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Wet Processing Stations and Equipment
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Wet Processing Stations and Equipment

Terra's Module Wet Processing and Cleaning Stations provide economical solutions for semiconductor wafer processing.

Select modular wet benches or fully enclosed cabinets, along with a complete line of laminar flow hoods, baths, rinsers, and other equipment.


Modular Wet Processing and Cleaning Systems
Wet Processing and Cleaning Overview
Integrated Cabinets
Modular Stations
Narrow-Profile Stations
Modular Stations—System Options

 
System Accessories
Gooseneck & Spray Guns
Custom Applications
Processing Tanks
Carboys (Reservoirs)
Ultrasonic Tanks
Processing Baths Overview
  - DR Series Wafer Dump Rinser
  - Qa Series Quartz Constant-Temperature Bath
  - C Series Stripper Bath
  - Nb Series Silicon Nitride Etch Bath
  - A Series Constant Temperature Bath
  - F Series Subambient Filtered Etch Bath
  - RCe Recirculating Heater/Chiller
Robotic Transfer
Fire Detection System
Remote Control Hot Plates
Solvent Spray Booth
Precision Cleaning Station
Chemical Storage and Transport
Enclosed Safety Shower
 
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Wet Processing Stations & Equipment
Modular Wet Processing & Cleaning Systems
System Accessories

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All prices and specifications are subject to change without notice. Crating charges apply to selected items.
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