- Available ISO Ratings: ISO 7, ISO 8
• Available ISO Ratings: ISO 7, ISO 8
• ISO Class: ISO 7
• Unit of Measure: of 1
Wet Stations,Hoods for Wet Processing,Hoods for Wet Processing
2001-PP-02
2001-PP-02 71964
Modular Wet Cleaning Benches
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Manufactured By: Terra Universal
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Product Details
Features & Benefits
Features & Benefits
Learn More: Wet Processing Materials
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Process Control, Safety, and Consistency
Polypropylene
- Economical plastic with broad chemical compatibility
- Ideal for wet processing station panels
- Loses some chemical resistance at high temperatures
- Suitable for HF and KOH processes
Quartz
- The preferred material for ultra-pure applications
- Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
- Suitable for most chemicals (but not HF acid)
- Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
- Broader range of chemical resistance than polypropylene
- Suitable for high process temperatures
- Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
- Resistant to an extremely wide range of chemicals
- Perfect for KOH and HF acid (which etch quartz)
- Softer than quartz, so care must be taken to avoid scuffing, staining
Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.
The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.
Product Application Chart
| Commercial or Generic Name | Process | Chemical Composition | Concentration | Typical Temperature | Recommended Product |
|---|---|---|---|---|---|
| Aqua Regia | Gold Etchant | Hydrochloric Acid (HCl) Nitric Acid (HNO3) | 75% 25% | 90° | C Series |
| Buffered Oxide Etch (BOE) | Etch SiO2 | Ammonium Fluoride (NH4F) Aqueous Hydrofluoric Acid (HF) Aqueous | 40% | 15-40°C Ambient | A Series RCe Series |
| CP8 | Etch | Nitric Acid (HNO3) Hydrofluoric Acid (HF) | Ambient | A Series | |
| Etch (Indium) Molybdenum Platinum Nichrome | Etch | Hydrochloric Acid (HCl) Aqueous Nitric Acid (HNO3) | 37-38% 70-71% | QA Series | |
| Metal Etch | Etch A, AlSi Al Si Cu | Phosphoric Acid (H3PO4) Acetic Acid (CH3COOH) Nitric Acid (HNO3) | 85-87% | 30-60°C | QA Series |
| Nitride Etch | Etch | Phosphoric Acid (H3PO4) DI Water (H20) | 85-87% 15-13% | 150-185°C | Nb Series |
| Organic Stripper | Resist Removal | PRS-1000 S-43 Lozolin No Phenol-922 | Full strength | Room Temperature 120°C | Nb Series |
| Oxide Resist Strip | SiO2 Resist Stripping | Sulfuric Acid (H2SO4) Ammonium Persulfate (NH4S2O2) | 95-96% | QA Series | |
| Phenolic Stripper | Resist Removal | J100 Bermar 712D R-10 | 95-100°C | C Series | |
| Resist Series (Metalized) | Resist Removal | Chromic Sulfuric Acid (CrO3+H2SO4) | A Series | ||
| R.C.A. Clean | Pre-Diffusion Cleans Quartzware | Step 1: Water Hydrogen Peroxide (H2O2) Ammonium Fuoride (NH4CH) Step 2: DI Water (H2O) Hydrogen Peroxide (H2O2) Hydrochloric Acid (HCL) | 40% | 75-85°C | Qa Series |
| Silicon Etch | Etch | Acetic Acid (CH3COOH) Nitric Acid (HNO3) HydroFuoric Acid (HF) | Ambient | A Series | |
| Sirtl Etch | Etch | Chromium Trioxide (CrO3) DI Water (H20) Hydrofluoric Acid (HF) | Ambient | A Series | |
| Slope Etch | Etch | Phosphoric Acid (H3PO4) Acetic Acid (CH3COOH) Nitric Acid (HNO3) | 55°C | Qa Series | |
| Standard Resist Strip (do not use w/aluminum) | SiO2 Resist Strip | Sulfuric Acid (H2SO4) Hydrogen Peroxide (H2O2) | 95-96% | 110-140°C | Qa Series |
| 2:1 Etch | Etch | DI Water (H2O) Hydrofuoric Acid (HF) | Ambient | A Series | |
| Wafer Rinsing | Rinsing | DI Water (H2O) | 100% | Ambient | DR-Series |
Products Compliant With Your ISO Rating
Provide Terra with your desired ISO rating. We will tailor the product to meet your rating and supply a certificate of compliance appended to your invoice, to be included in your compliance package. All certificates are archived in Terra's system for quick retrieval.
Gooseneck Faucet
Angled to dispense water in a focused stream, this faucet is made of chemical-resistant PVC
Adjustable Rear Baffles
Adjust air flow direction, speed and volume by changing position of the easy-to-reach baffle plates at the rear of the station countertop.
Airflow in Wet Processing
The standard bench is designed for operation with Terra’s Vertical Laminar Flow Station and features exhaust controls mounted at the rear of the processing area. The Vertical Laminar Flow Station provides a continuous flow of filtered air to the work area.
Industry-Leading Product Quality
At Terra, we strive to produce the highest quality products for our customers. Our product quality is enabled by high-grade manufacturing equipment, over 45 years of engineering expertise, and our commitment to continuously improve.
Wide Selection of Global Shipping Options
Terra offers a broad range of global shipping services including door-to-door and white glove delivery. Each product is safely packaged in a heat-treated wooden crate that meets international shipping standards.
Website Metric Conversion Tool
Easily convert any product specification to metric units of measure using Terra's web-based metric conversion tool
Don't Budge on Your Budget, Save on High-Quality ValuLine Products
Compromising on quality goods with costs can be tiring. Here at Terra, the compromise is over with our wide range of ValuLine products. From cleanrooms to glove boxes, ValuLine products come with a premium quality without sacrificing an affordable price.
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