 |
| Temperature stability of
± 0.5°C when operated together with the RCe
Recirculation Heater/Chiller and C21b Controller. |
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A Series Constant Temperature Bath
- Precisely controlled low- or high-temperature processing
(when used with RCe recirculating module)
- Natural polypropylene tank is ideal for etching, stripping,
and developing with HF, KOH, CrO, and other chemistries
(PVDF also available)
- Also functions as a stand-alone ambient-temperature bath
- Includes pneumatic drain, Teflon® magnetic
stirrer, and clear PVC safety cover
Operated in tandem with the RCe Circulator/Controller (see below),
the A Series Constant Temperature Bath provides precise high-
and low-temperature processing.
Standard models are made of natural polypropylene (bath and
immersion coil) and operate in the 10 - 60°C range. PVDF
models are also available for operation in the 10 - 140°C
range. The integral magnetic stirrer enhances temperature
control. A clear PVC safety cover reduces evaporation and
enhances safety.
Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application.
| Processing
Modules |
Model
below accommodates a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
 |
Cat.
# |
$/Each |
| A
Series* |
7018-32 |
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|
| Corresponding Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C21bLSS |
o |
o |
x |
x |
x |
|
o |
x |
|
v |
7018-37 |
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Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional)
*Selection of RCe module provides heating/cooling capabilities to the A or F Serries modules. Model listed is polypropylene; PVDF also available. |
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