comparison

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