No. 9130-21A (for 200mm wafer carriers), shown with optional 304 stainless steel door frames, humidity controllers, and stand.
Custom designs available for
any wafer box or other carrier size—
Just let us know your requirements!
No. 9130-23A (for 300 mm wafers), shown with optional 304 stainless steel door frames
Wafer Box Desiccators
Preserves moisture-sensitive wafers in a dry, particle-free environment
Automated nitrogen controls maintain user-selected humidity level (ambient down to 0% RH)
Engineered for optimal storage density of 200mm or 300mm wafers (in most standard cassettes and lot boxes)
Available in strong, rigid acrylic or static-dissipative PVC, which protects against static charges and the particles they attract
Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel
These Wafer Desiccators are designed specifically for standard lot boxes used for 200mm and 300mm wafers.
Advanced Construction for Unsurpassed Performance
Like Terra's other desiccator lines, they feature the most advanced features available for performance and durability.
All cabinets are designed and fabricated using the latest-generation CAD/CNC equipment, ensuring the perfect form and fit required for optimal sealing. Because all system components are standardized, replacement and optional parts can be ordered at any time. Cabinets feature a plenum chamber for even gas distribution. See pages 78-79 for information on humidity controllers.
For optimal sealing and extended service life, select Terra's optional stainless steel door frames, which reinforce the plastic doors and improve seals. Stainless steel door frames include one-piece nonadhesive gaskets guaranteed not to sag or migrate, even in an ultra-dry environment. See page 144 for more information on these options.
Locking LiftLatches™, standard with each cabinet, allow contents to be securely locked. They also remove wear from doors and hinges by eliminating the rotary stress caused by conventional latches. Latches and tamper-proof hinges are chrome plated for cleanliness and durability.
Available in Static-Dissipative PVC for long-lasting
ESD & particle control.
1- Based on box size of 10.75"W x 10.94"D x 9.88"H (Empac No. TR-08A). Capacity based on four boxes per chamber.
2- Based on box size of 15.06"W x 10.5"D x 12.81"H (Empac No. SX300 01). Capacity based on two boxes per chamber.
*Acrylic is damaged by alcohol and other cleaning agents.
Provides a convenient record of storage conditions! Placed in a desiccator or glovebox, this compact device accumulates humidity and temperature data at specified intervals for hours, days, weeks, even months. USB connection lets you import and display data in several formats.
