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Terra Part # Price Ships in
Enclosed Polypropylene ISO 8 ISO 5 Exhaust & Laminar 30" 40" 7020-48-VL-LF 85147 $9,191 1-3 Days 2
In stock soon
Enclosed Polypropylene ISO 8 ISO 5 Exhaust & Laminar 30" 52" 7020-60-VL-LF 85148 $10,520 10-20 Days 3
Enclosed Polypropylene ISO 8 ISO 5 Exhaust & Laminar 30" 64" 7020-72-VL-LF 85149 $12,730 10-20 Days 4
Enclosed Polypropylene ISO 8 N/A Exhaust 30" 40" 7020-48-VL 83866 $5,892 10-20 Days 5
Enclosed Polypropylene ISO 8 N/A Exhaust 30" 52" 7020-60-VL 84009 $6,367 10-20 Days 6
Enclosed Polypropylene ISO 8 N/A Exhaust 30" 64" 7020-72-VL 84011 $7,547 10-20 Days 7
Open Polypropylene ISO 8 N/A Exhaust 30" 47.5" 2020-48-VL 83867 $4,501 1-3 Days 8
Only 1 left in stock
Open Polypropylene ISO 8 N/A Exhaust 30" 59" 2020-60-VL 84010 $5,367 10-20 Days 9
Open Polypropylene ISO 8 N/A Exhaust 30" 71" 2020-72-VL 84013 $6,547 10-20 Days 10
Enclosed Polypropylene ISO 8 N/A Exhaust 30" 40" 7020-48-VL-EX-001 84979 $4,601 1-3 Days 11
Only 1 left in stock
Type
Material
Certified ISO Grade™ Design
ISO Rated™ Air Cleanliness
Airflow Design
Work Area Depth
Work Area Width
Item ordered before. Click on bagde to see the order.

Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

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Usually Ships in:
Free shipping in contiguous USA
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
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Product Details
Product Details
  • Available Certified ISO Grade™ Designs: ISO 8
  • Low cost pre-configured turnkey wet benches for a wide range of applications
  • Open configurations exhaust through back wall, enclosed configurations exhaust through ceiling
  • Options with integrated fan filter unit provide laminar flow for up to ISO 4 air cleanliness to protect samples from contamination
  • Polypropylene construction withstands corrosive chemicals
  • Available in three different widths: 4 ft, 5 ft, and 6 ft
  • Exhaust ducted through a standard 8" diameter flange
  • Select optional accessories for your cleaning processes: Sinks, Spray Guns, Carboys
  • A full line of optional accessories: Sinks, Gooseneck Faucet, Spray Guns, Carboys

Available Certified ISO Grade™ Designs: ISO 8

Certified ISO Grade™ Design: ISO 8

Features & Benefits

Features and Benefits

Learn More: Wet Processing Materials

Process Control, Safety, and Consistency

Polypropylene

  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes

Quartz

  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities

PVDF (polyvinyldilene fluoride)

  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures

PTFE (Teflon®)

  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart

Commercial or Generic Name Process Chemical Composition Concentration Typical Temperature Recommended Product
Aqua Regia Gold Etchant Hydrochloric Acid (HCl)
Nitric Acid (HNO3)
75%
25%
90° C Series
Buffered Oxide
Etch (BOE)
Etch SiO2 Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
40% 15-40°C
Ambient
A Series
RCe Series
CP8 Etch Nitric Acid (HNO3)
Hydrofluoric Acid (HF)
  Ambient A Series
Etch (Indium)
Molybdenum Platinum
Nichrome
Etch Hydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
37-38%
70-71%
  QA Series
Metal Etch Etch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87% 30-60°C QA Series
Nitride Etch Etch Phosphoric Acid (H3PO4)
DI Water (H20)
85-87%
15-13%
150-185°C Nb Series
Organic Stripper Resist Removal PRS-1000
S-43
Lozolin
No Phenol-922
Full strength Room Temperature
120°C
Nb Series
Oxide Resist Strip SiO2 Resist Stripping Sulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96% QA Series
Phenolic Stripper Resist Removal J100
Bermar 712D
R-10
  95-100°C C Series
Resist Series (Metalized) Resist Removal Chromic Sulfuric Acid (CrO3+H2SO4)     A Series
R.C.A. Clean Pre-Diffusion Cleans
Quartzware
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40% 75-85°C Qa Series
Silicon Etch Etch Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
  Ambient A Series
Sirtl Etch Etch Chromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
  Ambient A Series
Slope Etch Etch Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
  55°C Qa Series
Standard Resist Strip (do not use w/aluminum) SiO2 Resist Strip Sulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96% 110-140°C Qa Series
2:1 Etch Etch DI Water (H2O)
Hydrofuoric Acid (HF)
  Ambient A Series
Wafer Rinsing Rinsing DI Water (H2O) 100% Ambient DR-Series

Products Tailored to Your Cleanroom Environment

Provide Terra with your desired ISO Grade™ design. We will tailor the product to meet your criteria and certify it with a report appended to your invoice. Certificate includes all the necessary information to streamline audits and facility compliance.

Enclosed ValuLine™ Polypropylene Wet Cleaning Station

Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.

Customize to Suit Your Needs

Self-contained Wet Cleaning Stations provide the perfect turnkey solution for a wide range of cleaning requirements. Add sinks, gooseneck faucets and spray guns for nitrogen and deionized water to accommodate unique needs of your workflow.

Gooseneck Faucet

Angled to dispense water in a focused stream, this faucet is made of chemical-resistant PVC

Removable Deck Simplifies Cleaning and Maintenance

The removable polypropylene decks safely guide liquids to the bottom drain and prevent parts from falling into the sink. Adjustable vents are also located underneath to improve laminar airflow and ventilation of fumes.

Exhaust Duct Connection For Safe Fume Extraction

Polypropylene wet etching and cleaning stations are equipped with an exhaust duct on the rear or top to safely carry fumes away from workers.

Bottom Storage

Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.

Don't Budge on Your Budget, Save on High-Quality ValuLine Products

Compromising on quality goods with costs can be tiring. Here at Terra, the compromise is over with our wide range of ValuLine products. From cleanrooms to glove boxes, ValuLine products come with a premium quality without sacrificing an affordable price.

Industry-Leading Product Quality

At Terra, we strive to produce the highest quality products for our customers. Our product quality is enabled by high-grade manufacturing equipment, over 45 years of engineering expertise, and our commitment to continuously improve.

Wide Selection of Global Shipping Options

Terra offers a broad range of global shipping services including door-to-door and white glove delivery. Each product is safely packaged in a heat-treated wooden crate that meets international shipping standards.

Website Metric Conversion Tool

Easily convert any product specification to metric units of measure using Terra's web-based metric conversion tool

Network of International Reps

Terra employs an international network of more than 20 local sales reps trained to provide comprehensive service on Terra's complete catalog of products
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