Wet Station QuickQuote

Please provide as much information as possible about your application. A Terra Design Specialist will call to clarify your requirements and prepare a detailed quotation. If you wish to discuss your application with a Sales Associate prior to submitting a form, please call 714-578-6000.

Air Flow Control

Exhaust Control Only
Laminar Flow Only
Laminar Flow and Exhaust

Laminar flow/Exhaust Flow on Tera's Wet Processing Cabinet

Laminar flow/Exhaust Flow on Terra's Wet Processing Station

Material

		Polypropylene (for processes requiring acid)
		304 Stainless Steel (for processes requiring solvents)

General Processing Requirements

Tell us about your application. To ensure a safe, effective system, please provide information on —

	Chemicals*		Exhaust fume ventilation
	Temperature		Product size type and size (e.g.. 8" wafers)
	Chemical concentration		Other facility requirements
	Deck size and layout
	*Acid processes require a polypropylene station. Solvent processes require a 304 stainless steel station

Available Process Baths and Rinsers

Qty Wafer Dump Rinser (DR Series)
	Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power Voltage: 105/125VAC, single phase, 50/60Hz) Tank Material Polypropylene PVDF Fittings Material Polypropylene Fittings Teflon Fittings
Qty Quartz Constant Temperature Bath (Qa Series)
	Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power Voltage: 208/240VAC, single phase, 50/60Hz) Drain Type Gravity Drain Valve Pneumatic Drain Size .5" .75" Aspirator (Dilution) Valve Option Magnetic Stirrer Option
Qty Stripper Bath (C Series)
	Size Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power: Voltage: 208/240VAC, single phase, 50/60Hz) Drain Type Gravity Drain Valve Pneumatic Drain Size .5" .75" Magnetic Stirrer Option
Qty Silicon Nitride Etch Bath (Nb Series)
	Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power Voltage: 208/240VAC, single phase, 50/60Hz) Drain Type Gravity Drain Valve Pneumatic Drain Size .5" .75" Aspirator (Dilution) Valve Option
Qty Constant Temperature Bath (A Series)
	Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power Voltage: 208/240VAC, single phase, 50/60Hz) Tank Material Polypropylene PVDF
Qty Subambient Filtered Etch Bath (F Series)
	Capacity* (Deck Area) *Standard cassette(s) for specified wafer size.	(Power Voltage: 208/240VAC, single phase, 50/60Hz) Bath Material Polypropylene PVDF Liquid Flow Sensor Kit
Qty Recirculating Heater/Chiller
	Material Polypropylene Voltage 115VAC 230VAC

Custom Tanks and Sinks

Internal Tank Dimensions

Desired Material

PVDF 304 Stainless Steel

Polypropylene Other

What is you process chemistry?

Other Features

Dump valve Lid

Fill sensor Submergible ultra-sonic transducer

Overflow sensor Condensing coil

Nitrogen bubbler Submergible heater

PLC Control Aspirator

Spray bars Overflow catch basin

Please specify dimensions and options for additional sinks in a multi-sink station.

Ultra-Sonic Tanks

	Qty Tank ID (W" x L" x D")
	12" x 12" x 10"	Standard Power 120V 240V
	16" x 22" x 16"	Class I, Div. II Power 120V 240V
	18" x 18" x 16"
	18" x 26" x 18"

Other Options

Qty
Gooseneck Faucet

N₂ Spray Gun

DI Water Spray Gun

Venturi-style Aspirator Drain

Glove Rinser

Fire Detection

Chemical Collection/Reclamation Carboy

Qty
Hot Plate

Power Outlets 115 VAC

Power Outlets 230 VAC

Vacuum Facility

Compressed Air Facility

DI Water Purification System

Chemical Carts and Cabinets

Certification/Safety/Compliance Requirements

Tell us about your application

	Compliance Testing/Certification. Specify pertinent agency listing (UL, ETL, CSA, OSHA, etc.)
	Seismic Constraints

Provide Contact Information

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