These WIP racks safeguard delicate products while making
optimal use of valuable cleanroom space.
Their shelves optimize the vertical laminar airflow inside
a cleanroom and minimize the possibility of particle accumulation.
Choose between rod shelves, made of .25"-diameter rods on
2" centers, or shelves with .75"-diameter perforations, which
provide approximately 40% open space. Both shelf types are
mounted at a 17° angle to position WIP boxes securely
against a rear retaining rod. Side flanges keep materials
from slipping off the side edges. Shelves are designed for
optimal storage densities of common wafer transport cassettes
and WIP boxes (see ordering chart for capacities)
All models feature polypropylene leveling feet. 304 stainless
steel mounting plates are also available (see below). Racks
can also be customized to accommodate special parts or capacity
requirements; just send us your specifications.
| NOTE: 150mm capacities
are based on the following: lower end, Fluoroware model
PA182-50MB wafer cassette, upper end, Empak model TR15-01
wafer box. 200mm capacities are based on Empak model HA200
wafer box. |
| NOTE: Capacities are
based on Empak model HS300-02B. All capacities are based
on one row of cassettes per shelf. |
|
Other WIP Storage
Solutions
Select a standard unit, or
put Terra's design and fabrication experience to work
on a system customized to your specs! |
 |
Wall-Recessed WIP
Storage Cabinet
Made of all-electropolished stainless steel,
this cabinet fits into a cleanroom wall cut-out to eliminate
floorspace requirements altogether!
The model shown features five shelves made
of .25"-diameter rods on 2" centers. Dimensions: 48"W
x 12"D x 60"H. Call for specify other sizes or configurations!
| Cat.# |
$/Each |
|
9611-90 |
Login |
|
| |
|
 |
Wall-Mount WIP
Racks
Made of electropolished 304 stainless steel rods, these
wall-mount WIP racks can be modified to accommodate
other WIP storage boxes. Call with your requirements!
| For
200mm Wafer Lot Boxes |
Capacity |
Cat.# |
$/Each |
One |
9611-91 |
Login |
Two |
9611-92 |
Login |
Three |
9611-93 |
Login |
Four |
9611-94 |
Login |
|
| |
|
 |
WIP Rack with
Polypropylene Liners
These racks are ideal for WIP storage of quartz
tubes and large fab tools that may have surface
chemical residues. The polypropylene liners resist
most acids and can be easily removed for cleaning.
Racks can be customized for your application.
|
Cat.# |
$/Each |
|
Model
Shown |
9611-95 |
Login |
|