Modular Wet Cleaning Benches
- Allows HEPA-filtered processing and exhaust ventilation
- Fits beneath Terra's Vertical Laminar Flow Hood (with stand)
- Bi-directional exhaust system safely removes hazardous fumes
- Economical turnkey solutions for a wide range of cleaning requirements
Features & Benefits
Process Control, Safety, and Consistency
Polypropylene
- Economical plastic with broad chemical compatibility
- Ideal for wet processing station panels
- Loses some chemical resistance at high temperatures
- Suitable for HF and KOH processes
Quartz
- The preferred material for ultra-pure applications
- Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
- Suitable for most chemicals (but not HF acid)
- Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
- Broader range of chemical resistance than polypropylene
- Suitable for high process temperatures
- Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
- Resistant to an extremely wide range of chemicals
- Perfect for KOH and HF acid (which etch quartz)
- Softer than quartz, so care must be taken to avoid scuffing, staining
Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.
The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.
Product Application Chart
| Commercial or Generic Name | Process | Chemical Composition | Concentration | Typical Temperature | Recommended Product |
|---|---|---|---|---|---|
| Aqua Regia | Gold Etchant | Hydrochloric Acid (HCl) Nitric Acid (HNO3) | 75% 25% | 90° | C Series |
| Buffered Oxide Etch (BOE) | Etch SiO2 | Ammonium Fluoride (NH4F) Aqueous Hydrofluoric Acid (HF) Aqueous | 40% | 15-40°C Ambient | A Series RCe Series |
| CP8 | Etch | Nitric Acid (HNO3) Hydrofluoric Acid (HF) | Ambient | A Series | |
| Etch (Indium) Molybdenum Platinum Nichrome | Etch | Hydrochloric Acid (HCl) Aqueous Nitric Acid (HNO3) | 37-38% 70-71% | QA Series | |
| Metal Etch | Etch A, AlSi Al Si Cu | Phosphoric Acid (H3PO4) Acetic Acid (CH3COOH) Nitric Acid (HNO3) | 85-87% | 30-60°C | QA Series |
| Nitride Etch | Etch | Phosphoric Acid (H3PO4) DI Water (H20) | 85-87% 15-13% | 150-185°C | Nb Series |
| Organic Stripper | Resist Removal | PRS-1000 S-43 Lozolin No Phenol-922 | Full strength | Room Temperature 120°C | Nb Series |
| Oxide Resist Strip | SiO2 Resist Stripping | Sulfuric Acid (H2SO4) Ammonium Persulfate (NH4S2O2) | 95-96% | QA Series | |
| Phenolic Stripper | Resist Removal | J100 Bermar 712D R-10 | 95-100°C | C Series | |
| Resist Series (Metalized) | Resist Removal | Chromic Sulfuric Acid (CrO3+H2SO4) | A Series | ||
| R.C.A. Clean | Pre-Diffusion Cleans Quartzware | Step 1: Water Hydrogen Peroxide (H2O2) Ammonium Fuoride (NH4CH) Step 2: DI Water (H2O) Hydrogen Peroxide (H2O2) Hydrochloric Acid (HCL) | 40% | 75-85°C | Qa Series |
| Silicon Etch | Etch | Acetic Acid (CH3COOH) Nitric Acid (HNO3) HydroFuoric Acid (HF) | Ambient | A Series | |
| Sirtl Etch | Etch | Chromium Trioxide (CrO3) DI Water (H20) Hydrofluoric Acid (HF) | Ambient | A Series | |
| Slope Etch | Etch | Phosphoric Acid (H3PO4) Acetic Acid (CH3COOH) Nitric Acid (HNO3) | 55°C | Qa Series | |
| Standard Resist Strip (do not use w/aluminum) | SiO2 Resist Strip | Sulfuric Acid (H2SO4) Hydrogen Peroxide (H2O2) | 95-96% | 110-140°C | Qa Series |
| 2:1 Etch | Etch | DI Water (H2O) Hydrofuoric Acid (HF) | Ambient | A Series | |
| Wafer Rinsing | Rinsing | DI Water (H2O) | 100% | Ambient | DR-Series |
Particle Trapping Test
Gooseneck Faucet
Adjustable Rear Baffles
Airflow in Wet Processing
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On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*
- FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
- FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
- FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.
Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.
* Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.