Terra Part # 7018-00

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Wet Cleaning Station; 84"W x 43"D x 72"H, Polypropylene
  • Overall Dimensions: 84"W x 43"D x 72"H (2134 mm x 1092 mm x 1829 mm); Work Area Dimensions: 72"W x 24"D (1829 mm x 610 mm)
  • Material: Stress-relieved white polypropylene, 1/2" (13 mm) thick
  • Standard plumbing is PVC (specify stainless steel or other desired material)
  • Exhaust is ducted through a standard 10" (254 mm)-diameter flange positioned at the top rear of cabinet
  • (specify other desired flange diameter or location)
  • Instrument panel provides power switch, power indicating light, light switch, static pressure
  • Exhaust meter and power fuse

Type: Cleaning Station

Material: Polypropylene

Work Area Width: 72"

Work Area Depth: 24"

Unit of Measure: EA

Weight, Product: 843 lb

Dimensions, Product: 84" W x 43" D x 72" H

Weight, Shipping: 1,050 lb

Dimensions, Shipping: 49" W x 90" D x 84" H

Package Type: Crate

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  1. WhisperFlow™ HEPA Fan Filter Unit includes unique baffle and anodized aluminum diffuser to promote uniform air speed | 6601-23-H displayed
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  2. WhisperFlow™ HEPA Fan Filter Unit includes unique baffle and anodized aluminum diffuser to promote uniform air speed | 6601-23-H displayed
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  3. WhisperFlow™ HEPA Fan Filter Unit includes unique baffle and anodized aluminum diffuser to promote uniform air speed | 6601-23-H displayed
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  4. WhisperFlow™ HEPA Fan Filter Unit includes unique baffle and anodized aluminum diffuser to promote uniform air speed | 6601-23-H displayed
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  5. Provides a stream of static-neutralizing ions to protect ESD-sensitive components. | 2005-16A displayed
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  6. Offers excellent chemical resistance and easy cleaning | 7018-22 displayed
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  7. Shown with optional liquid overfill sensor. | 2800-75 displayed
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  8. Shown with optional liquid overfill sensor. | 2800-75 displayed
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  9. Shown with optional liquid overfill sensor. | 2800-75 displayed
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  10. Duplex Power Outlet; GFCI-Type for Wet Processing Installed; 120VAC, 50/60Hz
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  11. Duplex power outlet: 120VAC shown. | 6704-34 displayed
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  12. FasTrak 24-7 Expediting Service
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  13. Qualification Documentation (IQ/OQ) for Terra Universal System
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Features and Benefits

Wet Processing: Which Material is Best?
Process Control, Safety, and Consistency
  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won’t scuff, stain, or absorb impurities
PVDF (polyvinyldilene fluoride)
  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperatures
PTFE (Teflon®)
  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining

Terra’s comprehensive range of constant-temperature baths, etching baths, dump risers, and other processing equipment is ideally suited for the high-purity requirements of the semiconductor industry. Microprocessor controls ensure the integrity of your operations.

The chart below indicates the baths best suited for common semiconductor operations. Once you select the equipment that meets your requirements, a Terra process engineer will help configure a turnkey solution.

