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Material

Number of Chambers

Wafer Size

Terra Part #PriceShips in
Static-Dissipative PVC4200 mm 9130-48B $4,89215-19 Days2
Static-Dissipative PVC4300 mm 9130-27B $4,1421-3 Days3
Static-Dissipative PVC6200 mm 9130-49B $7,26815-19 Days4
Static-Dissipative PVC8200 mm 9130-50B $8,90515-19 Days5
Static-Dissipative PVC8300 mm 9130-26B $6,93415-19 Days6
Static-Dissipative PVC10200 mm 9130-24B $11,25715-19 Days7
Static-Dissipative PVC5200 mm 9130-61 $3,8481-3 Days8
Clear Acrylic4200 mm 9130-45B $3,75715-19 Days9
Clear Acrylic4300 mm 9130-23B $3,26715-19 Days10
Clear Acrylic6200 mm 9130-46B $5,57715-19 Days11
Clear Acrylic8200 mm 9130-47B $6,90515-19 Days12
Clear Acrylic8300 mm 9130-22B $5,43515-19 Days13
Clear Acrylic10200 mm 9130-20B $8,71015-19 Days14
Clear Acrylic5200 mm 9130-21B $4,23015-19 Days15
Static-Dissipative PVC5200 mm 9130-25B $5,42215-19 Days16
Clear Acrylic4300 mm 9130-51B $3,73215-19 Days17
Clear Acrylic8300 mm 9130-52B $5,85215-19 Days18
Static-Dissipative PVC4300 mm 9130-53B $4,84115-19 Days19
Static-Dissipative PVC8300 mm 9130-54B $7,9291-3 Days20
Material
Number of Chambers
Wafer Size
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Product Details

• Stores 200 mm and 300 mm wafers in a dry, particle-free environment

• Designed for purging with nitrogen gas

• Maximizes space efficiency and simplifies access to wafer lot boxes

• Optional Dual Purge and NitroWatch control systems maintain set-point humidity levels inside the cabinet (sold separately)

• All models feature a plenum chamber for gas distribution

• Available in strong, rigid acrylic or static-dissipative PVC

• 304 stainless steel door frames and ergonomic LiftLatches for durability

Wafer Box Desiccators

Standard Features

  • A Grounding Terminals
    Standard on static-dissipative PVC chambers to prevent electro-static discharge (ESD)
  • B Plenum Chamber
    Located in rear of cabinet, plenum ensures uniform flow of nitrogen gas to all chambers; minimizes moisture migration
  • C Grounded Door Latch
    Prevents ESD damage to stored parts (standard on static-dissipative PVC cabinets)
  • D Stainless Steel Hinges
    Non-contaminating hinges contribute to a long service life under heavy use
  • E Automatic RB® Valve
    Prevents overpressure; acts as a check valve (one included per chamber)
  • F Stainless Steel-Framed Doors with One-Piece Gasket
    "e"-profile gasket mechanically attached to stainless steel reinforcement frame to prevent outgassing adhesives; one-piece design won’t slough or separate

Optional Features

  • 1 Dual Purge™ System
    Provides a variable flow of nitrogen purge gas: high to recover set point, low to conserve nitrogen
  • 2 NitroWatch® RH Controller
    Monitors internal humidity; activates a high-flow purge when RH climbs above set point
  • 3 Door Sensor Switches
    Activate high-flow purge when a door opens to recover RH set point
  • 4 Stand with Nylon Leveling Feet
    Powder-coated or 304 stainless steel; 4” or 12” high; casters available

Note Shown: Flowmeter included for manual regulation of flow rate (choose Dual Purge/NitroWatch systems for automated control); Nitrogen generator provides un uninterrupted supply of nitrogen up to 99% pure to eliminate reliance on bulky canisters

Wafer Storage Desiccators

  • Desiccators: Features and Design overview
  • Leveling your Desiccator

Features & Benefits

Features and Benefits

Optimal Space Efficiency

Wafer Desiccator Cabinets are designed specifically for standard 200 mm and 300 mm wafer lot boxes used in semiconductor operations; select dissipative PVC for static safety.

Automatic Relief/Bleed Valve

Terra's Automatic Relief/Bleed (RB) Valve opens up at 0.01 PSI, relieving overpressure that could damage desiccators; also works as a check valve to prevent influx of room air.

Acrylic Wafer Box Desiccator Cabinet

Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers. Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

Static-Dissipative PVC Plating

Terra's SDPVC features bonded dissipative layers that resist abrasion. SDPVC desiccators retain their surface resistivity of 106 - 108 ohms/square indefinitely (unlike spray-on coatings that can wear off after a few years), protecting your materials against ESD damage. Further, the control of static charges eliminates particle attractions, helping maintain clean surfaces.

Ergonomic LiftLatches

Lifting latch mechanism minimizes stress on wrists and desiccator hinges; non-rotary motion generates no particles inside the storage area (optional locking model shown)

Reinforced Doors with Non-adhesive Gaskets

Stainless steel door frames extend desiccator life; one-piece fused gaskets are non-outgassing, will not creep or sag

Desiccator Plenum Chamber For Uniform Gas Distribution

Multi-chamber desiccator cabinets include a perforated plenum to minimize back fill, ensure uniform gas distribution to all chambers and increase cabinet strength

Built-in Plenum Distributes Dry Gas to Each Chamber

Manual flowmeter or automated system controls nitrogen flow rates to maintain RH across entire cabinet. Built-in plenum distributes dry gas to each chamber.

Doors - The First Failure Point of a Desiccator Cabinet

Terra’s stainless steel door frames eliminate the need for internal reinforcements, which create particle surfaces and compromise cleaning. Unlike other doors with glue-on anti-bow pieces, Terra’s doors use no adhesives. This eliminates particle traps, sources of outgassing—and extends the strength and service life of the desiccator.

Available Accessories

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
  • 3-inch Diameter Caster Set
    Casters are easily retrofitted for mobility. Products can be rolled out of the way when cleaning or relocated as workflow changes.
  • Humidity and Temperature Data Logger
    Provides a convenient record of storage conditions inside a Desiccator chamber-adjustable logging interval (hours to months), USB port for easy data download in several formats.
  • Dual Purge and NitroWatch
    Terra’s Dual Purge and NitroWatch relative humidity controllers maintain a low-RH set-point inside a desiccator or glove box; they provide variable purge control that ensures continuous positive pressure and eliminates nitrogen waste.
  • Nitrogen Generator
    Terra’s Nitrogen Generators provide a continuous, reliable supply of clean, dry nitrogen up to 99% pure to eliminate dependence on bulky canisters to operate desiccators and glove boxes.
  • Desiccator Cabinet Ionizing Module
    Ionizing modules are available for desiccator cabinets, glove boxes and other enclosures to ensure static-safe storage and processing (shown: ionizing unit on 2-chamber desiccator)
  • Small Powder-Coated Steel Desiccator Stand, 4"H
    Small 4"H powder-coated steel desiccator stand adjusts to fit cabinet snugly; optional casters simplify positioning and cleaning. Also available in stainless steel and 12" height.

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Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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