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- Continuously
recirculate process gas through a HEPA or ULPA filter to
remove particles, aerosols, microbes, chemical powders,
and other fine contaminants.
- A
variety of open/closed-loop configurations allow 100% exhaust,
100% recirculation, or a mixture of filtered and fresh make-up
ai
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| Open-Loop
Filtration Module |
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| Closed-Loop
Filtration Module |
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