Product Application Chart
Commercial or Generic NameProcessChemical CompositionConcentrationTypical TemperatureRecommended Product
Aqua RegiaGold EtchantHydrochloric Acid (HCl)
Nitric Acid (HNO3)
90°C Series
Buffered Oxide
Etch (BOE)
Etch SiO2Ammonium Fluoride (NH4F) Aqueous
Hydrofluoric Acid (HF) Aqueous
A Series
RCe Series
CP8EtchNitric Acid (HNO3)
Hydrofluoric Acid (HF)
 AmbientA Series
Etch (Indium)
Molybdenum Platinum
EtchHydrochloric Acid (HCl) Aqueous
Nitric Acid (HNO3)
 QA Series
Metal EtchEtch A,
AlSi Al Si Cu
Phosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
85-87%30-60°CQA Series
Nitride EtchEtchPhosphoric Acid (H3PO4)
DI Water (H20)
150-185°CNb Series
Organic StripperResist RemovalPRS-1000
No Phenol-922
Full strengthRoom Temperature
Nb Series
Oxide Resist StripSiO2 Resist StrippingSulfuric Acid (H2SO4)
Ammonium Persulfate (NH4S2O2)
95-96%QA Series
Phenolic StripperResist RemovalJ100
Bermar 712D
 95-100°CC Series
Resist Series (Metalized)Resist RemovalChromic Sulfuric Acid (CrO3+H2SO4)  A Series
R.C.A. CleanPre-Diffusion Cleans
Step 1: Water
Hydrogen Peroxide (H2O2)
Ammonium Fuoride (NH4CH)
Step 2: DI Water (H2O)
Hydrogen Peroxide (H2O2)
Hydrochloric Acid (HCL)
40%75-85°CQa Series
Silicon EtchEtchAcetic Acid (CH3COOH)
Nitric Acid (HNO3)
HydroFuoric Acid (HF)
 AmbientA Series
Sirtl EtchEtchChromium Trioxide (CrO3)
DI Water (H20)
Hydrofluoric Acid (HF)
 AmbientA Series
Slope EtchEtchPhosphoric Acid (H3PO4)
Acetic Acid (CH3COOH)
Nitric Acid (HNO3)
 55°CQa Series
Standard Resist Strip (do not use w/aluminum)SiO2 Resist StripSulfuric Acid (H2SO4)
Hydrogen Peroxide (H2O2)
95-96%110-140°CQa Series
2:1 EtchEtchDI Water (H2O)
Hydrofuoric Acid (HF)
 AmbientA Series
Wafer RinsingRinsingDI Water (H2O)100%AmbientDR-Series
Particle Trapping Test

Polypropylene Wet Cleaning Station

Standard models include a reinforced cabinet of the specified size and material, a sliding access shield, and a fluorescent illuminator; modular desk allows positioning of tanks and sinks to suit your process.

Ideal for RCA Silicon Wafer Cleaning, Wet Etching and Rinsing

Polypropylene wet stations are ideal for removing organic residue and films from silicon wafers. HEPA fan filter units mounted on top supply Class 100 ultra-low particulate airflow. Vents along the back wall help maintain laminar airflow to prevent contamination and draw away potent fumes to the exhaust duct.

Customize to Suit Your Needs

Self-contained Wet Cleaning Stations provide the perfect turnkey solution for a wide range of cleaning requirements. Add sinks, gooseneck faucets and spray guns for nitrogen and deionized water to accommodate unique needs of your workflow.

Removable Deck Simplifies Cleaning and Maintenance

The removable perforated polypropylene decks safely guide liquids to the bottom drain and prevent parts from falling into the sink. Adjustable vents are also located underneath to improve laminar airflow and ventilation of fumes.

Exhaust Duct Connection For Safe Fume Extraction

Polypropylene wet etching and cleaning stations are equipped with an exhaust duct to safely carry fumes away from workers.

Adjustable Transparent Sash

The PVC sliding shield protects workers from contact with chemical fumes. Variable positioning helps control laminar air speeds.

Bottom Storage

Spacious storage area under the work surface holds reserve chemicals or carboys. Access doors easily slide open or closed.

Wide Selection of Global Shipping Options

Terra offers a broad range of global shipping services including door-to-door and white glove delivery. Each product is safely packaged in a heat-treated wooden crate that meets international shipping standards.

Network of International Reps

Terra employs an international network of more than 20 local sales reps trained to provide comprehensive service on Terra's complete catalog of products
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Sinks for Every Chemical Process

    Many sink sizes and materials, including polypropylene (shown), PVDF and stainless steel, offer broad chemical resistance and easy cleaning; carboys collect run-off for easy disposal.
  • Vacuum Quick Connector – No Tools Required to Connect and Disconnect

    Convenient quick connectors couple by pushing stem into body until it click. Decouples by pulling body sleeve away.
  • N2 and DI Water Spray Guns

    Handy spray guns provide a ready sources of nitrogen or deionized water installed in locations to suit your process requirements (shown: DI water spray gun installed on cleaning station).

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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